All shifts are given in stage coordinates. 1) Total applied shifts: Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm] -60.0, 0.193, -0.337, 0.055 -58.0, 0.188, -0.290, 0.109 -56.0, 0.199, -0.311, 0.189 -54.0, 0.210, -0.320, 0.284 -52.0, 0.221, -0.326, 0.373 -50.0, 0.232, -0.347, 0.418 -48.0, 0.258, -0.339, 0.511 -46.0, 0.247, -0.351, 0.568 -44.0, 0.249, -0.376, 0.508 -42.0, 0.257, -0.415, 0.455 -40.0, 0.260, -0.480, 0.430 -38.0, 0.272, -0.537, 0.447 -36.0, 0.280, -0.590, 0.334 -34.0, 0.291, -0.609, 0.349 -32.0, 0.300, -0.608, 0.248 -30.0, 0.310, -0.584, 0.263 -28.0, 0.320, -0.546, 0.269 -26.0, 0.328, -0.478, 0.273 -24.0, 0.337, -0.409, 0.308 -22.0, 0.344, -0.352, 0.291 -20.0, 0.345, -0.306, 0.245 -18.0, 0.328, -0.243, 0.236 -16.0, 0.310, -0.199, 0.186 -14.0, 0.295, -0.190, 0.151 -12.0, 0.288, -0.182, 0.076 -10.0, 0.284, -0.157, 0.077 -8.0, 0.283, -0.134, 0.071 -6.0, 0.287, -0.103, 0.072 -4.0, 0.293, -0.073, -0.056 -2.0, 0.300, -0.014, 0.085 0.0, 0.153, -0.102, 0.071 0.0, 0.097, -0.418, 0.100 2.0, 0.192, -0.384, 0.090 4.0, 0.196, -0.295, 0.013 6.0, 0.199, -0.224, 0.077 8.0, 0.202, -0.143, 0.047 10.0, 0.204, -0.062, 0.001 12.0, 0.205, -0.005, -0.025 14.0, 0.205, 0.039, -0.090 16.0, 0.205, 0.086, -0.125 18.0, 0.209, 0.129, -0.130 20.0, 0.199, 0.238, -0.148 22.0, 0.194, 0.304, -0.089 24.0, 0.193, 0.332, -0.091 26.0, 0.186, 0.408, 0.061 28.0, 0.183, 0.450, 0.096 30.0, 0.177, 0.540, 0.256 32.0, 0.173, 0.605, 0.288 34.0, 0.167, 0.663, 0.342 36.0, 0.163, 0.733, 0.356 38.0, 0.156, 0.823, 0.402 40.0, 0.151, 0.877, 0.424 42.0, 0.142, 0.920, 0.497 44.0, 0.134, 0.985, 0.613 46.0, 0.125, 1.029, 0.749 48.0, 0.118, 1.072, 0.831 50.0, 0.108, 1.103, 1.030 52.0, 0.098, 1.155, 1.158 54.0, 0.085, 1.190, 1.362 56.0, 0.073, 1.228, 1.647 58.0, 0.059, 1.247, 1.952 60.0, 0.062, 1.250, 2.058 2)Excess shifts that are applied by tracking and focusing or manual interaction Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm] -60.0, 0.120, 0.275, 0.643 -58.0, 0.120, 0.275, 0.648 -56.0, 0.136, 0.208, 0.689 -54.0, 0.150, 0.161, 0.770 -52.0, 0.164, 0.112, 0.824 -50.0, 0.177, 0.069, 0.819 -48.0, 0.206, 0.036, 0.855 -46.0, 0.198, -0.006, 0.871 -44.0, 0.204, -0.061, 0.828 -42.0, 0.220, -0.131, 0.848 -40.0, 0.218, -0.203, 0.773 -38.0, 0.227, -0.286, 0.773 -36.0, 0.237, -0.361, 0.677 -34.0, 0.250, -0.410, 0.677 -32.0, 0.262, -0.431, 0.562 -30.0, 0.276, -0.422, 0.562 -28.0, 0.290, -0.418, 0.583 -26.0, 0.301, -0.384, 0.583 -24.0, 0.314, -0.340, 0.593 -22.0, 0.325, -0.286, 0.593 -20.0, 0.327, -0.252, 0.560 -18.0, 0.304, -0.193, 0.560 -16.0, 0.278, -0.141, 0.548 -14.0, 0.257, -0.114, 0.548 -12.0, 0.246, -0.102, 0.502 -10.0, 0.241, -0.099, 0.502 -8.0, 0.242, -0.093, 0.494 -6.0, 0.251, -0.073, 0.494 -4.0, 0.265, -0.045, 0.334 -2.0, 0.284, 0.011, 0.334 0.0, 0.153, -0.110, 0.071 0.0, -0.077, -0.147, 0.498 2.0, 0.020, -0.109, 0.599 4.0, 0.026, -0.025, 0.599 6.0, 0.031, 0.063, 0.704 8.0, 0.036, 0.152, 0.704 10.0, 0.039, 0.257, 0.687 12.0, 0.042, 0.329, 0.687 14.0, 0.043, 0.390, 0.664 16.0, 0.046, 0.450, 0.664 18.0, 0.052, 0.490, 0.687 20.0, 0.038, 0.618, 0.687 22.0, 0.030, 0.689, 0.756 24.0, 0.027, 0.723, 0.756 26.0, 0.019, 0.791, 0.886 28.0, 0.015, 0.844, 0.886 30.0, 0.007, 0.938, 0.999 32.0, 0.002, 1.006, 0.999 34.0, -0.006, 1.066, 1.030 36.0, -0.011, 1.146, 1.030 38.0, -0.020, 1.252, 1.048 40.0, -0.026, 1.313, 1.048 42.0, -0.037, 1.375, 1.104 44.0, -0.047, 1.437, 1.205 46.0, -0.059, 1.479, 1.324 48.0, -0.069, 1.516, 1.390 50.0, -0.082, 1.545, 1.517 52.0, -0.096, 1.586, 1.579 54.0, -0.111, 1.624, 1.718 56.0, -0.126, 1.662, 1.924 58.0, -0.144, 1.666, 2.127 60.0, -0.144, 1.666, 2.080