tilt,defocus [nm],defocus after align [nm],alpha,beta
  -1.0471976, -3748.0286342, -3579.7931074,    1.1381462,    3.1302895  
  -1.0122910, -5197.2884401, -5103.8814028,    1.1032419,    3.1300972  
  -0.9773844, -5070.9066834, -4964.5208827,    1.0683376,    3.1298838  
  -0.9424778, -4975.4646849, -4860.5838012,    1.0334335,    3.1296474  
  -0.9075712, -4999.9255267, -4927.3230912,    0.9985295,    3.1293862  
  -0.8726646, -4946.6743070, -4894.8320969,    0.9636255,    3.1290977  
  -0.8377580, -4820.6341527, -4764.4680601,    0.9287217,    3.1287792  
  -0.8028515, -4765.9505445, -4740.4699556,    0.8938181,    3.1284276  
  -0.7679449, -5017.2180805, -4997.8947739,    0.8589146,    3.1280392  
  -0.7330383, -4890.0243175, -4902.5147273,    0.8240114,    3.1276097  
  -0.6981317, -4934.8629286, -4916.6633399,    0.7891083,    3.1271338  
  -0.6632251, -4896.6458263, -4887.8939801,    0.7542055,    3.1266056  
  -0.6283185, -4969.9747894, -4963.4408764,    0.7193030,    3.1260175  
  -0.5934119, -4885.6324728, -4887.8676181,    0.6844008,    3.1253609  
  -0.5585054, -4927.7618719, -4938.1525117,    0.6494990,    3.1246248  
  -0.5235988, -4942.7866914, -4956.2520952,    0.6145977,    3.1237962  
  -0.4886922, -4818.7299548, -4829.2457743,    0.5796969,    3.1228585  
  -0.4537856, -4851.5780582, -4860.4009615,    0.5447968,    3.1217910  
  -0.4188790, -4875.8599483, -4883.0444952,    0.5098975,    3.1205674  
  -0.3839724, -4913.5796617, -4920.4777762,    0.4749992,    3.1191535  
  -0.3490659, -4832.3335003, -4837.2951075,    0.4401020,    3.1175043  
  -0.3141593, -4751.3151424, -4754.4492070,    0.4052064,    3.1155592  
  -0.2792527, -4783.4494325, -4785.8742240,    0.3703127,    3.1132351  
  -0.2443461, -4856.6895622, -4858.0100798,    0.3354215,    3.1104137  
  -0.2094395, -4747.2674448, -4748.1853230,    0.3005338,    3.1069222  
  -0.1745329, -4714.0281839, -4714.1257785,    0.2656508,    3.1024971  
  -0.1396263, -4743.3132997, -4742.7138677,    0.2307749,    3.0967153  
  -0.1047198, -4765.4515136, -4765.0245544,    0.1959096,    3.0888533  
  -0.0698132, -4528.6317947, -4527.6530175,    0.1610619,    3.0775615  
  -0.0349066, -4724.6146859, -4723.9971083,    0.1262464,    3.0600049  
   0.0000000, -4682.4198885, -4681.2595883,    0.0915000,    3.0290518  
   0.0349066, -4550.4534980, -4549.7768307,    0.0569489,    2.9603175  
   0.0698132, -4588.7317263, -4588.5861506,    0.0234727,    2.6891039  
   0.1047198, -4541.3682901, -4541.4132851,    0.0171932,    0.6395801  
   0.1396263, -4495.7176475, -4495.7194781,    0.0497705,    0.2077513  
   0.1745329, -4663.5516716, -4663.3419841,    0.0842345,    0.1222684  
   0.2094395, -4672.9318003, -4672.0334926,    0.1189565,    0.0865739  
   0.2443461, -4593.9192100, -4592.1314521,    0.1537619,    0.0670498  
   0.2792527, -4547.0835285, -4544.0105402,    0.1886044,    0.0547584  
   0.3141593, -4519.5364688, -4515.1805342,    0.2234667,    0.0463203  
   0.3490659, -4547.2976196, -4543.6957904,    0.2583408,    0.0401766  
   0.3839724, -4631.6294467, -4622.7838042,    0.2932225,    0.0355094  
   0.4188790, -4520.2268842, -4508.2361879,    0.3281094,    0.0318481  
   0.4537856, -4545.0194714, -4530.3670137,    0.3629999,    0.0289029  
   0.4886922, -4580.7082399, -4561.8966192,    0.3978931,    0.0264858  
   0.5235988, -4516.9904957, -4495.1586179,    0.4327884,    0.0244691  
   0.5585054, -4517.7320746, -4518.8619331,    0.4676853,    0.0227636  
   0.5934119, -4426.8765821, -4405.5577096,    0.5025834,    0.0213045  
   0.6283185, -4452.8259048, -4442.5496523,    0.5374825,    0.0200442  
   0.6632251, -4520.7739358, -4509.7094971,    0.5723825,    0.0189464  
   0.6981317, -4444.1643860, -4430.2634152,    0.6072831,    0.0179833  
   0.7330383, -4562.6996120, -4561.5236070,    0.6421844,    0.0171333  
   0.7679449, -4512.6719005, -4506.7346618,    0.6770860,    0.0163791  
   0.8028515, -4626.9757339, -4629.8348228,    0.7119881,    0.0157067  
   0.8377580, -4390.3921347, -4387.5598532,    0.7468906,    0.0151051  
   0.8726646, -4593.5948685, -4579.1213030,    0.7817933,    0.0145650  
   0.9075712, -4696.6209253, -4702.6247372,    0.8166963,    0.0140787  
   0.9424778, -4776.2866556, -4782.5631959,    0.8515996,    0.0136399  
   0.9773844, -4855.9523860, -4862.7634633,    0.8865030,    0.0132432  
   1.0122910, -4643.6991342, -4607.7512918,    0.9214066,    0.0128843  
   1.0471976, -4668.7411205, -4623.7723697,    0.9563104,    0.0125591