All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.177, 0.130, 14.556
-58.0, -0.182, 0.182, 0.157
-56.0, -0.169, 0.107, 0.217
-54.0, -0.158, 0.049, 0.364
-52.0, -0.149, -0.009, 0.476
-50.0, -0.140, -0.062, 0.538
-48.0, -0.131, -0.104, 0.581
-46.0, -0.122, -0.143, 0.579
-44.0, -0.115, -0.192, 0.606
-42.0, -0.108, -0.247, 0.564
-40.0, -0.102, -0.323, 0.477
-38.0, -0.083, -0.389, 0.493
-36.0, -0.080, -0.448, 0.421
-34.0, -0.084, -0.491, 0.436
-32.0, -0.089, -0.500, 0.384
-30.0, -0.087, -0.488, 0.398
-28.0, -0.083, -0.461, 0.382
-26.0, -0.073, -0.421, 0.387
-24.0, -0.064, -0.363, 0.400
-22.0, -0.056, -0.322, 0.383
-20.0, -0.059, -0.294, 0.318
-18.0, -0.083, -0.244, 0.309
-16.0, -0.105, -0.212, 0.235
-14.0, -0.121, -0.199, 0.200
-12.0, -0.125, -0.205, 0.109
-10.0, -0.129, -0.203, 0.111
-8.0, -0.128, -0.187, 0.070
-6.0, -0.122, -0.153, 0.071
-4.0, -0.112, -0.134, -0.086
-2.0, -0.096, -0.029, 0.055
0.0, -0.046, -0.022, -0.017
0.0, 0.126, -0.459, -0.570
2.0, 0.118, -0.351, -0.546
4.0, 0.120, -0.297, -0.623
6.0, 0.112, -0.191, -0.481
8.0, 0.124, -0.154, -0.512
10.0, 0.122, -0.054, -0.559
12.0, 0.134, -0.039, -0.585
14.0, 0.132, 0.031, -0.645
16.0, 0.150, 0.024, -0.680
18.0, 0.148, 0.075, -0.755
20.0, 0.159, 0.089, -0.774
22.0, 0.158, 0.156, -0.781
24.0, 0.165, 0.199, -0.783
26.0, 0.162, 0.293, -0.685
28.0, 0.167, 0.350, -0.650
30.0, 0.165, 0.446, -0.542
32.0, 0.173, 0.514, -0.511
34.0, 0.166, 0.632, -0.363
36.0, 0.138, 0.712, -0.349
38.0, 0.140, 0.806, -0.380
40.0, 0.140, 0.850, -0.357
42.0, 0.136, 0.884, -0.273
44.0, 0.132, 0.954, -0.209
46.0, 0.131, 0.988, -0.118
48.0, 0.125, 1.018, -0.028
50.0, 0.117, 1.041, 0.012
52.0, 0.111, 1.072, 0.141
54.0, 0.102, 1.116, 0.229
56.0, 0.093, 1.149, 0.359
58.0, 0.082, 1.207, 0.510
60.0, 0.086, 1.201, 0.558

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.250, 0.747, 15.144
-58.0, -0.250, 0.747, 0.696
-56.0, -0.232, 0.626, 0.718
-54.0, -0.218, 0.531, 0.850
-52.0, -0.206, 0.444, 0.927
-50.0, -0.194, 0.348, 0.939
-48.0, -0.183, 0.271, 0.925
-46.0, -0.172, 0.202, 0.883
-44.0, -0.159, 0.122, 0.926
-42.0, -0.144, 0.030, 0.957
-40.0, -0.145, -0.062, 0.820
-38.0, -0.128, -0.148, 0.820
-36.0, -0.123, -0.239, 0.764
-34.0, -0.126, -0.305, 0.764
-32.0, -0.128, -0.336, 0.697
-30.0, -0.122, -0.344, 0.697
-28.0, -0.113, -0.346, 0.697
-26.0, -0.100, -0.336, 0.697
-24.0, -0.087, -0.303, 0.685
-22.0, -0.075, -0.272, 0.685
-20.0, -0.078, -0.241, 0.632
-18.0, -0.106, -0.193, 0.632
-16.0, -0.137, -0.159, 0.598
-14.0, -0.159, -0.141, 0.598
-12.0, -0.167, -0.142, 0.536
-10.0, -0.173, -0.157, 0.536
-8.0, -0.170, -0.152, 0.493
-6.0, -0.158, -0.129, 0.493
-4.0, -0.140, -0.106, 0.304
-2.0, -0.112, -0.014, 0.304
0.0, -0.046, -0.037, -0.017
0.0, -0.049, -0.187, -0.172
2.0, -0.054, -0.090, -0.036
4.0, -0.050, -0.034, -0.036
6.0, -0.056, 0.088, 0.145
8.0, -0.043, 0.141, 0.145
10.0, -0.043, 0.264, 0.126
12.0, -0.029, 0.287, 0.126
14.0, -0.029, 0.385, 0.108
16.0, -0.010, 0.377, 0.108
18.0, -0.009, 0.434, 0.061
20.0, -0.002, 0.462, 0.061
22.0, -0.007, 0.541, 0.064
24.0, -0.001, 0.580, 0.064
26.0, -0.005, 0.677, 0.139
28.0, -0.002, 0.738, 0.139
30.0, -0.005, 0.849, 0.200
32.0, 0.002, 0.905, 0.200
34.0, -0.006, 1.026, 0.325
36.0, -0.036, 1.117, 0.325
38.0, -0.036, 1.219, 0.266
40.0, -0.038, 1.286, 0.266
42.0, -0.044, 1.339, 0.333
44.0, -0.049, 1.405, 0.382
46.0, -0.053, 1.433, 0.458
48.0, -0.062, 1.451, 0.531
50.0, -0.073, 1.496, 0.500
52.0, -0.082, 1.504, 0.562
54.0, -0.094, 1.550, 0.585
56.0, -0.106, 1.583, 0.636
58.0, -0.120, 1.617, 0.684
60.0, -0.120, 1.617, 0.580