All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.178, -0.786, 0.253
-58.0, -0.183, -0.740, 0.294
-56.0, -0.173, -0.788, 0.373
-54.0, -0.164, -0.826, 0.466
-52.0, -0.155, -0.877, 0.471
-50.0, -0.141, -0.907, 0.481
-48.0, -0.116, -0.942, 0.583
-46.0, -0.124, -0.934, 0.555
-44.0, -0.122, -0.972, 0.562
-42.0, -0.115, -0.981, 0.542
-40.0, -0.111, -1.006, 0.534
-38.0, -0.098, -1.004, 0.551
-36.0, -0.091, -1.033, 0.415
-34.0, -0.081, -1.028, 0.429
-32.0, -0.073, -1.022, 0.299
-30.0, -0.063, -1.001, 0.314
-28.0, -0.054, -0.940, 0.275
-26.0, -0.046, -0.877, 0.279
-24.0, -0.037, -0.823, 0.226
-22.0, -0.031, -0.798, 0.209
-20.0, -0.026, -0.731, 0.157
-18.0, -0.039, -0.659, 0.148
-16.0, -0.058, -0.592, 0.104
-14.0, -0.072, -0.521, 0.069
-12.0, -0.079, -0.443, -0.004
-10.0, -0.086, -0.385, -0.002
-8.0, -0.087, -0.316, 0.029
-6.0, -0.084, -0.238, 0.031
-4.0, -0.078, -0.174, -0.128
-2.0, -0.071, -0.044, 0.012
0.0, -0.026, -0.029, -0.035
0.0, 0.139, -0.541, 0.058
2.0, 0.144, -0.477, 0.015
4.0, 0.148, -0.389, -0.062
6.0, 0.152, -0.293, -0.037
8.0, 0.154, -0.199, -0.068
10.0, 0.155, -0.108, -0.089
12.0, 0.156, -0.029, -0.115
14.0, 0.155, 0.068, -0.143
16.0, 0.156, 0.127, -0.178
18.0, 0.161, 0.217, -0.149
20.0, 0.149, 0.359, -0.168
22.0, 0.142, 0.460, -0.071
24.0, 0.144, 0.519, -0.072
26.0, 0.135, 0.604, 0.087
28.0, 0.136, 0.664, 0.122
30.0, 0.130, 0.778, 0.270
32.0, 0.126, 0.826, 0.302
34.0, 0.119, 0.897, 0.365
36.0, 0.113, 0.989, 0.380
38.0, 0.105, 1.044, 0.468
40.0, 0.098, 1.109, 0.490
42.0, 0.089, 1.173, 0.521
44.0, 0.081, 1.233, 0.584
46.0, 0.072, 1.298, 0.647
48.0, 0.065, 1.345, 0.758
50.0, 0.056, 1.405, 0.852
52.0, 0.045, 1.439, 0.977
54.0, 0.034, 1.474, 1.139
56.0, 0.020, 1.485, 1.319
58.0, 0.004, 1.511, 1.514
60.0, 0.008, 1.514, 1.632

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.251, -0.175, 0.841
-58.0, -0.251, -0.175, 0.833
-56.0, -0.237, -0.269, 0.874
-54.0, -0.223, -0.344, 0.952
-52.0, -0.212, -0.432, 0.922
-50.0, -0.195, -0.497, 0.882
-48.0, -0.168, -0.567, 0.927
-46.0, -0.174, -0.589, 0.859
-44.0, -0.166, -0.652, 0.882
-42.0, -0.151, -0.697, 0.935
-40.0, -0.153, -0.735, 0.877
-38.0, -0.143, -0.753, 0.877
-36.0, -0.134, -0.810, 0.757
-34.0, -0.122, -0.823, 0.757
-32.0, -0.112, -0.837, 0.612
-30.0, -0.097, -0.846, 0.612
-28.0, -0.084, -0.817, 0.589
-26.0, -0.072, -0.783, 0.589
-24.0, -0.060, -0.754, 0.511
-22.0, -0.050, -0.728, 0.511
-20.0, -0.045, -0.678, 0.471
-18.0, -0.063, -0.600, 0.471
-16.0, -0.090, -0.525, 0.467
-14.0, -0.110, -0.456, 0.467
-12.0, -0.121, -0.372, 0.422
-10.0, -0.130, -0.318, 0.422
-8.0, -0.129, -0.268, 0.453
-6.0, -0.120, -0.207, 0.453
-4.0, -0.106, -0.146, 0.261
-2.0, -0.087, -0.038, 0.261
0.0, -0.026, -0.038, -0.035
0.0, -0.035, -0.269, 0.456
2.0, -0.028, -0.209, 0.525
4.0, -0.021, -0.115, 0.525
6.0, -0.016, -0.008, 0.589
8.0, -0.013, 0.102, 0.589
10.0, -0.010, 0.211, 0.597
12.0, -0.007, 0.305, 0.597
14.0, -0.006, 0.422, 0.611
16.0, -0.004, 0.490, 0.611
18.0, 0.004, 0.579, 0.667
20.0, -0.012, 0.732, 0.667
22.0, -0.022, 0.845, 0.775
24.0, -0.022, 0.901, 0.775
26.0, -0.032, 0.988, 0.912
28.0, -0.032, 1.053, 0.912
30.0, -0.040, 1.169, 1.013
32.0, -0.045, 1.223, 1.013
34.0, -0.054, 1.300, 1.054
36.0, -0.060, 1.400, 1.054
38.0, -0.071, 1.472, 1.113
40.0, -0.079, 1.545, 1.113
42.0, -0.090, 1.621, 1.127
44.0, -0.101, 1.684, 1.175
46.0, -0.111, 1.754, 1.223
48.0, -0.122, 1.789, 1.317
50.0, -0.134, 1.847, 1.340
52.0, -0.148, 1.878, 1.399
54.0, -0.162, 1.907, 1.495
56.0, -0.179, 1.920, 1.595
58.0, -0.199, 1.930, 1.689
60.0, -0.199, 1.930, 1.654