All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.154, 0.372, -0.243
-58.0, -0.159, 0.412, -0.093
-56.0, -0.147, 0.339, 0.025
-54.0, -0.137, 0.262, 0.097
-52.0, -0.129, 0.195, 0.215
-50.0, -0.121, 0.113, 0.315
-48.0, -0.111, 0.034, 0.360
-46.0, -0.102, -0.031, 0.441
-44.0, -0.077, -0.095, 0.600
-42.0, -0.088, -0.149, 0.520
-40.0, -0.087, -0.214, 0.519
-38.0, -0.081, -0.243, 0.536
-36.0, -0.080, -0.282, 0.548
-34.0, -0.075, -0.314, 0.563
-32.0, -0.072, -0.353, 0.435
-30.0, -0.064, -0.388, 0.450
-28.0, -0.057, -0.397, 0.409
-26.0, -0.048, -0.419, 0.413
-24.0, -0.040, -0.434, 0.405
-22.0, -0.033, -0.440, 0.388
-20.0, -0.029, -0.420, 0.372
-18.0, -0.048, -0.391, 0.363
-16.0, -0.064, -0.349, 0.344
-14.0, -0.078, -0.283, 0.310
-12.0, -0.084, -0.229, 0.253
-10.0, -0.088, -0.170, 0.254
-8.0, -0.082, -0.135, 0.221
-6.0, -0.080, -0.078, 0.222
-4.0, -0.070, -0.051, 0.024
-2.0, -0.062, 0.011, 0.165
0.0, -0.021, -0.013, 0.119
0.0, 0.113, -0.458, 0.122
2.0, 0.107, -0.409, 0.092
4.0, 0.113, -0.404, 0.016
6.0, 0.108, -0.346, 0.096
8.0, 0.114, -0.314, 0.065
10.0, 0.110, -0.214, 0.047
12.0, 0.116, -0.192, 0.021
14.0, 0.110, -0.091, 0.001
16.0, 0.117, -0.060, -0.034
18.0, 0.111, 0.019, -0.026
20.0, 0.122, 0.071, -0.044
22.0, 0.095, 0.160, 0.005
24.0, 0.096, 0.190, 0.003
26.0, 0.087, 0.244, 0.058
28.0, 0.087, 0.240, 0.092
30.0, 0.077, 0.301, 0.150
32.0, 0.079, 0.315, 0.182
34.0, 0.071, 0.351, 0.187
36.0, 0.069, 0.371, 0.202
38.0, 0.062, 0.426, 0.256
40.0, 0.058, 0.476, 0.279
42.0, 0.051, 0.538, 0.339
44.0, 0.046, 0.595, 0.372
46.0, 0.039, 0.638, 0.442
48.0, 0.027, 0.650, 0.520
50.0, 0.020, 0.637, 0.620
52.0, 0.008, 0.643, 0.709
54.0, -0.005, 0.619, 0.805
56.0, -0.020, 0.601, 0.915
58.0, -0.036, 0.598, 1.037
60.0, -0.032, 0.607, 1.138

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.227, 0.984, 0.345
-58.0, -0.227, 0.984, 0.446
-56.0, -0.210, 0.858, 0.526
-54.0, -0.197, 0.744, 0.583
-52.0, -0.186, 0.640, 0.666
-50.0, -0.176, 0.523, 0.716
-48.0, -0.164, 0.409, 0.704
-46.0, -0.152, 0.314, 0.745
-44.0, -0.121, 0.226, 0.920
-42.0, -0.125, 0.134, 0.913
-40.0, -0.130, 0.052, 0.862
-38.0, -0.126, 0.008, 0.862
-36.0, -0.123, -0.054, 0.891
-34.0, -0.117, -0.114, 0.891
-32.0, -0.111, -0.176, 0.748
-30.0, -0.098, -0.233, 0.748
-28.0, -0.087, -0.274, 0.723
-26.0, -0.074, -0.325, 0.723
-24.0, -0.063, -0.354, 0.690
-22.0, -0.051, -0.373, 0.690
-20.0, -0.047, -0.360, 0.686
-18.0, -0.072, -0.335, 0.686
-16.0, -0.096, -0.291, 0.707
-14.0, -0.116, -0.218, 0.707
-12.0, -0.126, -0.163, 0.679
-10.0, -0.132, -0.119, 0.679
-8.0, -0.123, -0.087, 0.644
-6.0, -0.116, -0.047, 0.644
-4.0, -0.098, -0.024, 0.413
-2.0, -0.079, 0.025, 0.413
0.0, -0.021, -0.030, 0.119
0.0, -0.062, -0.187, 0.519
2.0, -0.065, -0.140, 0.602
4.0, -0.057, -0.135, 0.602
6.0, -0.060, -0.059, 0.722
8.0, -0.052, -0.012, 0.722
10.0, -0.055, 0.097, 0.733
12.0, -0.047, 0.141, 0.733
14.0, -0.051, 0.263, 0.755
16.0, -0.042, 0.298, 0.755
18.0, -0.045, 0.373, 0.791
20.0, -0.040, 0.445, 0.791
22.0, -0.069, 0.546, 0.850
24.0, -0.070, 0.571, 0.850
26.0, -0.080, 0.639, 0.882
28.0, -0.081, 0.629, 0.882
30.0, -0.093, 0.699, 0.893
32.0, -0.092, 0.706, 0.893
34.0, -0.102, 0.745, 0.876
36.0, -0.105, 0.777, 0.876
38.0, -0.114, 0.848, 0.902
40.0, -0.120, 0.920, 0.902
42.0, -0.128, 0.994, 0.946
44.0, -0.136, 1.047, 0.964
46.0, -0.145, 1.079, 1.018
48.0, -0.160, 1.094, 1.079
50.0, -0.170, 1.079, 1.108
52.0, -0.185, 1.071, 1.131
54.0, -0.201, 1.045, 1.161
56.0, -0.219, 1.035, 1.191
58.0, -0.238, 1.017, 1.212
60.0, -0.238, 1.017, 1.160