All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.160, 1.549, -0.700
-58.0, -0.165, 1.595, -0.573
-56.0, -0.155, 1.495, -0.467
-54.0, -0.148, 1.391, -0.324
-52.0, -0.140, 1.280, -0.168
-50.0, -0.131, 1.162, -0.068
-48.0, -0.123, 1.045, -0.029
-46.0, -0.100, 0.941, -0.027
-44.0, -0.100, 0.864, 0.182
-42.0, -0.105, 0.786, 0.092
-40.0, -0.101, 0.721, 0.259
-38.0, -0.097, 0.638, 0.276
-36.0, -0.094, 0.567, 0.322
-34.0, -0.087, 0.502, 0.336
-32.0, -0.079, 0.461, 0.213
-30.0, -0.068, 0.395, 0.228
-28.0, -0.059, 0.350, 0.190
-26.0, -0.050, 0.295, 0.195
-24.0, -0.044, 0.233, 0.182
-22.0, -0.036, 0.211, 0.165
-20.0, -0.038, 0.179, 0.180
-18.0, -0.062, 0.165, 0.171
-16.0, -0.081, 0.167, 0.204
-14.0, -0.091, 0.149, 0.169
-12.0, -0.097, 0.138, 0.214
-10.0, -0.098, 0.151, 0.216
-8.0, -0.095, 0.142, 0.242
-6.0, -0.090, 0.157, 0.243
-4.0, -0.077, 0.120, 0.056
-2.0, -0.064, 0.110, 0.197
0.0, -0.018, -0.010, 0.129
0.0, 0.100, -0.446, 0.192
2.0, 0.105, -0.478, 0.099
4.0, 0.107, -0.483, 0.023
6.0, 0.108, -0.479, 0.062
8.0, 0.110, -0.458, 0.032
10.0, 0.111, -0.450, 0.041
12.0, 0.113, -0.442, 0.015
14.0, 0.113, -0.450, -0.019
16.0, 0.115, -0.447, -0.054
18.0, 0.118, -0.449, -0.051
20.0, 0.106, -0.376, -0.070
22.0, 0.101, -0.412, -0.101
24.0, 0.097, -0.398, -0.102
26.0, 0.092, -0.379, -0.133
28.0, 0.089, -0.386, -0.099
30.0, 0.082, -0.370, -0.018
32.0, 0.079, -0.382, 0.013
34.0, 0.072, -0.388, 0.037
36.0, 0.067, -0.395, 0.051
38.0, 0.059, -0.406, 0.058
40.0, 0.053, -0.423, 0.081
42.0, 0.043, -0.431, 0.081
44.0, 0.036, -0.447, 0.120
46.0, 0.025, -0.443, 0.156
48.0, 0.019, -0.450, 0.214
50.0, 0.009, -0.459, 0.246
52.0, -0.001, -0.461, 0.338
54.0, -0.013, -0.479, 0.383
56.0, -0.024, -0.507, 0.479
58.0, -0.039, -0.548, 0.549
60.0, -0.036, -0.550, 0.590

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.233, 2.160, -0.112
-58.0, -0.233, 2.160, -0.034
-56.0, -0.219, 2.014, 0.033
-54.0, -0.208, 1.873, 0.162
-52.0, -0.197, 1.726, 0.283
-50.0, -0.186, 1.572, 0.333
-48.0, -0.175, 1.420, 0.315
-46.0, -0.150, 1.291, 0.277
-44.0, -0.145, 1.178, 0.503
-42.0, -0.142, 1.070, 0.484
-40.0, -0.143, 0.986, 0.602
-38.0, -0.142, 0.889, 0.602
-36.0, -0.137, 0.790, 0.664
-34.0, -0.128, 0.707, 0.664
-32.0, -0.117, 0.639, 0.527
-30.0, -0.102, 0.555, 0.527
-28.0, -0.089, 0.473, 0.505
-26.0, -0.077, 0.389, 0.505
-24.0, -0.067, 0.313, 0.467
-22.0, -0.055, 0.271, 0.467
-20.0, -0.057, 0.238, 0.494
-18.0, -0.085, 0.226, 0.494
-16.0, -0.113, 0.231, 0.566
-14.0, -0.129, 0.219, 0.566
-12.0, -0.139, 0.218, 0.641
-10.0, -0.141, 0.209, 0.641
-8.0, -0.136, 0.190, 0.665
-6.0, -0.126, 0.179, 0.665
-4.0, -0.105, 0.142, 0.446
-2.0, -0.080, 0.124, 0.446
0.0, -0.018, -0.022, 0.129
0.0, -0.075, -0.175, 0.589
2.0, -0.067, -0.203, 0.609
4.0, -0.062, -0.205, 0.609
6.0, -0.059, -0.184, 0.689
8.0, -0.056, -0.144, 0.689
10.0, -0.054, -0.117, 0.727
12.0, -0.050, -0.099, 0.727
14.0, -0.048, -0.084, 0.735
16.0, -0.045, -0.075, 0.735
18.0, -0.038, -0.103, 0.766
20.0, -0.056, -0.002, 0.766
22.0, -0.064, -0.012, 0.745
24.0, -0.069, -0.001, 0.745
26.0, -0.076, 0.019, 0.691
28.0, -0.080, 0.012, 0.691
30.0, -0.088, 0.027, 0.725
32.0, -0.092, 0.010, 0.725
34.0, -0.100, 0.011, 0.725
36.0, -0.107, 0.011, 0.725
38.0, -0.117, 0.023, 0.704
40.0, -0.124, 0.013, 0.704
42.0, -0.136, 0.017, 0.688
44.0, -0.146, 0.005, 0.712
46.0, -0.159, 0.008, 0.732
48.0, -0.168, -0.012, 0.773
50.0, -0.182, -0.016, 0.734
52.0, -0.194, -0.022, 0.760
54.0, -0.209, -0.046, 0.740
56.0, -0.223, -0.073, 0.755
58.0, -0.242, -0.134, 0.724
60.0, -0.242, -0.134, 0.612