All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.178, 0.089, 0.099
-58.0, -0.183, 0.135, 0.209
-56.0, -0.172, 0.073, 0.273
-54.0, -0.162, 0.006, 0.280
-52.0, -0.153, -0.039, 0.315
-50.0, -0.145, -0.072, 0.402
-48.0, -0.137, -0.140, 0.428
-46.0, -0.127, -0.191, 0.448
-44.0, -0.101, -0.231, 0.494
-42.0, -0.113, -0.264, 0.593
-40.0, -0.113, -0.294, 0.452
-38.0, -0.106, -0.343, 0.468
-36.0, -0.104, -0.394, 0.427
-34.0, -0.099, -0.441, 0.441
-32.0, -0.094, -0.476, 0.325
-30.0, -0.085, -0.464, 0.340
-28.0, -0.078, -0.449, 0.243
-26.0, -0.069, -0.412, 0.247
-24.0, -0.060, -0.397, 0.220
-22.0, -0.052, -0.375, 0.203
-20.0, -0.051, -0.347, 0.221
-18.0, -0.069, -0.309, 0.212
-16.0, -0.084, -0.272, 0.183
-14.0, -0.096, -0.247, 0.149
-12.0, -0.103, -0.221, 0.102
-10.0, -0.107, -0.186, 0.103
-8.0, -0.103, -0.135, 0.020
-6.0, -0.097, -0.095, 0.021
-4.0, -0.084, -0.087, -0.174
-2.0, -0.073, 0.001, -0.033
0.0, -0.028, -0.011, -0.073
0.0, 0.098, -0.400, -0.040
2.0, 0.099, -0.334, -0.077
4.0, 0.101, -0.264, -0.154
6.0, 0.102, -0.224, -0.058
8.0, 0.103, -0.174, -0.088
10.0, 0.104, -0.147, -0.025
12.0, 0.106, -0.127, -0.051
14.0, 0.106, -0.086, -0.044
16.0, 0.107, -0.059, -0.079
18.0, 0.107, -0.016, -0.083
20.0, 0.109, 0.058, -0.102
22.0, 0.094, 0.165, -0.048
24.0, 0.084, 0.255, -0.050
26.0, 0.087, 0.290, -0.049
28.0, 0.077, 0.380, -0.014
30.0, 0.080, 0.421, -0.006
32.0, 0.074, 0.472, 0.026
34.0, 0.071, 0.475, 0.065
36.0, 0.065, 0.505, 0.079
38.0, 0.059, 0.543, 0.149
40.0, 0.053, 0.560, 0.171
42.0, 0.047, 0.601, 0.380
44.0, 0.040, 0.635, 0.431
46.0, 0.034, 0.670, 0.502
48.0, 0.020, 0.689, 0.587
50.0, 0.014, 0.715, 0.610
52.0, 0.003, 0.743, 0.629
54.0, -0.008, 0.751, 0.654
56.0, 0.005, 0.832, 0.766
58.0, -0.026, 0.911, 1.011
60.0, -0.022, 0.914, 1.376

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.250, 0.700, 0.688
-58.0, -0.250, 0.700, 0.747
-56.0, -0.236, 0.592, 0.773
-54.0, -0.222, 0.488, 0.766
-52.0, -0.210, 0.406, 0.766
-50.0, -0.199, 0.338, 0.803
-48.0, -0.189, 0.235, 0.772
-46.0, -0.177, 0.154, 0.752
-44.0, -0.145, 0.083, 0.814
-42.0, -0.149, 0.029, 0.985
-40.0, -0.155, -0.023, 0.795
-38.0, -0.151, -0.092, 0.795
-36.0, -0.147, -0.160, 0.769
-34.0, -0.140, -0.235, 0.769
-32.0, -0.133, -0.288, 0.639
-30.0, -0.120, -0.300, 0.639
-28.0, -0.108, -0.317, 0.557
-26.0, -0.096, -0.311, 0.557
-24.0, -0.083, -0.322, 0.505
-22.0, -0.071, -0.315, 0.505
-20.0, -0.070, -0.293, 0.535
-18.0, -0.092, -0.259, 0.535
-16.0, -0.115, -0.214, 0.546
-14.0, -0.134, -0.182, 0.546
-12.0, -0.145, -0.150, 0.528
-10.0, -0.151, -0.135, 0.528
-8.0, -0.145, -0.095, 0.443
-6.0, -0.133, -0.068, 0.443
-4.0, -0.112, -0.059, 0.215
-2.0, -0.089, 0.010, 0.215
0.0, -0.028, -0.022, -0.073
0.0, -0.076, -0.128, 0.358
2.0, -0.072, -0.073, 0.433
4.0, -0.069, -0.000, 0.433
6.0, -0.066, 0.063, 0.569
8.0, -0.064, 0.131, 0.569
10.0, -0.061, 0.179, 0.660
12.0, -0.057, 0.213, 0.660
14.0, -0.055, 0.273, 0.710
16.0, -0.052, 0.310, 0.710
18.0, -0.049, 0.349, 0.733
20.0, -0.052, 0.449, 0.733
22.0, -0.070, 0.551, 0.798
24.0, -0.082, 0.643, 0.798
26.0, -0.080, 0.674, 0.776
28.0, -0.091, 0.777, 0.776
30.0, -0.090, 0.819, 0.737
32.0, -0.098, 0.863, 0.737
34.0, -0.101, 0.874, 0.753
36.0, -0.109, 0.911, 0.753
38.0, -0.116, 0.970, 0.795
40.0, -0.124, 1.012, 0.795
42.0, -0.132, 1.042, 0.987
44.0, -0.142, 1.087, 1.022
46.0, -0.150, 1.107, 1.078
48.0, -0.168, 1.133, 1.146
50.0, -0.176, 1.152, 1.098
52.0, -0.190, 1.175, 1.050
54.0, -0.205, 1.184, 1.010
56.0, -0.194, 1.267, 1.042
58.0, -0.229, 1.330, 1.185
60.0, -0.229, 1.330, 1.398