All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.133, 1.224, -0.772
-58.0, -0.138, 1.270, -0.562
-56.0, -0.130, 1.181, -0.387
-54.0, -0.122, 1.086, -0.250
-52.0, -0.115, 0.993, -0.082
-50.0, -0.107, 0.897, 0.039
-48.0, -0.099, 0.791, 0.044
-46.0, -0.076, 0.737, 0.062
-44.0, -0.067, 0.642, 0.014
-42.0, -0.080, 0.549, 0.156
-40.0, -0.074, 0.463, 0.150
-38.0, -0.070, 0.394, 0.167
-36.0, -0.066, 0.343, 0.205
-34.0, -0.058, 0.283, 0.220
-32.0, -0.050, 0.228, 0.169
-30.0, -0.040, 0.196, 0.184
-28.0, -0.032, 0.178, 0.208
-26.0, -0.027, 0.161, 0.212
-24.0, -0.020, 0.137, 0.215
-22.0, -0.013, 0.114, 0.198
-20.0, -0.010, 0.084, 0.170
-18.0, -0.031, 0.069, 0.161
-16.0, -0.051, 0.059, 0.104
-14.0, -0.066, 0.056, 0.070
-12.0, -0.072, 0.063, 0.064
-10.0, -0.077, 0.056, 0.066
-8.0, -0.077, 0.046, 0.098
-6.0, -0.076, 0.068, 0.100
-4.0, -0.070, 0.051, -0.028
-2.0, -0.061, 0.091, 0.113
0.0, -0.016, -0.007, 0.070
0.0, 0.118, -0.465, 0.088
2.0, 0.120, -0.478, 0.040
4.0, 0.124, -0.488, -0.037
6.0, 0.128, -0.458, -0.017
8.0, 0.131, -0.445, -0.047
10.0, 0.132, -0.436, -0.107
12.0, 0.134, -0.418, -0.133
14.0, 0.134, -0.419, -0.222
16.0, 0.134, -0.412, -0.257
18.0, 0.138, -0.391, -0.276
20.0, 0.126, -0.316, -0.295
22.0, 0.121, -0.313, -0.280
24.0, 0.119, -0.290, -0.282
26.0, 0.115, -0.265, -0.195
28.0, 0.113, -0.257, -0.160
30.0, 0.106, -0.235, -0.069
32.0, 0.107, -0.246, -0.037
34.0, 0.101, -0.211, -0.015
36.0, 0.096, -0.228, -0.001
38.0, 0.089, -0.232, -0.002
40.0, 0.083, -0.231, 0.020
42.0, 0.075, -0.228, -0.010
44.0, 0.067, -0.226, -0.029
46.0, 0.060, -0.231, -0.032
48.0, 0.052, -0.234, -0.003
50.0, 0.045, -0.217, 0.093
52.0, 0.037, -0.211, 0.199
54.0, 0.029, -0.254, 0.296
56.0, 0.019, -0.260, 0.414
58.0, 0.006, -0.295, 0.545
60.0, 0.009, -0.291, 0.586

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.205, 1.835, -0.183
-58.0, -0.205, 1.835, -0.023
-56.0, -0.194, 1.700, 0.113
-54.0, -0.181, 1.567, 0.236
-52.0, -0.172, 1.438, 0.369
-50.0, -0.161, 1.307, 0.440
-48.0, -0.151, 1.166, 0.388
-46.0, -0.125, 1.075, 0.365
-44.0, -0.111, 0.957, 0.335
-42.0, -0.117, 0.832, 0.549
-40.0, -0.117, 0.734, 0.493
-38.0, -0.115, 0.652, 0.493
-36.0, -0.109, 0.566, 0.548
-34.0, -0.099, 0.483, 0.548
-32.0, -0.089, 0.410, 0.482
-30.0, -0.075, 0.359, 0.482
-28.0, -0.063, 0.308, 0.522
-26.0, -0.053, 0.264, 0.522
-24.0, -0.043, 0.212, 0.500
-22.0, -0.032, 0.174, 0.500
-20.0, -0.029, 0.138, 0.484
-18.0, -0.054, 0.130, 0.484
-16.0, -0.083, 0.126, 0.467
-14.0, -0.104, 0.127, 0.467
-12.0, -0.115, 0.134, 0.491
-10.0, -0.120, 0.115, 0.491
-8.0, -0.119, 0.087, 0.521
-6.0, -0.112, 0.099, 0.521
-4.0, -0.098, 0.079, 0.362
-2.0, -0.077, 0.098, 0.362
0.0, -0.016, -0.015, 0.070
0.0, -0.056, -0.193, 0.486
2.0, -0.052, -0.217, 0.549
4.0, -0.046, -0.210, 0.549
6.0, -0.040, -0.163, 0.610
8.0, -0.036, -0.139, 0.610
10.0, -0.033, -0.113, 0.578
12.0, -0.029, -0.074, 0.578
14.0, -0.028, -0.053, 0.532
16.0, -0.026, -0.040, 0.532
18.0, -0.019, -0.036, 0.540
20.0, -0.035, 0.057, 0.540
22.0, -0.043, 0.090, 0.566
24.0, -0.047, 0.107, 0.566
26.0, -0.052, 0.131, 0.630
28.0, -0.055, 0.132, 0.630
30.0, -0.064, 0.162, 0.674
32.0, -0.064, 0.145, 0.674
34.0, -0.071, 0.177, 0.673
36.0, -0.078, 0.185, 0.673
38.0, -0.087, 0.190, 0.643
40.0, -0.094, 0.205, 0.643
42.0, -0.104, 0.220, 0.597
44.0, -0.115, 0.221, 0.562
46.0, -0.124, 0.220, 0.544
48.0, -0.135, 0.210, 0.556
50.0, -0.145, 0.217, 0.581
52.0, -0.156, 0.227, 0.620
54.0, -0.168, 0.180, 0.652
56.0, -0.180, 0.169, 0.690
58.0, -0.197, 0.116, 0.720
60.0, -0.197, 0.116, 0.608