All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.158, 2.037, -1.079
-58.0, -0.163, 2.084, -0.881
-56.0, -0.152, 1.976, -0.782
-54.0, -0.145, 1.884, -0.619
-52.0, -0.135, 1.769, -0.443
-50.0, -0.127, 1.638, -0.328
-48.0, -0.118, 1.532, -0.279
-46.0, -0.094, 1.422, -0.295
-44.0, -0.084, 1.314, 0.134
-42.0, -0.098, 1.205, -0.100
-40.0, -0.093, 1.117, 0.006
-38.0, -0.087, 1.041, 0.022
-36.0, -0.083, 0.948, 0.074
-34.0, -0.074, 0.864, 0.089
-32.0, -0.066, 0.800, -0.030
-30.0, -0.055, 0.757, -0.015
-28.0, -0.047, 0.694, 0.022
-26.0, -0.040, 0.613, 0.026
-24.0, -0.032, 0.552, 0.069
-22.0, -0.025, 0.510, 0.053
-20.0, -0.024, 0.446, 0.082
-18.0, -0.049, 0.394, 0.073
-16.0, -0.068, 0.363, 0.073
-14.0, -0.079, 0.336, 0.039
-12.0, -0.085, 0.288, 0.070
-10.0, -0.088, 0.237, 0.071
-8.0, -0.088, 0.215, 0.116
-6.0, -0.086, 0.212, 0.117
-4.0, -0.075, 0.157, -0.048
-2.0, -0.065, 0.131, 0.093
0.0, -0.024, -0.010, 0.055
0.0, 0.091, -0.467, 0.029
2.0, 0.093, -0.502, -0.055
4.0, 0.095, -0.515, -0.132
6.0, 0.096, -0.532, -0.080
8.0, 0.098, -0.541, -0.111
10.0, 0.098, -0.550, -0.155
12.0, 0.100, -0.588, -0.181
14.0, 0.098, -0.610, -0.267
16.0, 0.098, -0.640, -0.303
18.0, 0.098, -0.687, -0.346
20.0, 0.088, -0.650, -0.365
22.0, 0.076, -0.648, -0.355
24.0, 0.075, -0.665, -0.357
26.0, 0.065, -0.660, -0.318
28.0, 0.066, -0.724, -0.283
30.0, 0.056, -0.723, -0.289
32.0, 0.058, -0.741, -0.257
34.0, 0.046, -0.763, -0.265
36.0, 0.045, -0.788, -0.251
38.0, 0.036, -0.805, -0.298
40.0, 0.032, -0.857, -0.276
42.0, 0.022, -0.882, -0.343
44.0, 0.014, -0.909, -0.307
46.0, 0.003, -0.926, -0.344
48.0, -0.004, -0.951, -0.296
50.0, -0.013, -0.945, -0.272
52.0, -0.024, -0.974, -0.169
54.0, -0.034, -0.997, -0.125
56.0, -0.047, -1.057, -0.013
58.0, -0.062, -1.105, 0.024
60.0, -0.058, -1.101, 0.111

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.230, 2.649, -0.491
-58.0, -0.230, 2.649, -0.343
-56.0, -0.216, 2.495, -0.282
-54.0, -0.205, 2.366, -0.133
-52.0, -0.192, 2.214, 0.008
-50.0, -0.182, 2.054, 0.073
-48.0, -0.170, 1.907, 0.065
-46.0, -0.144, 1.762, 0.008
-44.0, -0.128, 1.629, 0.455
-42.0, -0.134, 1.496, 0.293
-40.0, -0.135, 1.388, 0.348
-38.0, -0.132, 1.292, 0.348
-36.0, -0.127, 1.177, 0.417
-34.0, -0.116, 1.071, 0.417
-32.0, -0.104, 0.977, 0.283
-30.0, -0.089, 0.912, 0.283
-28.0, -0.077, 0.817, 0.336
-26.0, -0.066, 0.715, 0.336
-24.0, -0.055, 0.629, 0.354
-22.0, -0.044, 0.569, 0.354
-20.0, -0.043, 0.506, 0.396
-18.0, -0.072, 0.453, 0.396
-16.0, -0.100, 0.428, 0.436
-14.0, -0.118, 0.401, 0.436
-12.0, -0.127, 0.359, 0.496
-10.0, -0.131, 0.303, 0.496
-8.0, -0.129, 0.268, 0.539
-6.0, -0.121, 0.237, 0.539
-4.0, -0.103, 0.180, 0.342
-2.0, -0.081, 0.146, 0.342
0.0, -0.024, -0.018, 0.055
0.0, -0.083, -0.195, 0.427
2.0, -0.078, -0.246, 0.455
4.0, -0.074, -0.251, 0.455
6.0, -0.071, -0.252, 0.546
8.0, -0.069, -0.241, 0.546
10.0, -0.066, -0.240, 0.531
12.0, -0.063, -0.261, 0.531
14.0, -0.064, -0.252, 0.486
16.0, -0.062, -0.271, 0.486
18.0, -0.059, -0.323, 0.470
20.0, -0.074, -0.276, 0.470
22.0, -0.089, -0.256, 0.490
24.0, -0.091, -0.284, 0.490
26.0, -0.103, -0.271, 0.507
28.0, -0.102, -0.335, 0.507
30.0, -0.114, -0.316, 0.454
32.0, -0.113, -0.350, 0.454
34.0, -0.126, -0.360, 0.423
36.0, -0.128, -0.389, 0.423
38.0, -0.140, -0.383, 0.348
40.0, -0.146, -0.421, 0.348
42.0, -0.158, -0.434, 0.264
44.0, -0.168, -0.457, 0.285
46.0, -0.181, -0.476, 0.232
48.0, -0.191, -0.507, 0.263
50.0, -0.204, -0.503, 0.216
52.0, -0.218, -0.535, 0.253
54.0, -0.231, -0.564, 0.231
56.0, -0.246, -0.629, 0.263
58.0, -0.265, -0.686, 0.199
60.0, -0.265, -0.686, 0.133