All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.106, 1.396, -0.587
-58.0, -0.111, 1.442, -0.447
-56.0, -0.099, 1.348, -0.314
-54.0, -0.090, 1.266, -0.178
-52.0, -0.082, 1.177, -0.087
-50.0, -0.074, 1.100, 0.037
-48.0, -0.067, 1.011, 0.123
-46.0, -0.057, 0.937, 0.181
-44.0, -0.034, 0.873, 0.227
-42.0, -0.046, 0.791, 0.277
-40.0, -0.045, 0.711, 0.325
-38.0, -0.039, 0.617, 0.342
-36.0, -0.039, 0.513, 0.343
-34.0, -0.034, 0.429, 0.358
-32.0, -0.032, 0.348, 0.268
-30.0, -0.022, 0.278, 0.282
-28.0, -0.015, 0.254, 0.266
-26.0, -0.009, 0.230, 0.270
-24.0, -0.002, 0.214, 0.323
-22.0, 0.005, 0.208, 0.307
-20.0, 0.007, 0.193, 0.347
-18.0, -0.014, 0.181, 0.337
-16.0, -0.033, 0.183, 0.348
-14.0, -0.051, 0.147, 0.314
-12.0, -0.062, 0.109, 0.257
-10.0, -0.069, 0.093, 0.258
-8.0, -0.070, 0.058, 0.193
-6.0, -0.069, 0.069, 0.194
-4.0, -0.062, 0.033, -0.033
-2.0, -0.059, 0.036, 0.107
0.0, -0.020, -0.008, 0.057
0.0, 0.160, -0.421, 0.031
2.0, 0.158, -0.372, -0.023
4.0, 0.164, -0.379, -0.100
6.0, 0.163, -0.321, 0.012
8.0, 0.167, -0.351, -0.019
10.0, 0.168, -0.338, 0.053
12.0, 0.169, -0.359, 0.027
14.0, 0.169, -0.379, 0.014
16.0, 0.170, -0.396, -0.021
18.0, 0.170, -0.404, -0.079
20.0, 0.172, -0.397, -0.098
22.0, 0.157, -0.335, -0.126
24.0, 0.149, -0.281, -0.128
26.0, 0.149, -0.306, -0.164
28.0, 0.141, -0.258, -0.130
30.0, 0.142, -0.240, -0.140
32.0, 0.133, -0.227, -0.108
34.0, 0.133, -0.269, -0.065
36.0, 0.126, -0.265, -0.051
38.0, 0.120, -0.276, -0.135
40.0, 0.114, -0.292, -0.113
42.0, 0.107, -0.301, 0.004
44.0, 0.100, -0.313, 0.048
46.0, 0.092, -0.336, 0.038
48.0, 0.084, -0.336, 0.099
50.0, 0.073, -0.344, 0.129
52.0, 0.062, -0.351, 0.150
54.0, 0.050, -0.371, 0.246
56.0, 0.037, -0.399, 0.280
58.0, 0.023, -0.421, 0.424
60.0, 0.026, -0.423, 0.437

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.179, 2.007, 0.002
-58.0, -0.179, 2.007, 0.092
-56.0, -0.163, 1.867, 0.186
-54.0, -0.150, 1.748, 0.309
-52.0, -0.139, 1.622, 0.364
-50.0, -0.129, 1.510, 0.438
-48.0, -0.119, 1.393, 0.467
-46.0, -0.107, 1.282, 0.485
-44.0, -0.078, 1.187, 0.548
-42.0, -0.083, 1.082, 0.670
-40.0, -0.088, 0.982, 0.668
-38.0, -0.084, 0.868, 0.668
-36.0, -0.082, 0.744, 0.686
-34.0, -0.075, 0.634, 0.686
-32.0, -0.071, 0.531, 0.581
-30.0, -0.057, 0.441, 0.581
-28.0, -0.045, 0.385, 0.580
-26.0, -0.035, 0.333, 0.580
-24.0, -0.025, 0.292, 0.608
-22.0, -0.014, 0.277, 0.608
-20.0, -0.012, 0.258, 0.661
-18.0, -0.038, 0.241, 0.661
-16.0, -0.065, 0.251, 0.711
-14.0, -0.089, 0.221, 0.711
-12.0, -0.105, 0.190, 0.683
-10.0, -0.113, 0.159, 0.683
-8.0, -0.111, 0.112, 0.616
-6.0, -0.105, 0.094, 0.616
-4.0, -0.090, 0.056, 0.356
-2.0, -0.075, 0.051, 0.356
0.0, -0.020, -0.024, 0.057
0.0, -0.014, -0.149, 0.429
2.0, -0.014, -0.111, 0.486
4.0, -0.006, -0.105, 0.486
6.0, -0.005, -0.041, 0.638
8.0, 0.001, -0.044, 0.638
10.0, 0.003, -0.035, 0.738
12.0, 0.006, -0.033, 0.738
14.0, 0.007, -0.033, 0.768
16.0, 0.011, -0.036, 0.768
18.0, 0.014, -0.046, 0.737
20.0, 0.010, -0.009, 0.737
22.0, -0.007, 0.050, 0.719
24.0, -0.017, 0.100, 0.719
26.0, -0.018, 0.077, 0.660
28.0, -0.028, 0.130, 0.660
30.0, -0.028, 0.152, 0.603
32.0, -0.038, 0.164, 0.603
34.0, -0.040, 0.125, 0.623
36.0, -0.048, 0.135, 0.623
38.0, -0.055, 0.146, 0.511
40.0, -0.063, 0.158, 0.511
42.0, -0.072, 0.147, 0.611
44.0, -0.081, 0.138, 0.640
46.0, -0.092, 0.115, 0.614
48.0, -0.103, 0.108, 0.658
50.0, -0.117, 0.098, 0.617
52.0, -0.131, 0.088, 0.572
54.0, -0.146, 0.063, 0.602
56.0, -0.162, 0.035, 0.557
58.0, -0.180, -0.007, 0.598
60.0, -0.180, -0.007, 0.459