All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.177, -0.655, 0.913
-58.0, -0.182, -0.608, 0.919
-56.0, -0.172, -0.670, 0.869
-54.0, -0.161, -0.689, 0.958
-52.0, -0.151, -0.708, 0.973
-50.0, -0.141, -0.702, 0.943
-48.0, -0.131, -0.688, 0.872
-46.0, -0.124, -0.700, 0.843
-44.0, -0.101, -0.679, 0.800
-42.0, -0.093, -0.653, 0.599
-40.0, -0.106, -0.657, 0.674
-38.0, -0.099, -0.691, 0.691
-36.0, -0.099, -0.699, 0.669
-34.0, -0.092, -0.720, 0.684
-32.0, -0.085, -0.726, 0.495
-30.0, -0.073, -0.703, 0.510
-28.0, -0.064, -0.690, 0.473
-26.0, -0.055, -0.646, 0.477
-24.0, -0.045, -0.617, 0.456
-22.0, -0.038, -0.566, 0.440
-20.0, -0.034, -0.524, 0.391
-18.0, -0.051, -0.460, 0.382
-16.0, -0.067, -0.405, 0.372
-14.0, -0.082, -0.363, 0.337
-12.0, -0.088, -0.322, 0.282
-10.0, -0.093, -0.295, 0.284
-8.0, -0.090, -0.262, 0.223
-6.0, -0.088, -0.201, 0.224
-4.0, -0.076, -0.158, 0.007
-2.0, -0.068, -0.053, 0.148
0.0, -0.022, -0.030, 0.090
0.0, 0.116, -0.407, 0.171
2.0, 0.118, -0.348, 0.126
4.0, 0.125, -0.263, 0.049
6.0, 0.122, -0.156, 0.120
8.0, 0.131, -0.094, 0.090
10.0, 0.125, 0.008, 0.123
12.0, 0.135, 0.050, 0.097
14.0, 0.129, 0.140, 0.082
16.0, 0.138, 0.183, 0.047
18.0, 0.132, 0.246, 0.088
20.0, 0.142, 0.308, 0.069
22.0, 0.113, 0.401, 0.109
24.0, 0.117, 0.424, 0.107
26.0, 0.109, 0.505, 0.195
28.0, 0.111, 0.567, 0.230
30.0, 0.104, 0.663, 0.306
32.0, 0.104, 0.719, 0.338
34.0, 0.097, 0.790, 0.309
36.0, 0.091, 0.829, 0.323
38.0, 0.085, 0.911, 0.448
40.0, 0.079, 0.962, 0.470
42.0, 0.073, 1.018, 0.669
44.0, 0.065, 1.073, 0.718
46.0, 0.056, 1.091, 0.849
48.0, 0.048, 1.141, 0.875
50.0, 0.036, 1.173, 0.981
52.0, 0.024, 1.208, 1.011
54.0, 0.011, 1.255, 1.107
56.0, -0.003, 1.301, 1.141
58.0, -0.017, 1.345, 1.286
60.0, -0.013, 1.349, 1.469

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.250, -0.043, 1.502
-58.0, -0.250, -0.043, 1.458
-56.0, -0.236, -0.157, 1.369
-54.0, -0.221, -0.207, 1.444
-52.0, -0.208, -0.263, 1.424
-50.0, -0.196, -0.292, 1.344
-48.0, -0.184, -0.313, 1.216
-46.0, -0.173, -0.350, 1.147
-44.0, -0.146, -0.365, 1.120
-42.0, -0.129, -0.376, 0.992
-40.0, -0.149, -0.392, 1.017
-38.0, -0.144, -0.433, 1.017
-36.0, -0.142, -0.471, 1.012
-34.0, -0.134, -0.520, 1.012
-32.0, -0.124, -0.549, 0.808
-30.0, -0.108, -0.543, 0.808
-28.0, -0.094, -0.568, 0.787
-26.0, -0.081, -0.552, 0.787
-24.0, -0.068, -0.548, 0.741
-22.0, -0.057, -0.495, 0.741
-20.0, -0.053, -0.463, 0.705
-18.0, -0.074, -0.402, 0.705
-16.0, -0.099, -0.339, 0.734
-14.0, -0.120, -0.298, 0.734
-12.0, -0.130, -0.251, 0.708
-10.0, -0.136, -0.237, 0.708
-8.0, -0.131, -0.214, 0.646
-6.0, -0.123, -0.173, 0.646
-4.0, -0.104, -0.130, 0.397
-2.0, -0.084, -0.039, 0.397
0.0, -0.022, -0.042, 0.090
0.0, -0.059, -0.135, 0.569
2.0, -0.053, -0.074, 0.635
4.0, -0.044, 0.000, 0.635
6.0, -0.045, 0.134, 0.747
8.0, -0.036, 0.201, 0.747
10.0, -0.040, 0.324, 0.808
12.0, -0.028, 0.376, 0.808
14.0, -0.032, 0.492, 0.836
16.0, -0.022, 0.536, 0.836
18.0, -0.025, 0.598, 0.904
20.0, -0.019, 0.682, 0.904
22.0, -0.051, 0.797, 0.954
24.0, -0.049, 0.806, 0.954
26.0, -0.058, 0.898, 1.019
28.0, -0.057, 0.956, 1.019
30.0, -0.066, 1.060, 1.049
32.0, -0.067, 1.110, 1.049
34.0, -0.075, 1.184, 0.997
36.0, -0.083, 1.243, 0.997
38.0, -0.091, 1.333, 1.093
40.0, -0.098, 1.398, 1.093
42.0, -0.107, 1.459, 1.276
44.0, -0.117, 1.519, 1.310
46.0, -0.127, 1.541, 1.425
48.0, -0.139, 1.585, 1.433
50.0, -0.154, 1.610, 1.469
52.0, -0.169, 1.647, 1.433
54.0, -0.185, 1.689, 1.463
56.0, -0.202, 1.735, 1.418
58.0, -0.220, 1.765, 1.460
60.0, -0.220, 1.765, 1.491