All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.173, -0.585, 0.482
-58.0, -0.178, -0.539, 0.568
-56.0, -0.167, -0.613, 0.581
-54.0, -0.156, -0.647, 0.670
-52.0, -0.146, -0.667, 0.706
-50.0, -0.137, -0.689, 0.744
-48.0, -0.130, -0.726, 0.734
-46.0, -0.121, -0.718, 0.716
-44.0, -0.101, -0.727, 0.711
-42.0, -0.091, -0.739, 0.573
-40.0, -0.106, -0.744, 0.660
-38.0, -0.097, -0.750, 0.677
-36.0, -0.096, -0.752, 0.693
-34.0, -0.091, -0.768, 0.708
-32.0, -0.085, -0.793, 0.531
-30.0, -0.074, -0.799, 0.546
-28.0, -0.065, -0.769, 0.474
-26.0, -0.055, -0.733, 0.478
-24.0, -0.045, -0.685, 0.420
-22.0, -0.038, -0.638, 0.404
-20.0, -0.035, -0.577, 0.360
-18.0, -0.053, -0.522, 0.351
-16.0, -0.069, -0.443, 0.333
-14.0, -0.082, -0.390, 0.299
-12.0, -0.089, -0.341, 0.258
-10.0, -0.093, -0.296, 0.259
-8.0, -0.086, -0.257, 0.195
-6.0, -0.088, -0.182, 0.196
-4.0, -0.075, -0.136, -0.008
-2.0, -0.068, -0.045, 0.132
0.0, -0.025, -0.013, 0.076
0.0, 0.112, -0.398, 0.139
2.0, 0.115, -0.320, 0.108
4.0, 0.118, -0.217, 0.032
6.0, 0.121, -0.118, 0.030
8.0, 0.124, -0.038, -0.000
10.0, 0.125, 0.055, 0.037
12.0, 0.129, 0.148, 0.011
14.0, 0.131, 0.234, -0.065
16.0, 0.134, 0.294, -0.100
18.0, 0.134, 0.390, -0.036
20.0, 0.141, 0.491, -0.054
22.0, 0.118, 0.562, -0.013
24.0, 0.113, 0.666, -0.015
26.0, 0.116, 0.706, 0.105
28.0, 0.108, 0.828, 0.140
30.0, 0.112, 0.888, 0.212
32.0, 0.104, 0.975, 0.244
34.0, 0.102, 1.024, 0.231
36.0, 0.095, 1.074, 0.245
38.0, 0.088, 1.124, 0.471
40.0, 0.083, 1.184, 0.493
42.0, 0.075, 1.238, 0.703
44.0, 0.068, 1.266, 0.742
46.0, 0.060, 1.278, 0.959
48.0, 0.052, 1.278, 1.030
50.0, 0.041, 1.286, 1.112
52.0, 0.028, 1.292, 1.212
54.0, 0.016, 1.311, 1.311
56.0, 0.002, 1.357, 1.261
58.0, -0.006, 1.367, 1.602
60.0, -0.003, 1.364, 1.532

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.245, 0.026, 1.070
-58.0, -0.245, 0.026, 1.107
-56.0, -0.230, -0.094, 1.082
-54.0, -0.216, -0.159, 1.156
-52.0, -0.203, -0.221, 1.157
-50.0, -0.192, -0.279, 1.145
-48.0, -0.182, -0.351, 1.078
-46.0, -0.171, -0.374, 1.020
-44.0, -0.145, -0.406, 1.031
-42.0, -0.127, -0.449, 0.966
-40.0, -0.148, -0.472, 1.003
-38.0, -0.142, -0.499, 1.003
-36.0, -0.139, -0.523, 1.036
-34.0, -0.133, -0.562, 1.036
-32.0, -0.123, -0.616, 0.844
-30.0, -0.108, -0.645, 0.844
-28.0, -0.095, -0.647, 0.788
-26.0, -0.081, -0.639, 0.788
-24.0, -0.068, -0.615, 0.705
-22.0, -0.057, -0.572, 0.705
-20.0, -0.053, -0.524, 0.674
-18.0, -0.076, -0.471, 0.674
-16.0, -0.100, -0.385, 0.696
-14.0, -0.120, -0.325, 0.696
-12.0, -0.131, -0.270, 0.684
-10.0, -0.136, -0.248, 0.684
-8.0, -0.127, -0.209, 0.618
-6.0, -0.123, -0.143, 0.618
-4.0, -0.103, -0.115, 0.381
-2.0, -0.084, -0.030, 0.381
0.0, -0.025, -0.030, 0.076
0.0, -0.063, -0.126, 0.537
2.0, -0.057, -0.064, 0.618
4.0, -0.052, 0.046, 0.618
6.0, -0.046, 0.162, 0.657
8.0, -0.043, 0.264, 0.657
10.0, -0.040, 0.375, 0.722
12.0, -0.034, 0.487, 0.722
14.0, -0.031, 0.596, 0.689
16.0, -0.026, 0.660, 0.689
18.0, -0.023, 0.736, 0.781
20.0, -0.020, 0.878, 0.781
22.0, -0.046, 0.954, 0.832
24.0, -0.053, 1.055, 0.832
26.0, -0.051, 1.089, 0.929
28.0, -0.060, 1.223, 0.929
30.0, -0.058, 1.286, 0.955
32.0, -0.067, 1.367, 0.955
34.0, -0.071, 1.418, 0.919
36.0, -0.079, 1.480, 0.919
38.0, -0.087, 1.546, 1.117
40.0, -0.094, 1.620, 1.117
42.0, -0.104, 1.686, 1.310
44.0, -0.114, 1.718, 1.333
46.0, -0.124, 1.723, 1.535
48.0, -0.136, 1.714, 1.589
50.0, -0.149, 1.728, 1.600
52.0, -0.165, 1.731, 1.634
54.0, -0.180, 1.744, 1.667
56.0, -0.197, 1.782, 1.538
58.0, -0.209, 1.780, 1.776
60.0, -0.209, 1.780, 1.554