All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.154, 1.197, -0.558
-58.0, -0.159, 1.243, -0.410
-56.0, -0.150, 1.164, -0.271
-54.0, -0.142, 1.041, -0.182
-52.0, -0.133, 0.934, -0.115
-50.0, -0.124, 0.825, -0.050
-48.0, -0.117, 0.717, 0.027
-46.0, -0.108, 0.622, 0.057
-44.0, -0.084, 0.536, 0.009
-42.0, -0.081, 0.516, 0.173
-40.0, -0.092, 0.471, 0.239
-38.0, -0.088, 0.441, 0.255
-36.0, -0.085, 0.417, 0.330
-34.0, -0.077, 0.384, 0.345
-32.0, -0.072, 0.354, 0.261
-30.0, -0.061, 0.294, 0.275
-28.0, -0.054, 0.239, 0.272
-26.0, -0.046, 0.173, 0.277
-24.0, -0.039, 0.123, 0.232
-22.0, -0.033, 0.070, 0.216
-20.0, -0.029, 0.020, 0.159
-18.0, -0.048, -0.008, 0.150
-16.0, -0.066, -0.017, 0.158
-14.0, -0.079, -0.011, 0.124
-12.0, -0.084, 0.018, 0.145
-10.0, -0.087, 0.034, 0.147
-8.0, -0.085, 0.045, 0.182
-6.0, -0.079, 0.073, 0.183
-4.0, -0.068, 0.042, -0.006
-2.0, -0.064, 0.064, 0.135
0.0, -0.021, -0.007, 0.071
0.0, 0.118, -0.333, -0.047
2.0, 0.121, -0.356, -0.137
4.0, 0.121, -0.353, -0.214
6.0, 0.122, -0.372, -0.217
8.0, 0.124, -0.364, -0.247
10.0, 0.124, -0.346, -0.267
12.0, 0.126, -0.338, -0.294
14.0, 0.126, -0.301, -0.264
16.0, 0.127, -0.258, -0.299
18.0, 0.128, -0.234, -0.197
20.0, 0.137, -0.158, -0.216
22.0, 0.112, -0.086, -0.109
24.0, 0.109, -0.104, -0.111
26.0, 0.107, -0.122, -0.102
28.0, 0.100, -0.127, -0.068
30.0, 0.098, -0.178, -0.154
32.0, 0.093, -0.188, -0.122
34.0, 0.087, -0.223, -0.177
36.0, 0.083, -0.234, -0.163
38.0, 0.074, -0.216, -0.222
40.0, 0.070, -0.215, -0.200
42.0, 0.060, -0.206, -0.148
44.0, 0.053, -0.176, -0.102
46.0, 0.045, -0.172, -0.043
48.0, 0.036, -0.203, 0.075
50.0, 0.027, -0.246, 0.098
52.0, 0.014, -0.291, 0.129
54.0, 0.001, -0.323, 0.133
56.0, -0.014, -0.364, 0.171
58.0, -0.027, -0.405, 0.217
60.0, -0.024, -0.401, 0.224

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.227, 1.808, 0.030
-58.0, -0.227, 1.808, 0.128
-56.0, -0.214, 1.683, 0.230
-54.0, -0.202, 1.522, 0.304
-52.0, -0.190, 1.379, 0.336
-50.0, -0.179, 1.235, 0.351
-48.0, -0.169, 1.098, 0.371
-46.0, -0.158, 0.967, 0.360
-44.0, -0.129, 0.850, 0.329
-42.0, -0.117, 0.800, 0.566
-40.0, -0.135, 0.743, 0.582
-38.0, -0.133, 0.698, 0.582
-36.0, -0.128, 0.645, 0.672
-34.0, -0.118, 0.584, 0.672
-32.0, -0.111, 0.531, 0.574
-30.0, -0.096, 0.455, 0.574
-28.0, -0.084, 0.362, 0.587
-26.0, -0.073, 0.267, 0.587
-24.0, -0.062, 0.198, 0.517
-22.0, -0.052, 0.138, 0.517
-20.0, -0.047, 0.079, 0.473
-18.0, -0.071, 0.052, 0.473
-16.0, -0.098, 0.050, 0.521
-14.0, -0.117, 0.062, 0.521
-12.0, -0.126, 0.099, 0.571
-10.0, -0.131, 0.099, 0.571
-8.0, -0.126, 0.093, 0.605
-6.0, -0.115, 0.099, 0.605
-4.0, -0.096, 0.064, 0.384
-2.0, -0.080, 0.079, 0.384
0.0, -0.021, -0.025, 0.071
0.0, -0.056, -0.061, 0.350
2.0, -0.050, -0.095, 0.372
4.0, -0.048, -0.090, 0.372
6.0, -0.046, -0.092, 0.410
8.0, -0.043, -0.069, 0.410
10.0, -0.041, -0.024, 0.418
12.0, -0.037, -0.002, 0.418
14.0, -0.036, 0.062, 0.490
16.0, -0.032, 0.111, 0.490
18.0, -0.028, 0.129, 0.619
20.0, -0.025, 0.216, 0.619
22.0, -0.053, 0.300, 0.736
24.0, -0.057, 0.283, 0.736
26.0, -0.061, 0.262, 0.722
28.0, -0.068, 0.262, 0.722
30.0, -0.072, 0.220, 0.589
32.0, -0.078, 0.196, 0.589
34.0, -0.085, 0.177, 0.511
36.0, -0.091, 0.172, 0.511
38.0, -0.102, 0.216, 0.423
40.0, -0.108, 0.221, 0.423
42.0, -0.120, 0.242, 0.459
44.0, -0.128, 0.275, 0.490
46.0, -0.139, 0.278, 0.533
48.0, -0.151, 0.241, 0.634
50.0, -0.164, 0.197, 0.586
52.0, -0.180, 0.148, 0.551
54.0, -0.196, 0.111, 0.489
56.0, -0.212, 0.071, 0.448
58.0, -0.230, 0.015, 0.391
60.0, -0.230, 0.015, 0.246