All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.151, 1.494, -0.653
-58.0, -0.156, 1.541, -0.491
-56.0, -0.146, 1.450, -0.363
-54.0, -0.138, 1.356, -0.213
-52.0, -0.129, 1.261, -0.096
-50.0, -0.120, 1.158, 0.009
-48.0, -0.109, 1.046, 0.093
-46.0, -0.089, 0.928, 0.094
-44.0, -0.079, 0.840, 0.060
-42.0, -0.090, 0.737, 0.188
-40.0, -0.084, 0.630, 0.219
-38.0, -0.079, 0.541, 0.236
-36.0, -0.074, 0.462, 0.274
-34.0, -0.067, 0.382, 0.289
-32.0, -0.059, 0.331, 0.191
-30.0, -0.048, 0.293, 0.206
-28.0, -0.040, 0.251, 0.254
-26.0, -0.031, 0.220, 0.258
-24.0, -0.023, 0.174, 0.270
-22.0, -0.016, 0.131, 0.254
-20.0, -0.013, 0.091, 0.256
-18.0, -0.034, 0.056, 0.247
-16.0, -0.053, 0.033, 0.196
-14.0, -0.065, 0.011, 0.162
-12.0, -0.071, -0.024, 0.115
-10.0, -0.076, -0.064, 0.116
-8.0, -0.076, -0.078, 0.164
-6.0, -0.073, -0.083, 0.165
-4.0, -0.063, -0.091, 0.012
-2.0, -0.038, -0.107, 0.153
0.0, -0.090, 0.046, 0.116
0.0, 0.147, -0.209, 0.151
2.0, 0.130, -0.151, 0.114
4.0, 0.132, -0.151, 0.037
6.0, 0.135, -0.143, 0.089
8.0, 0.136, -0.158, 0.058
10.0, 0.135, -0.162, 0.050
12.0, 0.136, -0.181, 0.024
14.0, 0.135, -0.199, -0.069
16.0, 0.135, -0.219, -0.104
18.0, 0.136, -0.239, -0.145
20.0, 0.125, -0.191, -0.164
22.0, 0.118, -0.172, -0.121
24.0, 0.114, -0.190, -0.122
26.0, 0.111, -0.197, -0.023
28.0, 0.123, -0.196, 0.012
30.0, 0.119, -0.232, 0.029
32.0, 0.110, -0.240, 0.061
34.0, 0.100, -0.237, 0.148
36.0, 0.094, -0.273, 0.162
38.0, 0.088, -0.279, 0.229
40.0, 0.083, -0.304, 0.252
42.0, 0.075, -0.349, 0.239
44.0, 0.071, -0.330, 0.220
46.0, 0.064, -0.337, 0.255
48.0, 0.059, -0.366, 0.294
50.0, 0.054, -0.358, 0.339
52.0, 0.046, -0.359, 0.445
54.0, 0.039, -0.396, 0.628
56.0, 0.031, -0.442, 0.669
58.0, 0.019, -0.496, 0.813
60.0, 0.022, -0.493, 0.849

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.224, 2.106, -0.065
-58.0, -0.224, 2.106, 0.048
-56.0, -0.209, 1.969, 0.137
-54.0, -0.198, 1.838, 0.273
-52.0, -0.186, 1.706, 0.355
-50.0, -0.174, 1.562, 0.410
-48.0, -0.161, 1.421, 0.437
-46.0, -0.138, 1.279, 0.397
-44.0, -0.123, 1.154, 0.380
-42.0, -0.127, 1.020, 0.580
-40.0, -0.127, 0.901, 0.562
-38.0, -0.124, 0.800, 0.562
-36.0, -0.117, 0.684, 0.616
-34.0, -0.108, 0.582, 0.616
-32.0, -0.098, 0.508, 0.504
-30.0, -0.083, 0.456, 0.504
-28.0, -0.070, 0.379, 0.568
-26.0, -0.058, 0.314, 0.568
-24.0, -0.046, 0.243, 0.555
-22.0, -0.035, 0.198, 0.555
-20.0, -0.032, 0.145, 0.570
-18.0, -0.057, 0.106, 0.570
-16.0, -0.085, 0.091, 0.559
-14.0, -0.103, 0.076, 0.559
-12.0, -0.113, 0.048, 0.541
-10.0, -0.119, -0.000, 0.541
-8.0, -0.117, -0.025, 0.587
-6.0, -0.108, -0.044, 0.587
-4.0, -0.091, -0.063, 0.402
-2.0, -0.054, -0.092, 0.402
0.0, -0.090, 0.040, 0.116
0.0, -0.028, 0.063, 0.549
2.0, -0.042, 0.104, 0.623
4.0, -0.037, 0.113, 0.623
6.0, -0.033, 0.136, 0.715
8.0, -0.031, 0.138, 0.715
10.0, -0.030, 0.154, 0.735
12.0, -0.027, 0.151, 0.735
14.0, -0.027, 0.155, 0.685
16.0, -0.024, 0.147, 0.685
18.0, -0.020, 0.123, 0.671
20.0, -0.036, 0.190, 0.671
22.0, -0.046, 0.214, 0.725
24.0, -0.052, 0.199, 0.725
26.0, -0.056, 0.197, 0.801
28.0, -0.046, 0.193, 0.801
30.0, -0.052, 0.177, 0.772
32.0, -0.061, 0.151, 0.772
34.0, -0.072, 0.157, 0.836
36.0, -0.080, 0.142, 0.836
38.0, -0.088, 0.143, 0.875
40.0, -0.094, 0.132, 0.875
42.0, -0.104, 0.108, 0.846
44.0, -0.110, 0.117, 0.811
46.0, -0.120, 0.105, 0.831
48.0, -0.128, 0.078, 0.852
50.0, -0.136, 0.077, 0.827
52.0, -0.147, 0.079, 0.867
54.0, -0.158, 0.038, 0.984
56.0, -0.168, -0.007, 0.945
58.0, -0.184, -0.077, 0.987
60.0, -0.184, -0.077, 0.871