All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.178, 0.142, 0.106
-58.0, -0.183, 0.188, 0.394
-56.0, -0.167, 0.081, 0.324
-54.0, -0.156, -0.039, 0.402
-52.0, -0.145, -0.164, 0.383
-50.0, -0.136, -0.231, 0.411
-48.0, -0.127, -0.289, 0.399
-46.0, -0.117, -0.332, 0.395
-44.0, -0.096, -0.354, 0.365
-42.0, -0.085, -0.346, 0.272
-40.0, -0.100, -0.317, 0.460
-38.0, -0.095, -0.303, 0.476
-36.0, -0.093, -0.304, 0.537
-34.0, -0.085, -0.332, 0.552
-32.0, -0.082, -0.359, 0.450
-30.0, -0.070, -0.392, 0.465
-28.0, -0.061, -0.423, 0.372
-26.0, -0.053, -0.433, 0.377
-24.0, -0.044, -0.438, 0.275
-22.0, -0.035, -0.425, 0.259
-20.0, -0.032, -0.402, 0.186
-18.0, -0.050, -0.363, 0.177
-16.0, -0.065, -0.302, 0.172
-14.0, -0.077, -0.237, 0.138
-12.0, -0.079, -0.206, 0.151
-10.0, -0.087, -0.132, 0.152
-8.0, -0.077, -0.094, 0.187
-6.0, -0.081, -0.056, 0.188
-4.0, -0.069, -0.022, 0.008
-2.0, -0.064, 0.013, 0.149
0.0, -0.020, -0.005, 0.055
0.0, 0.118, -0.363, 0.103
2.0, 0.121, -0.336, 0.009
4.0, 0.123, -0.308, -0.068
6.0, 0.126, -0.270, -0.111
8.0, 0.128, -0.194, -0.141
10.0, 0.129, -0.130, -0.167
12.0, 0.130, -0.047, -0.194
14.0, 0.130, 0.041, -0.129
16.0, 0.131, 0.111, -0.164
18.0, 0.133, 0.186, -0.030
20.0, 0.139, 0.292, -0.048
22.0, 0.116, 0.343, 0.079
24.0, 0.106, 0.411, 0.077
26.0, 0.109, 0.394, 0.108
28.0, 0.099, 0.444, 0.142
30.0, 0.101, 0.430, 0.123
32.0, 0.093, 0.462, 0.154
34.0, 0.091, 0.469, 0.061
36.0, 0.084, 0.522, 0.075
38.0, 0.077, 0.564, 0.125
40.0, 0.073, 0.614, 0.147
42.0, 0.065, 0.672, 0.311
44.0, 0.059, 0.723, 0.466
46.0, 0.051, 0.735, 0.598
48.0, 0.041, 0.722, 0.652
50.0, 0.030, 0.697, 0.752
52.0, 0.018, 0.696, 0.787
54.0, 0.006, 0.699, 0.825
56.0, -0.007, 0.695, 0.957
58.0, -0.021, 0.701, 1.023
60.0, -0.017, 0.705, 1.213

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.251, 0.753, 0.694
-58.0, -0.251, 0.753, 0.933
-56.0, -0.231, 0.600, 0.824
-54.0, -0.216, 0.448, 0.888
-52.0, -0.202, 0.281, 0.834
-50.0, -0.190, 0.179, 0.812
-48.0, -0.179, 0.086, 0.743
-46.0, -0.166, 0.013, 0.699
-44.0, -0.140, -0.032, 0.685
-42.0, -0.122, -0.056, 0.664
-40.0, -0.143, -0.040, 0.802
-38.0, -0.140, -0.044, 0.802
-36.0, -0.136, -0.071, 0.880
-34.0, -0.127, -0.132, 0.880
-32.0, -0.121, -0.177, 0.763
-30.0, -0.104, -0.232, 0.763
-28.0, -0.091, -0.295, 0.687
-26.0, -0.079, -0.339, 0.687
-24.0, -0.066, -0.369, 0.560
-22.0, -0.054, -0.372, 0.560
-20.0, -0.051, -0.356, 0.500
-18.0, -0.073, -0.320, 0.500
-16.0, -0.097, -0.255, 0.535
-14.0, -0.115, -0.185, 0.535
-12.0, -0.122, -0.141, 0.577
-10.0, -0.131, -0.073, 0.577
-8.0, -0.119, -0.061, 0.610
-6.0, -0.117, -0.016, 0.610
-4.0, -0.097, -0.007, 0.398
-2.0, -0.080, 0.028, 0.398
0.0, -0.020, -0.021, 0.055
0.0, -0.056, -0.091, 0.501
2.0, -0.050, -0.066, 0.518
4.0, -0.047, -0.036, 0.518
6.0, -0.042, 0.023, 0.516
8.0, -0.039, 0.117, 0.516
10.0, -0.035, 0.198, 0.518
12.0, -0.033, 0.295, 0.518
14.0, -0.031, 0.406, 0.625
16.0, -0.028, 0.481, 0.625
18.0, -0.024, 0.539, 0.787
20.0, -0.023, 0.685, 0.787
22.0, -0.048, 0.728, 0.924
24.0, -0.060, 0.803, 0.924
26.0, -0.059, 0.777, 0.932
28.0, -0.070, 0.840, 0.932
30.0, -0.069, 0.827, 0.865
32.0, -0.078, 0.853, 0.865
34.0, -0.081, 0.862, 0.749
36.0, -0.089, 0.928, 0.749
38.0, -0.099, 0.994, 0.770
40.0, -0.105, 1.050, 0.770
42.0, -0.114, 1.120, 0.918
44.0, -0.122, 1.174, 1.057
46.0, -0.133, 1.177, 1.173
48.0, -0.146, 1.166, 1.211
50.0, -0.160, 1.139, 1.240
52.0, -0.175, 1.135, 1.208
54.0, -0.190, 1.132, 1.181
56.0, -0.206, 1.129, 1.234
58.0, -0.224, 1.121, 1.198
60.0, -0.224, 1.121, 1.236