All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.158, -1.997, 1.109
-58.0, -0.162, -1.951, 1.135
-56.0, -0.153, -1.965, 1.162
-54.0, -0.146, -2.007, 1.179
-52.0, -0.136, -2.032, 1.182
-50.0, -0.130, -2.060, 1.138
-48.0, -0.120, -2.062, 1.102
-46.0, -0.099, -2.064, 1.014
-44.0, -0.089, -2.025, 0.872
-42.0, -0.101, -1.970, 1.007
-40.0, -0.097, -1.904, 0.942
-38.0, -0.092, -1.847, 0.959
-36.0, -0.089, -1.802, 0.892
-34.0, -0.084, -1.733, 0.907
-32.0, -0.078, -1.675, 0.740
-30.0, -0.064, -1.610, 0.755
-28.0, -0.054, -1.541, 0.548
-26.0, -0.045, -1.458, 0.553
-24.0, -0.036, -1.365, 0.431
-22.0, -0.031, -1.278, 0.415
-20.0, -0.033, -1.164, 0.293
-18.0, -0.055, -1.010, 0.284
-16.0, -0.075, -0.852, 0.282
-14.0, -0.086, -0.707, 0.248
-12.0, -0.089, -0.560, 0.276
-10.0, -0.090, -0.403, 0.278
-8.0, -0.084, -0.251, 0.312
-6.0, -0.077, -0.109, 0.313
-4.0, -0.058, -0.021, 0.138
-2.0, -0.048, 0.111, 0.278
0.0, -0.150, 0.045, 0.150
0.0, 0.185, -0.356, 0.178
2.0, 0.375, -0.457, 0.102
4.0, 0.376, -0.311, 0.025
6.0, 0.381, -0.153, 0.031
8.0, 0.379, 0.043, 0.001
10.0, 0.386, 0.190, 0.030
12.0, 0.382, 0.366, 0.004
14.0, 0.389, 0.498, 0.067
16.0, 0.386, 0.663, 0.032
18.0, 0.393, 0.774, 0.127
20.0, 0.395, 0.980, 0.109
22.0, 0.378, 1.105, 0.236
24.0, 0.370, 1.276, 0.234
26.0, 0.376, 1.384, 0.338
28.0, 0.368, 1.538, 0.372
30.0, 0.371, 1.666, 0.454
32.0, 0.361, 1.785, 0.486
34.0, 0.362, 1.890, 0.596
36.0, 0.356, 2.031, 0.610
38.0, 0.350, 2.127, 0.725
40.0, 0.347, 2.244, 0.748
42.0, 0.338, 2.345, 0.923
44.0, 0.333, 2.453, 1.077
46.0, 0.325, 2.551, 1.222
48.0, 0.317, 2.648, 1.317
50.0, 0.308, 2.706, 1.455
52.0, 0.297, 2.781, 1.571
54.0, 0.285, 2.844, 1.740
56.0, 0.272, 2.916, 1.849
58.0, 0.258, 2.951, 2.074
60.0, 0.261, 2.949, 2.183

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.230, -1.385, 1.698
-58.0, -0.230, -1.385, 1.674
-56.0, -0.216, -1.446, 1.663
-54.0, -0.205, -1.525, 1.665
-52.0, -0.194, -1.586, 1.633
-50.0, -0.185, -1.650, 1.539
-48.0, -0.173, -1.687, 1.445
-46.0, -0.149, -1.711, 1.318
-44.0, -0.133, -1.710, 1.193
-42.0, -0.137, -1.687, 1.400
-40.0, -0.140, -1.633, 1.285
-38.0, -0.137, -1.595, 1.285
-36.0, -0.132, -1.580, 1.235
-34.0, -0.125, -1.528, 1.235
-32.0, -0.116, -1.498, 1.053
-30.0, -0.099, -1.455, 1.053
-28.0, -0.084, -1.425, 0.862
-26.0, -0.071, -1.375, 0.862
-24.0, -0.059, -1.295, 0.716
-22.0, -0.049, -1.208, 0.716
-20.0, -0.052, -1.104, 0.607
-18.0, -0.078, -0.952, 0.607
-16.0, -0.107, -0.786, 0.645
-14.0, -0.125, -0.636, 0.645
-12.0, -0.131, -0.489, 0.702
-10.0, -0.133, -0.345, 0.702
-8.0, -0.125, -0.211, 0.735
-6.0, -0.113, -0.085, 0.735
-4.0, -0.087, 0.006, 0.527
-2.0, -0.064, 0.126, 0.527
0.0, -0.150, 0.024, 0.150
0.0, 0.011, -0.084, 0.575
2.0, 0.203, -0.181, 0.611
4.0, 0.207, -0.027, 0.611
6.0, 0.213, 0.127, 0.658
8.0, 0.212, 0.345, 0.658
10.0, 0.221, 0.507, 0.715
12.0, 0.219, 0.699, 0.715
14.0, 0.228, 0.851, 0.821
16.0, 0.226, 1.025, 0.821
18.0, 0.236, 1.127, 0.944
20.0, 0.234, 1.364, 0.944
22.0, 0.213, 1.491, 1.081
24.0, 0.204, 1.671, 1.081
26.0, 0.209, 1.767, 1.162
28.0, 0.200, 1.927, 1.162
30.0, 0.201, 2.064, 1.197
32.0, 0.190, 2.181, 1.197
34.0, 0.189, 2.284, 1.285
36.0, 0.182, 2.428, 1.285
38.0, 0.175, 2.549, 1.371
40.0, 0.169, 2.689, 1.371
42.0, 0.159, 2.802, 1.530
44.0, 0.152, 2.899, 1.668
46.0, 0.141, 2.995, 1.798
48.0, 0.130, 3.083, 1.876
50.0, 0.118, 3.149, 1.943
52.0, 0.103, 3.220, 1.992
54.0, 0.089, 3.277, 2.096
56.0, 0.073, 3.341, 2.126
58.0, 0.055, 3.365, 2.248
60.0, 0.055, 3.365, 2.205