All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.103, 1.048, -0.644
-58.0, -0.108, 1.094, -0.530
-56.0, -0.100, 1.003, -0.403
-54.0, -0.092, 0.899, -0.318
-52.0, -0.086, 0.783, -0.245
-50.0, -0.079, 0.677, -0.165
-48.0, -0.072, 0.567, -0.100
-46.0, -0.064, 0.485, -0.074
-44.0, -0.041, 0.433, -0.111
-42.0, -0.043, 0.392, 0.059
-40.0, -0.051, 0.366, 0.071
-38.0, -0.043, 0.319, 0.088
-36.0, -0.044, 0.272, 0.148
-34.0, -0.038, 0.236, 0.163
-32.0, -0.037, 0.183, 0.131
-30.0, -0.029, 0.117, 0.146
-28.0, -0.026, 0.062, 0.109
-26.0, -0.021, 0.012, 0.114
-24.0, -0.014, -0.029, 0.072
-22.0, -0.008, -0.061, 0.056
-20.0, -0.011, -0.067, 0.002
-18.0, -0.037, -0.030, -0.007
-16.0, -0.055, -0.007, -0.013
-14.0, -0.068, 0.023, -0.048
-12.0, -0.074, 0.062, -0.001
-10.0, -0.080, 0.102, 0.001
-8.0, -0.075, 0.105, 0.061
-6.0, -0.077, 0.115, 0.063
-4.0, -0.066, 0.076, -0.106
-2.0, -0.061, 0.065, 0.035
0.0, -0.019, -0.001, -0.029
0.0, 0.157, -0.371, -0.072
2.0, 0.159, -0.379, -0.134
4.0, 0.163, -0.371, -0.211
6.0, 0.168, -0.334, -0.231
8.0, 0.172, -0.304, -0.262
10.0, 0.174, -0.248, -0.324
12.0, 0.178, -0.202, -0.350
14.0, 0.178, -0.162, -0.337
16.0, 0.181, -0.147, -0.372
18.0, 0.182, -0.136, -0.303
20.0, 0.190, -0.097, -0.322
22.0, 0.167, -0.053, -0.240
24.0, 0.166, -0.035, -0.242
26.0, 0.162, 0.002, -0.198
28.0, 0.162, 0.007, -0.163
30.0, 0.158, 0.040, -0.184
32.0, 0.157, 0.054, -0.153
34.0, 0.151, 0.088, -0.167
36.0, 0.147, 0.095, -0.153
38.0, 0.142, 0.121, -0.104
40.0, 0.137, 0.151, -0.082
42.0, 0.132, 0.172, -0.008
44.0, 0.125, 0.194, 0.056
46.0, 0.119, 0.176, 0.191
48.0, 0.112, 0.164, 0.238
50.0, 0.102, 0.166, 0.346
52.0, 0.092, 0.129, 0.391
54.0, 0.081, 0.098, 0.427
56.0, 0.068, 0.079, 0.472
58.0, 0.054, 0.076, 0.541
60.0, 0.058, 0.079, 0.511

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.176, 1.659, -0.056
-58.0, -0.176, 1.659, 0.009
-56.0, -0.164, 1.522, 0.097
-54.0, -0.152, 1.381, 0.169
-52.0, -0.143, 1.229, 0.206
-50.0, -0.133, 1.087, 0.236
-48.0, -0.124, 0.948, 0.244
-46.0, -0.114, 0.830, 0.230
-44.0, -0.085, 0.747, 0.209
-42.0, -0.080, 0.683, 0.451
-40.0, -0.094, 0.637, 0.414
-38.0, -0.088, 0.570, 0.414
-36.0, -0.087, 0.501, 0.491
-34.0, -0.080, 0.442, 0.491
-32.0, -0.075, 0.366, 0.445
-30.0, -0.064, 0.278, 0.445
-28.0, -0.057, 0.191, 0.424
-26.0, -0.047, 0.106, 0.424
-24.0, -0.036, 0.040, 0.358
-22.0, -0.027, -0.001, 0.358
-20.0, -0.030, -0.014, 0.316
-18.0, -0.060, 0.021, 0.316
-16.0, -0.087, 0.051, 0.350
-14.0, -0.106, 0.083, 0.350
-12.0, -0.116, 0.134, 0.425
-10.0, -0.124, 0.153, 0.425
-8.0, -0.116, 0.148, 0.484
-6.0, -0.113, 0.154, 0.484
-4.0, -0.094, 0.099, 0.284
-2.0, -0.077, 0.079, 0.284
0.0, -0.019, -0.015, -0.029
0.0, -0.017, -0.099, 0.326
2.0, -0.013, -0.109, 0.376
4.0, -0.007, -0.096, 0.376
6.0, -0.000, -0.037, 0.396
8.0, 0.005, 0.008, 0.396
10.0, 0.009, 0.079, 0.361
12.0, 0.015, 0.138, 0.361
14.0, 0.017, 0.195, 0.417
16.0, 0.021, 0.216, 0.417
18.0, 0.026, 0.221, 0.513
20.0, 0.028, 0.288, 0.513
22.0, 0.002, 0.343, 0.605
24.0, 0.000, 0.346, 0.605
26.0, -0.005, 0.378, 0.626
28.0, -0.007, 0.403, 0.626
30.0, -0.012, 0.448, 0.559
32.0, -0.014, 0.445, 0.559
34.0, -0.021, 0.476, 0.521
36.0, -0.027, 0.501, 0.521
38.0, -0.034, 0.550, 0.542
40.0, -0.041, 0.594, 0.542
42.0, -0.048, 0.620, 0.599
44.0, -0.056, 0.646, 0.648
46.0, -0.065, 0.627, 0.767
48.0, -0.075, 0.608, 0.797
50.0, -0.088, 0.602, 0.834
52.0, -0.101, 0.568, 0.813
54.0, -0.116, 0.525, 0.783
56.0, -0.131, 0.514, 0.749
58.0, -0.149, 0.495, 0.715
60.0, -0.149, 0.495, 0.533