All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.196, 1.180, 2.010
-58.0, -0.200, 1.226, 2.155
-56.0, -0.191, 1.082, 2.252
-54.0, -0.180, 0.947, 2.379
-52.0, -0.173, 0.818, 2.454
-50.0, -0.164, 0.724, 2.522
-48.0, -0.155, 0.654, 2.564
-46.0, -0.146, 0.606, 2.627
-44.0, -0.137, 0.565, 2.702
-42.0, -0.129, 0.483, 2.690
-40.0, -0.124, 0.431, 2.780
-38.0, -0.115, 0.376, 2.796
-36.0, -0.108, 0.293, 2.755
-34.0, -0.102, 0.228, 2.769
-32.0, -0.095, 0.163, 2.665
-30.0, -0.089, 0.106, 2.680
-28.0, -0.084, 0.065, 2.643
-26.0, -0.080, 0.030, 2.647
-24.0, -0.076, 0.006, 2.614
-22.0, -0.070, 0.000, 2.597
-20.0, -0.072, -0.017, 2.621
-18.0, -0.096, 0.006, 2.612
-16.0, -0.114, -0.000, 2.660
-14.0, -0.127, -0.004, 2.625
-12.0, -0.130, 0.001, 2.648
-10.0, -0.133, -0.018, 2.650
-8.0, -0.127, -0.018, 2.612
-6.0, -0.121, 0.005, 2.613
-4.0, -0.108, -0.029, 2.382
-2.0, -0.094, 0.017, 2.522
0.0, -0.042, -0.044, 2.441
0.0, 0.057, -0.286, 2.376
2.0, 0.054, -0.258, 2.275
4.0, 0.061, -0.276, 2.198
6.0, 0.062, -0.225, 2.191
8.0, 0.066, -0.256, 2.160
10.0, 0.069, -0.246, 2.178
12.0, 0.070, -0.232, 2.152
14.0, 0.073, -0.244, 2.157
16.0, 0.073, -0.236, 2.122
18.0, 0.077, -0.229, 2.140
20.0, 0.075, -0.180, 2.121
22.0, 0.078, -0.140, 2.200
24.0, 0.053, -0.063, 2.198
26.0, 0.045, 0.005, 2.151
28.0, 0.047, 0.018, 2.186
30.0, 0.038, 0.070, 2.184
32.0, 0.038, 0.053, 2.216
34.0, 0.031, 0.078, 2.271
36.0, 0.025, 0.069, 2.285
38.0, 0.017, 0.039, 2.418
40.0, 0.009, 0.008, 2.441
42.0, 0.001, -0.015, 2.576
44.0, -0.008, -0.022, 2.614
46.0, -0.017, -0.017, 2.643
48.0, -0.027, -0.006, 2.632
50.0, -0.039, 0.008, 2.669
52.0, -0.052, 0.036, 2.705
54.0, -0.063, 0.063, 2.771
56.0, -0.078, 0.093, 2.887
58.0, -0.094, 0.102, 3.005
60.0, -0.091, 0.106, 3.039

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.268, 1.791, 2.598
-58.0, -0.268, 1.791, 2.694
-56.0, -0.254, 1.601, 2.753
-54.0, -0.240, 1.428, 2.865
-52.0, -0.230, 1.269, 2.905
-50.0, -0.218, 1.133, 2.923
-48.0, -0.208, 1.029, 2.908
-46.0, -0.196, 0.951, 2.931
-44.0, -0.181, 0.879, 3.022
-42.0, -0.166, 0.766, 3.083
-40.0, -0.167, 0.710, 3.122
-38.0, -0.160, 0.628, 3.122
-36.0, -0.151, 0.523, 3.097
-34.0, -0.143, 0.435, 3.097
-32.0, -0.134, 0.347, 2.978
-30.0, -0.123, 0.267, 2.978
-28.0, -0.114, 0.195, 2.957
-26.0, -0.107, 0.130, 2.957
-24.0, -0.098, 0.075, 2.899
-22.0, -0.089, 0.060, 2.899
-20.0, -0.091, 0.042, 2.935
-18.0, -0.119, 0.056, 2.935
-16.0, -0.146, 0.058, 3.022
-14.0, -0.165, 0.061, 3.022
-12.0, -0.172, 0.072, 3.074
-10.0, -0.176, 0.040, 3.074
-8.0, -0.168, 0.022, 3.035
-6.0, -0.156, 0.033, 3.035
-4.0, -0.136, -0.001, 2.771
-2.0, -0.110, 0.031, 2.771
0.0, -0.042, -0.054, 2.441
0.0, -0.117, -0.014, 2.774
2.0, -0.117, 0.011, 2.785
4.0, -0.108, 0.000, 2.785
6.0, -0.106, 0.055, 2.818
8.0, -0.100, 0.053, 2.818
10.0, -0.096, 0.080, 2.864
12.0, -0.093, 0.113, 2.864
14.0, -0.089, 0.120, 2.911
16.0, -0.086, 0.135, 2.911
18.0, -0.080, 0.126, 2.956
20.0, -0.086, 0.194, 2.956
22.0, -0.086, 0.261, 3.045
24.0, -0.113, 0.325, 3.045
26.0, -0.122, 0.395, 2.975
28.0, -0.122, 0.414, 2.975
30.0, -0.132, 0.474, 2.927
32.0, -0.133, 0.452, 2.927
34.0, -0.142, 0.472, 2.959
36.0, -0.149, 0.485, 2.959
38.0, -0.158, 0.461, 3.064
40.0, -0.169, 0.452, 3.064
42.0, -0.178, 0.434, 3.183
44.0, -0.190, 0.429, 3.206
46.0, -0.201, 0.434, 3.219
48.0, -0.214, 0.438, 3.191
50.0, -0.229, 0.451, 3.157
52.0, -0.245, 0.475, 3.127
54.0, -0.259, 0.497, 3.127
56.0, -0.277, 0.528, 3.163
58.0, -0.297, 0.522, 3.180
60.0, -0.297, 0.522, 3.061