All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, 0.012, -1.011, 0.015
-58.0, 0.008, -0.964, 0.083
-56.0, 0.020, -0.994, 0.178
-54.0, 0.030, -1.031, 0.255
-52.0, 0.041, -1.057, 0.323
-50.0, 0.055, -1.062, 0.360
-48.0, 0.082, -1.072, 0.479
-46.0, 0.075, -1.058, 0.448
-44.0, 0.080, -1.061, 0.477
-42.0, 0.089, -1.076, 0.461
-40.0, 0.095, -1.098, 0.422
-38.0, 0.108, -1.119, 0.439
-36.0, 0.116, -1.124, 0.343
-34.0, 0.127, -1.117, 0.358
-32.0, 0.135, -1.126, 0.217
-30.0, 0.147, -1.099, 0.232
-28.0, 0.158, -1.024, 0.190
-26.0, 0.167, -0.924, 0.194
-24.0, 0.176, -0.830, 0.171
-22.0, 0.185, -0.753, 0.154
-20.0, 0.187, -0.669, 0.075
-18.0, 0.170, -0.571, 0.065
-16.0, 0.152, -0.465, 0.046
-14.0, 0.141, -0.381, 0.011
-12.0, 0.134, -0.292, -0.027
-10.0, 0.132, -0.206, -0.025
-8.0, 0.135, -0.157, -0.054
-6.0, 0.139, -0.060, -0.053
-4.0, 0.150, 0.029, -0.155
-2.0, 0.155, 0.082, -0.014
0.0, 0.061, -0.024, -0.079
0.0, 0.228, -0.207, 0.003
2.0, 0.282, -0.059, -0.011
4.0, 0.280, 0.068, -0.087
6.0, 0.289, 0.166, -0.025
8.0, 0.286, 0.312, -0.055
10.0, 0.294, 0.405, -0.053
12.0, 0.288, 0.529, -0.079
14.0, 0.295, 0.607, -0.057
16.0, 0.289, 0.709, -0.092
18.0, 0.299, 0.790, -0.060
20.0, 0.281, 0.952, -0.079
22.0, 0.280, 1.011, 0.051
24.0, 0.269, 1.125, 0.049
26.0, 0.271, 1.193, 0.228
28.0, 0.262, 1.311, 0.262
30.0, 0.264, 1.408, 0.469
32.0, 0.257, 1.507, 0.500
34.0, 0.253, 1.560, 0.606
36.0, 0.248, 1.655, 0.620
38.0, 0.240, 1.709, 0.681
40.0, 0.235, 1.775, 0.703
42.0, 0.226, 1.830, 0.777
44.0, 0.219, 1.887, 0.851
46.0, 0.210, 1.939, 0.914
48.0, 0.203, 1.994, 1.052
50.0, 0.195, 2.026, 1.167
52.0, 0.185, 2.076, 1.331
54.0, 0.173, 2.114, 1.500
56.0, 0.161, 2.132, 1.658
58.0, 0.148, 2.165, 1.910
60.0, 0.151, 2.170, 2.064

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.060, -0.399, 0.603
-58.0, -0.060, -0.399, 0.621
-56.0, -0.044, -0.475, 0.679
-54.0, -0.030, -0.549, 0.741
-52.0, -0.016, -0.612, 0.774
-50.0, 0.001, -0.652, 0.761
-48.0, 0.030, -0.692, 0.823
-46.0, 0.026, -0.713, 0.752
-44.0, 0.036, -0.746, 0.797
-42.0, 0.052, -0.792, 0.854
-40.0, 0.053, -0.827, 0.765
-38.0, 0.063, -0.867, 0.765
-36.0, 0.073, -0.910, 0.686
-34.0, 0.086, -0.925, 0.686
-32.0, 0.096, -0.943, 0.531
-30.0, 0.113, -0.944, 0.531
-28.0, 0.128, -0.902, 0.504
-26.0, 0.140, -0.830, 0.504
-24.0, 0.153, -0.768, 0.456
-22.0, 0.166, -0.699, 0.456
-20.0, 0.169, -0.608, 0.389
-18.0, 0.147, -0.511, 0.389
-16.0, 0.121, -0.399, 0.408
-14.0, 0.102, -0.311, 0.408
-12.0, 0.091, -0.221, 0.399
-10.0, 0.088, -0.155, 0.399
-8.0, 0.094, -0.109, 0.369
-6.0, 0.103, -0.033, 0.369
-4.0, 0.122, 0.049, 0.234
-2.0, 0.139, 0.097, 0.234
0.0, 0.061, -0.037, -0.079
0.0, 0.053, 0.065, 0.401
2.0, 0.110, 0.202, 0.499
4.0, 0.110, 0.344, 0.499
6.0, 0.121, 0.445, 0.602
8.0, 0.119, 0.615, 0.602
10.0, 0.129, 0.715, 0.633
12.0, 0.125, 0.863, 0.633
14.0, 0.133, 0.953, 0.697
16.0, 0.129, 1.069, 0.697
18.0, 0.143, 1.136, 0.756
20.0, 0.120, 1.342, 0.756
22.0, 0.116, 1.396, 0.896
24.0, 0.103, 1.521, 0.896
26.0, 0.104, 1.576, 1.052
28.0, 0.094, 1.709, 1.052
30.0, 0.094, 1.806, 1.212
32.0, 0.086, 1.898, 1.212
34.0, 0.081, 1.953, 1.294
36.0, 0.074, 2.061, 1.294
38.0, 0.065, 2.139, 1.326
40.0, 0.057, 2.212, 1.326
42.0, 0.047, 2.284, 1.383
44.0, 0.038, 2.338, 1.443
46.0, 0.026, 2.396, 1.490
48.0, 0.016, 2.438, 1.611
50.0, 0.004, 2.468, 1.655
52.0, -0.008, 2.506, 1.753
54.0, -0.023, 2.548, 1.856
56.0, -0.038, 2.566, 1.935
58.0, -0.055, 2.576, 2.085
60.0, -0.055, 2.576, 2.087