All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.405, 1.105, -0.293
-58.0, -0.409, 1.151, -0.158
-56.0, -0.401, 1.066, -0.028
-54.0, -0.393, 0.975, 0.088
-52.0, -0.388, 0.872, 0.205
-50.0, -0.382, 0.767, 0.312
-48.0, -0.375, 0.665, 0.413
-46.0, -0.366, 0.551, 0.447
-44.0, -0.345, 0.444, 0.323
-42.0, -0.358, 0.371, 0.479
-40.0, -0.355, 0.306, 0.483
-38.0, -0.351, 0.239, 0.500
-36.0, -0.352, 0.163, 0.464
-34.0, -0.349, 0.133, 0.478
-32.0, -0.348, 0.102, 0.354
-30.0, -0.340, 0.102, 0.368
-28.0, -0.333, 0.083, 0.323
-26.0, -0.329, 0.055, 0.328
-24.0, -0.324, 0.043, 0.347
-22.0, -0.320, -0.010, 0.330
-20.0, -0.320, -0.049, 0.342
-18.0, -0.345, -0.064, 0.332
-16.0, -0.363, -0.084, 0.322
-14.0, -0.378, -0.090, 0.288
-12.0, -0.385, -0.092, 0.181
-10.0, -0.384, -0.085, 0.182
-8.0, -0.376, -0.072, 0.373
-6.0, -0.383, -0.024, 0.374
-4.0, -0.379, 0.017, -0.017
-2.0, -0.355, 0.035, 0.123
0.0, -0.167, 0.119, 0.106
0.0, 0.218, -0.284, 0.187
2.0, 0.280, -0.053, 0.119
4.0, 0.288, -0.064, 0.042
6.0, 0.285, -0.039, 0.135
8.0, 0.293, -0.075, 0.105
10.0, 0.290, -0.066, 0.171
12.0, 0.297, -0.100, 0.145
14.0, 0.294, -0.080, 0.123
16.0, 0.300, -0.088, 0.088
18.0, 0.295, -0.044, 0.096
20.0, 0.305, -0.041, 0.077
22.0, 0.285, 0.062, 0.151
24.0, 0.285, 0.097, 0.149
26.0, 0.279, 0.152, 0.169
28.0, 0.280, 0.173, 0.204
30.0, 0.272, 0.188, 0.238
32.0, 0.274, 0.161, 0.270
34.0, 0.267, 0.170, 0.267
36.0, 0.265, 0.137, 0.281
38.0, 0.258, 0.128, 0.365
40.0, 0.253, 0.105, 0.387
42.0, 0.248, 0.099, 0.505
44.0, 0.243, 0.128, 0.593
46.0, 0.236, 0.131, 0.626
48.0, 0.227, 0.112, 0.675
50.0, 0.218, 0.102, 0.681
52.0, 0.207, 0.098, 0.755
54.0, 0.196, 0.089, 0.825
56.0, 0.183, 0.101, 0.864
58.0, 0.167, 0.062, 0.989
60.0, 0.170, 0.066, 1.094

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.477, 1.716, 0.295
-58.0, -0.477, 1.716, 0.380
-56.0, -0.464, 1.585, 0.472
-54.0, -0.453, 1.457, 0.574
-52.0, -0.445, 1.317, 0.656
-50.0, -0.437, 1.177, 0.713
-48.0, -0.427, 1.040, 0.756
-46.0, -0.415, 0.896, 0.751
-44.0, -0.390, 0.763, 0.644
-42.0, -0.394, 0.655, 0.872
-40.0, -0.398, 0.571, 0.826
-38.0, -0.396, 0.490, 0.826
-36.0, -0.396, 0.391, 0.806
-34.0, -0.390, 0.333, 0.806
-32.0, -0.386, 0.279, 0.667
-30.0, -0.374, 0.257, 0.667
-28.0, -0.363, 0.205, 0.637
-26.0, -0.355, 0.157, 0.637
-24.0, -0.347, 0.118, 0.632
-22.0, -0.338, 0.056, 0.632
-20.0, -0.339, 0.015, 0.656
-18.0, -0.368, -0.003, 0.656
-16.0, -0.395, -0.020, 0.685
-14.0, -0.416, -0.017, 0.685
-12.0, -0.427, -0.008, 0.607
-10.0, -0.427, -0.015, 0.607
-8.0, -0.417, -0.015, 0.796
-6.0, -0.419, 0.016, 0.796
-4.0, -0.407, 0.044, 0.372
-2.0, -0.371, 0.049, 0.372
0.0, -0.167, 0.130, 0.106
0.0, 0.043, -0.012, 0.585
2.0, 0.109, 0.208, 0.629
4.0, 0.118, 0.207, 0.629
6.0, 0.117, 0.248, 0.762
8.0, 0.127, 0.227, 0.762
10.0, 0.125, 0.251, 0.856
12.0, 0.134, 0.232, 0.856
14.0, 0.132, 0.272, 0.877
16.0, 0.141, 0.271, 0.877
18.0, 0.139, 0.309, 0.912
20.0, 0.144, 0.333, 0.912
22.0, 0.120, 0.447, 0.996
24.0, 0.119, 0.479, 0.996
26.0, 0.111, 0.535, 0.993
28.0, 0.112, 0.562, 0.993
30.0, 0.101, 0.586, 0.981
32.0, 0.103, 0.552, 0.981
34.0, 0.095, 0.563, 0.955
36.0, 0.091, 0.543, 0.955
38.0, 0.083, 0.544, 1.011
40.0, 0.076, 0.541, 1.011
42.0, 0.069, 0.547, 1.112
44.0, 0.061, 0.573, 1.185
46.0, 0.052, 0.582, 1.202
48.0, 0.040, 0.548, 1.234
50.0, 0.028, 0.545, 1.169
52.0, 0.014, 0.537, 1.177
54.0, -0.000, 0.522, 1.181
56.0, -0.016, 0.528, 1.140
58.0, -0.036, 0.482, 1.164
60.0, -0.036, 0.482, 1.117