All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.141, 0.740, -0.191
-58.0, -0.146, 0.786, -0.038
-56.0, -0.136, 0.656, 0.012
-54.0, -0.127, 0.550, 0.068
-52.0, -0.118, 0.479, 0.108
-50.0, -0.110, 0.403, 0.154
-48.0, -0.102, 0.354, 0.189
-46.0, -0.093, 0.336, 0.196
-44.0, -0.075, 0.348, 0.225
-42.0, -0.066, 0.331, 0.181
-40.0, -0.083, 0.325, 0.406
-38.0, -0.077, 0.306, 0.422
-36.0, -0.076, 0.262, 0.491
-34.0, -0.070, 0.186, 0.505
-32.0, -0.066, 0.103, 0.408
-30.0, -0.057, 0.025, 0.423
-28.0, -0.048, -0.037, 0.355
-26.0, -0.041, -0.067, 0.359
-24.0, -0.033, -0.088, 0.304
-22.0, -0.027, -0.088, 0.287
-20.0, -0.030, -0.067, 0.262
-18.0, -0.049, -0.019, 0.252
-16.0, -0.063, 0.012, 0.262
-14.0, -0.075, 0.056, 0.228
-12.0, -0.081, 0.075, 0.253
-10.0, -0.083, 0.097, 0.254
-8.0, -0.078, 0.078, 0.267
-6.0, -0.080, 0.085, 0.268
-4.0, -0.069, 0.059, 0.060
-2.0, -0.064, 0.064, 0.201
0.0, -0.021, -0.001, 0.113
0.0, 0.142, -0.389, 0.085
2.0, 0.145, -0.357, -0.010
4.0, 0.147, -0.329, -0.086
6.0, 0.151, -0.271, -0.084
8.0, 0.154, -0.212, -0.115
10.0, 0.155, -0.155, -0.091
12.0, 0.158, -0.099, -0.117
14.0, 0.157, -0.052, -0.043
16.0, 0.160, -0.046, -0.078
18.0, 0.160, -0.037, -0.008
20.0, 0.170, 0.039, -0.026
22.0, 0.143, 0.053, 0.067
24.0, 0.140, 0.040, 0.065
26.0, 0.138, 0.026, 0.035
28.0, 0.134, 0.038, 0.069
30.0, 0.129, 0.070, -0.019
32.0, 0.126, 0.072, 0.013
34.0, 0.120, 0.119, -0.016
36.0, 0.115, 0.166, -0.002
38.0, 0.107, 0.186, 0.087
40.0, 0.102, 0.209, 0.110
42.0, 0.094, 0.251, 0.241
44.0, 0.087, 0.241, 0.354
46.0, 0.079, 0.201, 0.416
48.0, 0.069, 0.163, 0.445
50.0, 0.058, 0.119, 0.480
52.0, 0.047, 0.104, 0.512
54.0, 0.033, 0.104, 0.601
56.0, 0.021, 0.109, 0.625
58.0, 0.006, 0.140, 0.684
60.0, 0.009, 0.144, 0.779

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.214, 1.352, 0.398
-58.0, -0.214, 1.352, 0.501
-56.0, -0.199, 1.175, 0.513
-54.0, -0.187, 1.031, 0.555
-52.0, -0.175, 0.919, 0.559
-50.0, -0.164, 0.813, 0.555
-48.0, -0.154, 0.735, 0.533
-46.0, -0.143, 0.681, 0.500
-44.0, -0.119, 0.663, 0.545
-42.0, -0.102, 0.614, 0.574
-40.0, -0.126, 0.596, 0.748
-38.0, -0.122, 0.557, 0.748
-36.0, -0.119, 0.485, 0.833
-34.0, -0.111, 0.392, 0.833
-32.0, -0.104, 0.280, 0.721
-30.0, -0.091, 0.180, 0.721
-28.0, -0.078, 0.085, 0.669
-26.0, -0.067, 0.034, 0.669
-24.0, -0.056, -0.013, 0.589
-22.0, -0.046, -0.028, 0.589
-20.0, -0.049, -0.007, 0.576
-18.0, -0.072, 0.031, 0.576
-16.0, -0.095, 0.070, 0.625
-14.0, -0.113, 0.121, 0.625
-12.0, -0.124, 0.147, 0.679
-10.0, -0.127, 0.148, 0.679
-8.0, -0.119, 0.126, 0.690
-6.0, -0.116, 0.124, 0.690
-4.0, -0.097, 0.079, 0.450
-2.0, -0.080, 0.073, 0.450
0.0, -0.021, -0.016, 0.113
0.0, -0.032, -0.118, 0.483
2.0, -0.027, -0.096, 0.500
4.0, -0.022, -0.066, 0.500
6.0, -0.017, 0.016, 0.542
8.0, -0.013, 0.092, 0.542
10.0, -0.010, 0.170, 0.595
12.0, -0.005, 0.245, 0.595
14.0, -0.004, 0.314, 0.711
16.0, 0.001, 0.320, 0.711
18.0, 0.004, 0.327, 0.809
20.0, 0.009, 0.413, 0.809
22.0, -0.021, 0.430, 0.912
24.0, -0.026, 0.421, 0.912
26.0, -0.029, 0.421, 0.859
28.0, -0.034, 0.427, 0.859
30.0, -0.041, 0.467, 0.724
32.0, -0.045, 0.473, 0.724
34.0, -0.053, 0.512, 0.672
36.0, -0.059, 0.581, 0.672
38.0, -0.068, 0.608, 0.733
40.0, -0.076, 0.651, 0.733
42.0, -0.085, 0.699, 0.848
44.0, -0.094, 0.692, 0.946
46.0, -0.105, 0.651, 0.992
48.0, -0.118, 0.607, 1.004
50.0, -0.133, 0.561, 0.968
52.0, -0.146, 0.542, 0.934
54.0, -0.163, 0.537, 0.957
56.0, -0.178, 0.544, 0.901
58.0, -0.197, 0.560, 0.858
60.0, -0.197, 0.560, 0.801