All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.129, 1.060, -0.400
-58.0, -0.134, 1.100, -0.274
-56.0, -0.124, 0.989, -0.168
-54.0, -0.115, 0.894, -0.147
-52.0, -0.107, 0.854, -0.044
-50.0, -0.099, 0.786, 0.027
-48.0, -0.092, 0.724, 0.044
-46.0, -0.084, 0.708, 0.108
-44.0, -0.063, 0.674, 0.141
-42.0, -0.055, 0.626, 0.092
-40.0, -0.074, 0.580, 0.289
-38.0, -0.071, 0.535, 0.306
-36.0, -0.068, 0.466, 0.375
-34.0, -0.063, 0.394, 0.390
-32.0, -0.060, 0.310, 0.318
-30.0, -0.048, 0.221, 0.333
-28.0, -0.040, 0.187, 0.305
-26.0, -0.034, 0.143, 0.309
-24.0, -0.027, 0.140, 0.274
-22.0, -0.022, 0.126, 0.258
-20.0, -0.024, 0.128, 0.268
-18.0, -0.045, 0.153, 0.259
-16.0, -0.060, 0.171, 0.279
-14.0, -0.076, 0.158, 0.244
-12.0, -0.085, 0.149, 0.233
-10.0, -0.088, 0.131, 0.234
-8.0, -0.084, 0.098, 0.211
-6.0, -0.087, 0.092, 0.212
-4.0, -0.075, 0.034, 0.035
-2.0, -0.067, 0.037, 0.175
0.0, -0.024, -0.013, 0.112
0.0, 0.136, -0.355, 0.056
2.0, 0.140, -0.350, -0.031
4.0, 0.143, -0.311, -0.108
6.0, 0.147, -0.264, -0.071
8.0, 0.150, -0.239, -0.101
10.0, 0.153, -0.201, -0.080
12.0, 0.155, -0.154, -0.106
14.0, 0.154, -0.147, -0.072
16.0, 0.156, -0.155, -0.107
18.0, 0.157, -0.154, -0.060
20.0, 0.165, -0.120, -0.079
22.0, 0.140, -0.116, -0.036
24.0, 0.133, -0.116, -0.038
26.0, 0.136, -0.152, -0.012
28.0, 0.127, -0.125, 0.023
30.0, 0.130, -0.122, -0.018
32.0, 0.123, -0.092, 0.013
34.0, 0.122, -0.090, -0.003
36.0, 0.115, -0.050, 0.011
38.0, 0.109, -0.062, -0.002
40.0, 0.104, -0.041, 0.020
42.0, 0.098, -0.013, 0.062
44.0, 0.091, -0.043, 0.179
46.0, 0.085, -0.076, 0.232
48.0, 0.075, -0.122, 0.254
50.0, 0.064, -0.157, 0.206
52.0, 0.053, -0.177, 0.277
54.0, 0.042, -0.203, 0.288
56.0, 0.028, -0.201, 0.309
58.0, 0.015, -0.188, 0.358
60.0, 0.018, -0.184, 0.451

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.202, 1.671, 0.188
-58.0, -0.202, 1.671, 0.265
-56.0, -0.187, 1.508, 0.333
-54.0, -0.175, 1.376, 0.339
-52.0, -0.164, 1.299, 0.407
-50.0, -0.154, 1.203, 0.428
-48.0, -0.144, 1.099, 0.387
-46.0, -0.133, 1.052, 0.412
-44.0, -0.107, 0.983, 0.461
-42.0, -0.091, 0.910, 0.485
-40.0, -0.117, 0.857, 0.632
-38.0, -0.116, 0.792, 0.632
-36.0, -0.112, 0.696, 0.718
-34.0, -0.104, 0.594, 0.718
-32.0, -0.098, 0.492, 0.631
-30.0, -0.083, 0.383, 0.631
-28.0, -0.070, 0.317, 0.619
-26.0, -0.060, 0.246, 0.619
-24.0, -0.050, 0.215, 0.559
-22.0, -0.041, 0.193, 0.559
-20.0, -0.043, 0.182, 0.583
-18.0, -0.068, 0.203, 0.583
-16.0, -0.092, 0.229, 0.642
-14.0, -0.114, 0.223, 0.642
-12.0, -0.127, 0.220, 0.659
-10.0, -0.131, 0.178, 0.659
-8.0, -0.126, 0.140, 0.634
-6.0, -0.123, 0.125, 0.634
-4.0, -0.103, 0.052, 0.424
-2.0, -0.084, 0.052, 0.424
0.0, -0.024, -0.028, 0.112
0.0, -0.038, -0.083, 0.453
2.0, -0.031, -0.089, 0.478
4.0, -0.027, -0.047, 0.478
6.0, -0.021, 0.024, 0.556
8.0, -0.016, 0.068, 0.556
10.0, -0.012, 0.124, 0.606
12.0, -0.008, 0.180, 0.606
14.0, -0.007, 0.213, 0.681
16.0, -0.003, 0.211, 0.681
18.0, 0.001, 0.210, 0.756
20.0, 0.004, 0.271, 0.756
22.0, -0.024, 0.270, 0.809
24.0, -0.033, 0.273, 0.809
26.0, -0.031, 0.231, 0.813
28.0, -0.042, 0.272, 0.813
30.0, -0.040, 0.276, 0.724
32.0, -0.048, 0.299, 0.724
34.0, -0.050, 0.303, 0.685
36.0, -0.059, 0.349, 0.685
38.0, -0.066, 0.365, 0.643
40.0, -0.073, 0.395, 0.643
42.0, -0.081, 0.435, 0.669
44.0, -0.090, 0.409, 0.771
46.0, -0.099, 0.374, 0.808
48.0, -0.112, 0.322, 0.813
50.0, -0.126, 0.280, 0.694
52.0, -0.140, 0.262, 0.699
54.0, -0.154, 0.230, 0.644
56.0, -0.171, 0.233, 0.585
58.0, -0.188, 0.232, 0.532
60.0, -0.188, 0.232, 0.473