All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.218, -0.265, 0.329
-58.0, -0.223, -0.218, 0.424
-56.0, -0.214, -0.258, 0.529
-54.0, -0.207, -0.321, 0.617
-52.0, -0.199, -0.378, 0.630
-50.0, -0.193, -0.423, 0.564
-48.0, -0.185, -0.446, 0.579
-46.0, -0.178, -0.483, 0.583
-44.0, -0.154, -0.496, 0.688
-42.0, -0.150, -0.512, 0.560
-40.0, -0.167, -0.501, 0.646
-38.0, -0.160, -0.521, 0.663
-36.0, -0.160, -0.522, 0.656
-34.0, -0.153, -0.521, 0.671
-32.0, -0.148, -0.527, 0.545
-30.0, -0.134, -0.503, 0.560
-28.0, -0.125, -0.496, 0.514
-26.0, -0.115, -0.488, 0.518
-24.0, -0.105, -0.463, 0.468
-22.0, -0.097, -0.435, 0.451
-20.0, -0.093, -0.426, 0.398
-18.0, -0.113, -0.407, 0.389
-16.0, -0.128, -0.383, 0.368
-14.0, -0.136, -0.358, 0.334
-12.0, -0.140, -0.327, 0.323
-10.0, -0.138, -0.289, 0.324
-8.0, -0.128, -0.265, 0.267
-6.0, -0.123, -0.194, 0.268
-4.0, -0.103, -0.127, 0.055
-2.0, -0.087, -0.046, 0.196
0.0, -0.031, -0.016, 0.100
0.0, 0.069, -0.369, -0.014
2.0, 0.072, -0.291, -0.078
4.0, 0.074, -0.237, -0.155
6.0, 0.076, -0.184, -0.126
8.0, 0.077, -0.127, -0.156
10.0, 0.078, -0.102, -0.154
12.0, 0.079, -0.069, -0.180
14.0, 0.078, -0.009, -0.170
16.0, 0.082, 0.041, -0.205
18.0, 0.081, 0.119, -0.141
20.0, 0.087, 0.225, -0.159
22.0, 0.065, 0.340, -0.053
24.0, 0.056, 0.457, -0.054
26.0, 0.059, 0.521, -0.011
28.0, 0.050, 0.620, 0.024
30.0, 0.052, 0.674, 0.032
32.0, 0.045, 0.731, 0.064
34.0, 0.041, 0.728, 0.119
36.0, 0.034, 0.743, 0.133
38.0, 0.028, 0.758, 0.197
40.0, 0.022, 0.774, 0.220
42.0, 0.015, 0.805, 0.343
44.0, 0.007, 0.838, 0.388
46.0, 0.000, 0.893, 0.518
48.0, -0.009, 0.939, 0.483
50.0, -0.020, 0.968, 0.684
52.0, -0.032, 1.020, 0.778
54.0, -0.044, 1.064, 0.859
56.0, -0.058, 1.109, 0.951
58.0, -0.073, 1.138, 1.154
60.0, -0.069, 1.141, 1.310

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.291, 0.347, 0.917
-58.0, -0.291, 0.347, 0.963
-56.0, -0.277, 0.261, 1.030
-54.0, -0.267, 0.167, 1.103
-52.0, -0.256, 0.067, 1.081
-50.0, -0.247, -0.008, 0.965
-48.0, -0.237, -0.071, 0.923
-46.0, -0.228, -0.138, 0.887
-44.0, -0.199, -0.181, 1.008
-42.0, -0.186, -0.220, 0.953
-40.0, -0.210, -0.230, 0.989
-38.0, -0.205, -0.269, 0.989
-36.0, -0.203, -0.299, 0.999
-34.0, -0.194, -0.326, 0.999
-32.0, -0.187, -0.343, 0.858
-30.0, -0.169, -0.349, 0.858
-28.0, -0.155, -0.374, 0.828
-26.0, -0.141, -0.387, 0.828
-24.0, -0.128, -0.387, 0.753
-22.0, -0.116, -0.369, 0.753
-20.0, -0.112, -0.373, 0.713
-18.0, -0.136, -0.350, 0.713
-16.0, -0.160, -0.319, 0.731
-14.0, -0.174, -0.293, 0.731
-12.0, -0.182, -0.256, 0.749
-10.0, -0.181, -0.238, 0.749
-8.0, -0.170, -0.217, 0.690
-6.0, -0.159, -0.155, 0.690
-4.0, -0.131, -0.105, 0.445
-2.0, -0.103, -0.031, 0.445
0.0, -0.031, -0.034, 0.100
0.0, -0.106, -0.097, 0.384
2.0, -0.099, -0.030, 0.431
4.0, -0.096, 0.035, 0.431
6.0, -0.092, 0.104, 0.501
8.0, -0.089, 0.179, 0.501
10.0, -0.087, 0.220, 0.531
12.0, -0.084, 0.271, 0.531
14.0, -0.083, 0.351, 0.584
16.0, -0.077, 0.406, 0.584
18.0, -0.075, 0.472, 0.676
20.0, -0.074, 0.612, 0.676
22.0, -0.100, 0.726, 0.792
24.0, -0.110, 0.838, 0.792
26.0, -0.108, 0.904, 0.813
28.0, -0.119, 1.009, 0.813
30.0, -0.119, 1.071, 0.775
32.0, -0.126, 1.122, 0.775
34.0, -0.131, 1.129, 0.807
36.0, -0.139, 1.157, 0.807
38.0, -0.147, 1.185, 0.843
40.0, -0.156, 1.210, 0.843
42.0, -0.164, 1.253, 0.950
44.0, -0.174, 1.289, 0.980
46.0, -0.184, 1.336, 1.094
48.0, -0.196, 1.376, 1.042
50.0, -0.210, 1.403, 1.172
52.0, -0.225, 1.450, 1.200
54.0, -0.240, 1.497, 1.214
56.0, -0.257, 1.544, 1.227
58.0, -0.276, 1.557, 1.328
60.0, -0.276, 1.557, 1.332