All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.158, 1.670, -0.727
-58.0, -0.162, 1.716, -0.595
-56.0, -0.150, 1.607, -0.465
-54.0, -0.141, 1.475, -0.375
-52.0, -0.133, 1.349, -0.296
-50.0, -0.125, 1.240, -0.183
-48.0, -0.116, 1.124, -0.084
-46.0, -0.108, 1.029, 0.023
-44.0, -0.085, 0.958, -0.004
-42.0, -0.086, 0.892, 0.227
-40.0, -0.093, 0.829, 0.148
-38.0, -0.085, 0.772, 0.165
-36.0, -0.085, 0.692, 0.266
-34.0, -0.081, 0.618, 0.281
-32.0, -0.078, 0.539, 0.173
-30.0, -0.070, 0.436, 0.188
-28.0, -0.065, 0.362, 0.167
-26.0, -0.056, 0.293, 0.171
-24.0, -0.048, 0.220, 0.168
-22.0, -0.040, 0.154, 0.152
-20.0, -0.041, 0.130, 0.175
-18.0, -0.064, 0.135, 0.165
-16.0, -0.078, 0.150, 0.191
-14.0, -0.090, 0.168, 0.157
-12.0, -0.097, 0.188, 0.158
-10.0, -0.098, 0.204, 0.159
-8.0, -0.092, 0.185, 0.157
-6.0, -0.090, 0.178, 0.158
-4.0, -0.077, 0.115, -0.023
-2.0, -0.069, 0.097, 0.118
0.0, -0.026, -0.001, 0.053
0.0, 0.104, -0.388, 0.107
2.0, 0.106, -0.431, 0.025
4.0, 0.107, -0.458, -0.052
6.0, 0.109, -0.446, -0.080
8.0, 0.110, -0.440, -0.111
10.0, 0.111, -0.411, -0.133
12.0, 0.114, -0.378, -0.159
14.0, 0.115, -0.362, -0.184
16.0, 0.115, -0.354, -0.219
18.0, 0.116, -0.377, -0.229
20.0, 0.119, -0.363, -0.248
22.0, 0.098, -0.330, -0.237
24.0, 0.089, -0.334, -0.239
26.0, 0.092, -0.374, -0.210
28.0, 0.082, -0.376, -0.175
30.0, 0.083, -0.391, -0.202
32.0, 0.074, -0.393, -0.170
34.0, 0.073, -0.422, -0.152
36.0, 0.062, -0.413, -0.138
38.0, 0.061, -0.387, -0.142
40.0, 0.051, -0.370, -0.120
42.0, 0.049, -0.364, -0.083
44.0, 0.042, -0.352, -0.053
46.0, 0.035, -0.372, 0.001
48.0, 0.025, -0.426, 0.054
50.0, 0.014, -0.462, 0.080
52.0, 0.005, -0.528, 0.166
54.0, -0.001, -0.604, 0.414
56.0, -0.000, -0.652, 0.293
58.0, -0.023, -0.698, 0.266
60.0, -0.019, -0.695, 0.280

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.230, 2.282, -0.139
-58.0, -0.230, 2.282, -0.056
-56.0, -0.213, 2.126, 0.035
-54.0, -0.201, 1.957, 0.112
-52.0, -0.190, 1.794, 0.155
-50.0, -0.179, 1.645, 0.218
-48.0, -0.168, 1.499, 0.260
-46.0, -0.158, 1.380, 0.327
-44.0, -0.130, 1.272, 0.317
-42.0, -0.123, 1.176, 0.620
-40.0, -0.136, 1.095, 0.491
-38.0, -0.130, 1.024, 0.491
-36.0, -0.128, 0.922, 0.609
-34.0, -0.122, 0.824, 0.609
-32.0, -0.116, 0.722, 0.487
-30.0, -0.105, 0.597, 0.487
-28.0, -0.095, 0.492, 0.481
-26.0, -0.082, 0.395, 0.481
-24.0, -0.071, 0.297, 0.453
-22.0, -0.059, 0.219, 0.453
-20.0, -0.060, 0.190, 0.489
-18.0, -0.087, 0.185, 0.489
-16.0, -0.110, 0.208, 0.554
-14.0, -0.128, 0.233, 0.554
-12.0, -0.139, 0.253, 0.584
-10.0, -0.142, 0.250, 0.584
-8.0, -0.133, 0.232, 0.580
-6.0, -0.125, 0.213, 0.580
-4.0, -0.105, 0.142, 0.367
-2.0, -0.085, 0.111, 0.367
0.0, -0.026, -0.016, 0.053
0.0, -0.070, -0.116, 0.505
2.0, -0.066, -0.170, 0.534
4.0, -0.062, -0.195, 0.534
6.0, -0.059, -0.161, 0.547
8.0, -0.056, -0.145, 0.547
10.0, -0.054, -0.090, 0.552
12.0, -0.049, -0.039, 0.552
14.0, -0.047, -0.007, 0.570
16.0, -0.044, 0.014, 0.570
18.0, -0.040, -0.016, 0.587
20.0, -0.042, 0.020, 0.587
22.0, -0.067, 0.056, 0.608
24.0, -0.077, 0.058, 0.608
26.0, -0.076, 0.009, 0.614
28.0, -0.086, 0.021, 0.614
30.0, -0.087, 0.007, 0.541
32.0, -0.097, -0.002, 0.541
34.0, -0.099, -0.034, 0.536
36.0, -0.112, -0.001, 0.536
38.0, -0.115, 0.027, 0.504
40.0, -0.127, 0.076, 0.504
42.0, -0.130, 0.085, 0.524
44.0, -0.139, 0.091, 0.539
46.0, -0.149, 0.069, 0.577
48.0, -0.162, 0.018, 0.613
50.0, -0.176, -0.020, 0.568
52.0, -0.189, -0.090, 0.588
54.0, -0.198, -0.170, 0.770
56.0, -0.199, -0.218, 0.570
58.0, -0.226, -0.279, 0.440
60.0, -0.226, -0.279, 0.302