tilt,defocus [nm],defocus after align [nm],alpha,beta
  -1.0471976, -4706.9453718, -4551.1275758,    1.0728527,    3.1043126  
  -1.0122910, -4676.0208083, -4477.9535457,    1.0379709,    3.1035682  
  -0.9773844, -4675.3578773, -4518.3008327,    1.0030901,    3.1027452  
  -0.9424778, -4683.6807218, -4553.1545251,    0.9682104,    3.1018364  
  -0.9075712, -4663.9883102, -4584.4880022,    0.9333321,    3.1008333  
  -0.8726646, -4836.7991575, -4744.5620290,    0.8984553,    3.0997260  
  -0.8377580, -4828.0380802, -4763.3014924,    0.8635802,    3.0985030  
  -0.8028515, -4633.7803594, -4567.5407354,    0.8287070,    3.0971508  
  -0.7679449, -4800.4791079, -4779.6376737,    0.7938361,    3.0956533  
  -0.7330383, -4771.7201404, -4761.2676633,    0.7589676,    3.0939915  
  -0.6981317, -4764.0245038, -4734.2321788,    0.7241021,    3.0921426  
  -0.6632251, -4626.3761448, -4569.4835291,    0.6892400,    3.0900793  
  -0.6283185, -4731.1655094, -4688.4789773,    0.6543818,    3.0877682  
  -0.5934119, -4872.8173014, -4829.2963430,    0.6195282,    3.0851683  
  -0.5585054, -4635.7415850, -4580.3216690,    0.5846800,    3.0822291  
  -0.5235988, -4690.7615742, -4688.3874443,    0.5498384,    3.0788868  
  -0.4886922, -4573.2070174, -4569.6411052,    0.5150045,    3.0750606  
  -0.4537856, -4607.8819694, -4602.7093068,    0.4801803,    3.0706462  
  -0.4188790, -4637.2567373, -4631.8659266,    0.4453679,    3.0655067  
  -0.3839724, -4600.7984772, -4595.3760931,    0.4105703,    3.0594587  
  -0.3490659, -4677.4056687, -4672.6656337,    0.3757917,    3.0522514  
  -0.3141593, -4569.9209830, -4565.0847686,    0.3410378,    3.0435317  
  -0.2792527, -4616.1706212, -4612.6152274,    0.3063173,    3.0327874  
  -0.2443461, -4532.5154210, -4529.2992298,    0.2716427,    3.0192462  
  -0.2094395, -4538.4063236, -4535.8846688,    0.2370344,    3.0016881  
  -0.1745329, -4616.9756445, -4614.8559933,    0.2025263,    2.9780692  
  -0.1396263, -4552.5492398, -4550.7972423,    0.1681801,    2.9446973  
  -0.1047198, -4568.8293401, -4567.5271744,    0.1341202,    2.8941931  
  -0.0698132, -4314.3344347, -4313.2587135,    0.1006380,    2.8095988  
  -0.0349066, -4507.5131219, -4507.0923355,    0.0685845,    2.6434194  
   0.0000000, -4464.4436927, -4464.2069752,    0.0414213,    2.2295228  
   0.0349066, -4535.5045638, -4535.4143439,    0.0341129,    1.2873658  
   0.0698132, -4454.9919288, -4454.8935357,    0.0552061,    0.6353390  
   0.1047198, -4497.8630064, -4497.5120619,    0.0858360,    0.3919136  
   0.1396263, -4447.8683555, -4446.9066613,    0.1188443,    0.2798193  
   0.1745329, -4526.0959467, -4524.3504607,    0.1526964,    0.2169824  
   0.2094395, -4431.3606432, -4428.2520948,    0.1869345,    0.1771198  
   0.2443461, -4506.6257188, -4501.9359728,    0.2213794,    0.1496891  
   0.2792527, -4543.2615184, -4536.4746409,    0.2559477,    0.1297091  
   0.3141593, -4506.0857875, -4506.0617948,    0.2905954,    0.1145360  
   0.3490659, -4439.1683227, -4426.5369029,    0.3252970,    0.1026409  
   0.3839724, -4574.1709281, -4556.8951724,    0.3600370,    0.0930797  
   0.4188790, -4526.6984926, -4506.4715775,    0.3948052,    0.0852385  
   0.4537856, -4522.5741029, -4496.4984796,    0.4295948,    0.0787013  
   0.4886922, -4486.4814475, -4456.2803076,    0.4644010,    0.0731762  
   0.5235988, -4468.8718288, -4431.2972710,    0.4992202,    0.0684526  
   0.5585054, -4414.7497348, -4367.0818315,    0.5340499,    0.0643744  
   0.5934119, -4339.2481973, -4298.2998589,    0.5688882,    0.0608241  
   0.6283185, -4541.3843993, -4504.7111696,    0.6037335,    0.0577109  
   0.6632251, -4422.2403076, -4392.4083362,    0.6385848,    0.0549642  
   0.6981317, -4481.2232630, -4446.7441426,    0.6734410,    0.0525278  
   0.7330383, -4493.1074694, -4484.1863092,    0.7083014,    0.0503567  
   0.7679449, -4458.8381005, -4441.6036144,    0.7431655,    0.0484144  
   0.8028515, -4424.5687315, -4427.4534755,    0.7780327,    0.0466709  
   0.8377580, -4630.3253966, -4599.1828488,    0.8129025,    0.0451015  
   0.8726646, -4247.8742657, -4188.9346658,    0.8477747,    0.0436856  
   0.9075712, -4392.0841253, -4331.5572919,    0.8826490,    0.0424058  
   0.9424778, -4338.0578532, -4277.6029458,    0.9175251,    0.0412476  
   0.9773844, -4261.8915996, -4142.0818795,    0.9524027,    0.0401986  
   1.0122910, -4247.5378888, -4072.6254866,    0.9872818,    0.0392482  
   1.0471976, -4241.8576950, -4063.8970227,    1.0221621,    0.0383873