All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.142, 0.759, -0.208
-58.0, -0.147, 0.799, -0.099
-56.0, -0.135, 0.748, -0.063
-54.0, -0.126, 0.698, 0.090
-52.0, -0.117, 0.610, 0.208
-50.0, -0.111, 0.509, 0.309
-48.0, -0.103, 0.411, 0.370
-46.0, -0.093, 0.316, 0.397
-44.0, -0.070, 0.223, 0.301
-42.0, -0.083, 0.117, 0.462
-40.0, -0.079, 0.044, 0.419
-38.0, -0.072, -0.007, 0.436
-36.0, -0.073, -0.060, 0.417
-34.0, -0.068, -0.073, 0.431
-32.0, -0.064, -0.086, 0.319
-30.0, -0.056, -0.068, 0.334
-28.0, -0.048, -0.061, 0.297
-26.0, -0.041, -0.074, 0.302
-24.0, -0.033, -0.099, 0.300
-22.0, -0.028, -0.128, 0.284
-20.0, -0.027, -0.175, 0.314
-18.0, -0.050, -0.208, 0.305
-16.0, -0.067, -0.215, 0.280
-14.0, -0.080, -0.212, 0.246
-12.0, -0.088, -0.198, 0.176
-10.0, -0.092, -0.182, 0.178
-8.0, -0.090, -0.163, 0.136
-6.0, -0.084, -0.091, 0.137
-4.0, -0.071, -0.058, -0.030
-2.0, -0.062, 0.014, 0.110
0.0, -0.017, -0.000, 0.060
0.0, 0.134, -0.402, 0.124
2.0, 0.131, -0.361, 0.068
4.0, 0.139, -0.378, -0.008
6.0, 0.134, -0.355, 0.081
8.0, 0.143, -0.387, 0.051
10.0, 0.137, -0.366, 0.035
12.0, 0.145, -0.394, 0.009
14.0, 0.140, -0.344, -0.036
16.0, 0.146, -0.337, -0.071
18.0, 0.141, -0.271, -0.084
20.0, 0.150, -0.251, -0.103
22.0, 0.126, -0.131, -0.088
24.0, 0.127, -0.074, -0.090
26.0, 0.125, -0.030, -0.099
28.0, 0.120, -0.011, -0.064
30.0, 0.118, 0.016, 0.026
32.0, 0.114, 0.013, 0.058
34.0, 0.109, 0.004, 0.055
36.0, 0.104, -0.009, 0.069
38.0, 0.096, -0.020, 0.119
40.0, 0.091, -0.019, 0.141
42.0, 0.084, 0.035, 0.185
44.0, 0.077, 0.065, 0.238
46.0, 0.069, 0.098, 0.224
48.0, 0.061, 0.115, 0.308
50.0, 0.050, 0.141, 0.340
52.0, 0.039, 0.136, 0.435
54.0, 0.026, 0.142, 0.469
56.0, 0.012, 0.132, 0.580
58.0, -0.003, 0.110, 0.711
60.0, 0.000, 0.113, 0.825

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.215, 1.371, 0.380
-58.0, -0.215, 1.371, 0.440
-56.0, -0.199, 1.266, 0.437
-54.0, -0.186, 1.179, 0.576
-52.0, -0.174, 1.055, 0.659
-50.0, -0.166, 0.926, 0.711
-48.0, -0.156, 0.786, 0.714
-46.0, -0.142, 0.655, 0.701
-44.0, -0.115, 0.538, 0.622
-42.0, -0.119, 0.400, 0.855
-40.0, -0.122, 0.316, 0.762
-38.0, -0.117, 0.244, 0.762
-36.0, -0.116, 0.168, 0.759
-34.0, -0.110, 0.133, 0.759
-32.0, -0.102, 0.097, 0.632
-30.0, -0.091, 0.092, 0.632
-28.0, -0.078, 0.062, 0.612
-26.0, -0.067, 0.020, 0.612
-24.0, -0.056, -0.030, 0.585
-22.0, -0.046, -0.059, 0.585
-20.0, -0.046, -0.112, 0.629
-18.0, -0.073, -0.148, 0.629
-16.0, -0.098, -0.148, 0.643
-14.0, -0.118, -0.140, 0.643
-12.0, -0.130, -0.127, 0.602
-10.0, -0.135, -0.124, 0.602
-8.0, -0.132, -0.115, 0.559
-6.0, -0.120, -0.068, 0.559
-4.0, -0.099, -0.030, 0.359
-2.0, -0.078, 0.029, 0.359
0.0, -0.017, -0.015, 0.060
0.0, -0.040, -0.130, 0.522
2.0, -0.041, -0.090, 0.578
4.0, -0.031, -0.115, 0.578
6.0, -0.034, -0.069, 0.708
8.0, -0.024, -0.091, 0.708
10.0, -0.028, -0.055, 0.720
12.0, -0.018, -0.068, 0.720
14.0, -0.022, 0.002, 0.718
16.0, -0.013, 0.016, 0.718
18.0, -0.016, 0.076, 0.732
20.0, -0.011, 0.123, 0.732
22.0, -0.038, 0.247, 0.757
24.0, -0.039, 0.316, 0.757
26.0, -0.042, 0.354, 0.726
28.0, -0.048, 0.390, 0.726
30.0, -0.052, 0.413, 0.769
32.0, -0.057, 0.404, 0.769
34.0, -0.064, 0.404, 0.743
36.0, -0.070, 0.397, 0.743
38.0, -0.079, 0.402, 0.764
40.0, -0.087, 0.423, 0.764
42.0, -0.095, 0.483, 0.792
44.0, -0.104, 0.517, 0.829
46.0, -0.115, 0.548, 0.800
48.0, -0.126, 0.559, 0.867
50.0, -0.140, 0.577, 0.828
52.0, -0.155, 0.574, 0.857
54.0, -0.170, 0.576, 0.825
56.0, -0.187, 0.567, 0.856
58.0, -0.206, 0.529, 0.885
60.0, -0.206, 0.529, 0.847