All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.189, 0.005, 0.413
-58.0, -0.194, 0.051, 0.522
-56.0, -0.181, -0.001, 0.472
-54.0, -0.170, -0.043, 0.504
-52.0, -0.162, -0.080, 0.592
-50.0, -0.154, -0.137, 0.622
-48.0, -0.144, -0.177, 0.643
-46.0, -0.134, -0.216, 0.662
-44.0, -0.109, -0.278, 0.769
-42.0, -0.121, -0.334, 0.709
-40.0, -0.118, -0.372, 0.648
-38.0, -0.111, -0.393, 0.665
-36.0, -0.110, -0.421, 0.596
-34.0, -0.104, -0.421, 0.611
-32.0, -0.100, -0.415, 0.464
-30.0, -0.091, -0.403, 0.479
-28.0, -0.082, -0.393, 0.442
-26.0, -0.074, -0.390, 0.447
-24.0, -0.066, -0.401, 0.445
-22.0, -0.058, -0.389, 0.428
-20.0, -0.054, -0.401, 0.371
-18.0, -0.073, -0.389, 0.362
-16.0, -0.089, -0.347, 0.372
-14.0, -0.101, -0.312, 0.337
-12.0, -0.108, -0.270, 0.264
-10.0, -0.109, -0.225, 0.265
-8.0, -0.100, -0.197, 0.224
-6.0, -0.097, -0.124, 0.226
-4.0, -0.081, -0.075, 0.016
-2.0, -0.071, -0.019, 0.157
0.0, -0.027, -0.007, 0.105
0.0, 0.088, -0.427, 0.171
2.0, 0.085, -0.373, 0.123
4.0, 0.092, -0.375, 0.046
6.0, 0.086, -0.321, 0.127
8.0, 0.094, -0.315, 0.097
10.0, 0.088, -0.233, 0.094
12.0, 0.097, -0.217, 0.068
14.0, 0.089, -0.119, 0.027
16.0, 0.098, -0.096, -0.008
18.0, 0.090, 0.000, -0.015
20.0, 0.101, 0.065, -0.033
22.0, 0.075, 0.168, -0.030
24.0, 0.077, 0.224, -0.031
26.0, 0.068, 0.278, 0.031
28.0, 0.070, 0.296, 0.066
30.0, 0.059, 0.344, 0.166
32.0, 0.062, 0.353, 0.197
34.0, 0.052, 0.395, 0.233
36.0, 0.052, 0.413, 0.247
38.0, 0.042, 0.464, 0.346
40.0, 0.039, 0.515, 0.369
42.0, 0.031, 0.595, 0.455
44.0, 0.026, 0.682, 0.537
46.0, 0.018, 0.751, 0.616
48.0, 0.010, 0.777, 0.676
50.0, -0.001, 0.795, 0.723
52.0, -0.011, 0.804, 0.840
54.0, -0.024, 0.817, 0.937
56.0, -0.038, 0.796, 1.077
58.0, -0.054, 0.799, 1.197
60.0, -0.050, 0.802, 1.324

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.262, 0.617, 1.001
-58.0, -0.262, 0.617, 1.061
-56.0, -0.245, 0.518, 0.973
-54.0, -0.230, 0.445, 0.990
-52.0, -0.219, 0.371, 1.043
-50.0, -0.208, 0.278, 1.023
-48.0, -0.197, 0.199, 0.987
-46.0, -0.184, 0.129, 0.965
-44.0, -0.154, 0.036, 1.089
-42.0, -0.157, -0.051, 1.102
-40.0, -0.160, -0.107, 0.991
-38.0, -0.156, -0.141, 0.991
-36.0, -0.154, -0.190, 0.939
-34.0, -0.145, -0.221, 0.939
-32.0, -0.139, -0.238, 0.777
-30.0, -0.125, -0.249, 0.777
-28.0, -0.113, -0.270, 0.756
-26.0, -0.100, -0.296, 0.756
-24.0, -0.088, -0.326, 0.730
-22.0, -0.077, -0.321, 0.730
-20.0, -0.073, -0.348, 0.686
-18.0, -0.097, -0.339, 0.686
-16.0, -0.121, -0.289, 0.735
-14.0, -0.139, -0.252, 0.735
-12.0, -0.150, -0.206, 0.690
-10.0, -0.153, -0.177, 0.690
-8.0, -0.141, -0.149, 0.648
-6.0, -0.133, -0.092, 0.648
-4.0, -0.109, -0.056, 0.406
-2.0, -0.087, -0.004, 0.406
0.0, -0.027, -0.026, 0.105
0.0, -0.086, -0.155, 0.569
2.0, -0.087, -0.102, 0.632
4.0, -0.078, -0.111, 0.632
6.0, -0.082, -0.029, 0.754
8.0, -0.072, -0.020, 0.754
10.0, -0.077, 0.087, 0.779
12.0, -0.066, 0.109, 0.779
14.0, -0.073, 0.239, 0.781
16.0, -0.061, 0.257, 0.781
18.0, -0.066, 0.357, 0.802
20.0, -0.060, 0.439, 0.802
22.0, -0.090, 0.559, 0.816
24.0, -0.089, 0.605, 0.816
26.0, -0.099, 0.667, 0.855
28.0, -0.099, 0.684, 0.855
30.0, -0.111, 0.748, 0.909
32.0, -0.109, 0.745, 0.909
34.0, -0.120, 0.788, 0.921
36.0, -0.122, 0.819, 0.921
38.0, -0.134, 0.886, 0.992
40.0, -0.138, 0.951, 0.992
42.0, -0.149, 1.044, 1.062
44.0, -0.156, 1.125, 1.128
46.0, -0.166, 1.193, 1.192
48.0, -0.177, 1.213, 1.235
50.0, -0.191, 1.238, 1.211
52.0, -0.205, 1.243, 1.261
54.0, -0.220, 1.251, 1.293
56.0, -0.237, 1.231, 1.353
58.0, -0.257, 1.218, 1.371
60.0, -0.257, 1.218, 1.346