All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.125, 2.109, -0.868
-58.0, -0.129, 2.160, -0.695
-56.0, -0.121, 2.080, -0.549
-54.0, -0.113, 1.981, -0.432
-52.0, -0.109, 1.892, -0.266
-50.0, -0.103, 1.782, -0.104
-48.0, -0.098, 1.668, 0.023
-46.0, -0.088, 1.549, 0.116
-44.0, -0.066, 1.423, 0.167
-42.0, -0.077, 1.337, 0.219
-40.0, -0.075, 1.224, 0.339
-38.0, -0.069, 1.131, 0.356
-36.0, -0.069, 1.012, 0.315
-34.0, -0.063, 0.910, 0.329
-32.0, -0.061, 0.855, 0.244
-30.0, -0.053, 0.789, 0.259
-28.0, -0.046, 0.729, 0.305
-26.0, -0.038, 0.676, 0.309
-24.0, -0.030, 0.609, 0.390
-22.0, -0.025, 0.517, 0.374
-20.0, -0.027, 0.437, 0.460
-18.0, -0.049, 0.388, 0.451
-16.0, -0.065, 0.326, 0.470
-14.0, -0.079, 0.277, 0.435
-12.0, -0.085, 0.233, 0.389
-10.0, -0.089, 0.184, 0.391
-8.0, -0.090, 0.149, 0.344
-6.0, -0.086, 0.119, 0.346
-4.0, -0.071, 0.064, 0.160
-2.0, -0.064, 0.061, 0.301
0.0, -0.023, -0.001, 0.242
0.0, 0.124, -0.399, 0.183
2.0, 0.119, -0.405, 0.128
4.0, 0.127, -0.444, 0.051
6.0, 0.122, -0.439, 0.126
8.0, 0.129, -0.508, 0.095
10.0, 0.122, -0.540, 0.105
12.0, 0.129, -0.625, 0.079
14.0, 0.121, -0.629, 0.022
16.0, 0.127, -0.683, -0.013
18.0, 0.119, -0.685, -0.065
20.0, 0.126, -0.718, -0.084
22.0, 0.098, -0.652, -0.082
24.0, 0.102, -0.671, -0.084
26.0, 0.091, -0.650, -0.106
28.0, 0.092, -0.664, -0.071
30.0, 0.080, -0.668, -0.091
32.0, 0.084, -0.690, -0.059
34.0, 0.075, -0.710, -0.083
36.0, 0.075, -0.751, -0.069
38.0, 0.065, -0.777, -0.074
40.0, 0.062, -0.815, -0.052
42.0, 0.054, -0.838, 0.034
44.0, 0.046, -0.839, 0.093
46.0, 0.038, -0.862, 0.140
48.0, 0.029, -0.875, 0.108
50.0, 0.019, -0.904, 0.126
52.0, 0.008, -0.930, 0.151
54.0, -0.005, -0.937, 0.168
56.0, -0.018, -0.946, 0.203
58.0, -0.034, -0.988, 0.279
60.0, -0.030, -0.985, 0.377

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.197, 2.725, -0.279
-58.0, -0.197, 2.725, -0.156
-56.0, -0.185, 2.599, -0.048
-54.0, -0.173, 2.463, 0.055
-52.0, -0.166, 2.338, 0.185
-50.0, -0.158, 2.192, 0.298
-48.0, -0.150, 2.043, 0.367
-46.0, -0.138, 1.894, 0.420
-44.0, -0.111, 1.745, 0.488
-42.0, -0.114, 1.628, 0.612
-40.0, -0.118, 1.502, 0.682
-38.0, -0.114, 1.382, 0.682
-36.0, -0.112, 1.235, 0.657
-34.0, -0.105, 1.115, 0.657
-32.0, -0.100, 1.033, 0.557
-30.0, -0.088, 0.944, 0.557
-28.0, -0.076, 0.852, 0.619
-26.0, -0.064, 0.764, 0.619
-24.0, -0.053, 0.679, 0.675
-22.0, -0.044, 0.589, 0.675
-20.0, -0.046, 0.503, 0.775
-18.0, -0.072, 0.448, 0.775
-16.0, -0.097, 0.393, 0.833
-14.0, -0.117, 0.351, 0.833
-12.0, -0.127, 0.304, 0.815
-10.0, -0.133, 0.243, 0.815
-8.0, -0.131, 0.197, 0.768
-6.0, -0.122, 0.150, 0.768
-4.0, -0.099, 0.092, 0.550
-2.0, -0.081, 0.075, 0.550
0.0, -0.023, -0.024, 0.242
0.0, -0.050, -0.127, 0.581
2.0, -0.052, -0.133, 0.638
4.0, -0.043, -0.180, 0.638
6.0, -0.046, -0.150, 0.753
8.0, -0.037, -0.213, 0.753
10.0, -0.043, -0.220, 0.790
12.0, -0.034, -0.299, 0.790
14.0, -0.041, -0.283, 0.775
16.0, -0.032, -0.330, 0.775
18.0, -0.038, -0.339, 0.751
20.0, -0.035, -0.344, 0.751
22.0, -0.066, -0.256, 0.763
24.0, -0.064, -0.289, 0.763
26.0, -0.076, -0.250, 0.718
28.0, -0.076, -0.281, 0.718
30.0, -0.090, -0.250, 0.652
32.0, -0.087, -0.304, 0.652
34.0, -0.097, -0.316, 0.605
36.0, -0.098, -0.353, 0.605
38.0, -0.111, -0.355, 0.572
40.0, -0.115, -0.378, 0.572
42.0, -0.126, -0.396, 0.641
44.0, -0.135, -0.388, 0.685
46.0, -0.146, -0.411, 0.716
48.0, -0.158, -0.431, 0.667
50.0, -0.171, -0.461, 0.614
52.0, -0.185, -0.492, 0.572
54.0, -0.201, -0.504, 0.524
56.0, -0.217, -0.512, 0.479
58.0, -0.236, -0.569, 0.454
60.0, -0.236, -0.569, 0.399