All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.120, 1.313, -0.903
-58.0, -0.125, 1.365, -0.705
-56.0, -0.115, 1.264, -0.593
-54.0, -0.105, 1.179, -0.449
-52.0, -0.096, 1.106, -0.265
-50.0, -0.086, 1.006, -0.099
-48.0, -0.079, 0.919, 0.008
-46.0, -0.068, 0.863, 0.109
-44.0, -0.045, 0.795, 0.314
-42.0, -0.054, 0.738, 0.276
-40.0, -0.058, 0.634, 0.358
-38.0, -0.054, 0.523, 0.375
-36.0, -0.054, 0.424, 0.410
-34.0, -0.046, 0.323, 0.424
-32.0, -0.042, 0.226, 0.284
-30.0, -0.031, 0.140, 0.299
-28.0, -0.022, 0.143, 0.298
-26.0, -0.015, 0.125, 0.303
-24.0, -0.007, 0.126, 0.346
-22.0, -0.001, 0.143, 0.330
-20.0, 0.002, 0.149, 0.365
-18.0, -0.013, 0.167, 0.356
-16.0, -0.035, 0.170, 0.394
-14.0, -0.051, 0.155, 0.360
-12.0, -0.062, 0.134, 0.293
-10.0, -0.067, 0.124, 0.295
-8.0, -0.068, 0.112, 0.272
-6.0, -0.065, 0.076, 0.273
-4.0, -0.063, 0.081, 0.084
-2.0, -0.056, 0.086, 0.225
0.0, -0.016, -0.002, 0.176
0.0, 0.124, -0.468, 0.153
2.0, 0.126, -0.428, 0.104
4.0, 0.129, -0.417, 0.027
6.0, 0.131, -0.391, 0.137
8.0, 0.132, -0.372, 0.106
10.0, 0.133, -0.369, 0.174
12.0, 0.132, -0.371, 0.148
14.0, 0.131, -0.393, 0.215
16.0, 0.132, -0.403, 0.180
18.0, 0.139, -0.378, -0.043
20.0, 0.120, -0.350, -0.062
22.0, 0.114, -0.326, 0.078
24.0, 0.116, -0.325, 0.076
26.0, 0.111, -0.297, 0.063
28.0, 0.113, -0.295, 0.097
30.0, 0.106, -0.254, 0.089
32.0, 0.104, -0.267, 0.121
34.0, 0.097, -0.278, 0.116
36.0, 0.093, -0.283, 0.130
38.0, 0.087, -0.313, 0.174
40.0, 0.083, -0.308, 0.197
42.0, 0.076, -0.331, 0.270
44.0, 0.070, -0.343, 0.316
46.0, 0.063, -0.359, 0.377
48.0, 0.056, -0.358, 0.401
50.0, 0.048, -0.365, 0.432
52.0, 0.043, -0.358, 0.467
54.0, 0.035, -0.392, 0.530
56.0, 0.024, -0.424, 0.557
58.0, 0.012, -0.452, 0.622
60.0, 0.015, -0.451, 0.650

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.193, 1.930, -0.315
-58.0, -0.193, 1.930, -0.166
-56.0, -0.178, 1.783, -0.092
-54.0, -0.165, 1.660, 0.037
-52.0, -0.153, 1.552, 0.186
-50.0, -0.141, 1.416, 0.302
-48.0, -0.131, 1.294, 0.352
-46.0, -0.117, 1.208, 0.412
-44.0, -0.090, 1.109, 0.634
-42.0, -0.091, 1.021, 0.669
-40.0, -0.101, 0.905, 0.701
-38.0, -0.099, 0.783, 0.701
-36.0, -0.097, 0.647, 0.752
-34.0, -0.087, 0.523, 0.752
-32.0, -0.081, 0.403, 0.597
-30.0, -0.065, 0.305, 0.597
-28.0, -0.053, 0.274, 0.613
-26.0, -0.041, 0.219, 0.613
-24.0, -0.030, 0.202, 0.631
-22.0, -0.020, 0.211, 0.631
-20.0, -0.017, 0.208, 0.680
-18.0, -0.036, 0.217, 0.680
-16.0, -0.066, 0.228, 0.757
-14.0, -0.090, 0.220, 0.757
-12.0, -0.105, 0.205, 0.719
-10.0, -0.111, 0.183, 0.719
-8.0, -0.110, 0.150, 0.695
-6.0, -0.100, 0.115, 0.695
-4.0, -0.092, 0.102, 0.474
-2.0, -0.073, 0.087, 0.474
0.0, -0.016, -0.016, 0.176
0.0, -0.050, -0.196, 0.551
2.0, -0.046, -0.172, 0.613
4.0, -0.040, -0.154, 0.613
6.0, -0.037, -0.098, 0.764
8.0, -0.034, -0.065, 0.764
10.0, -0.032, -0.042, 0.859
12.0, -0.031, -0.030, 0.859
14.0, -0.030, -0.034, 0.969
16.0, -0.027, -0.042, 0.969
18.0, -0.017, -0.018, 0.773
20.0, -0.041, 0.024, 0.773
22.0, -0.051, 0.060, 0.923
24.0, -0.050, 0.065, 0.923
26.0, -0.057, 0.087, 0.887
28.0, -0.056, 0.094, 0.887
30.0, -0.064, 0.144, 0.832
32.0, -0.067, 0.124, 0.832
34.0, -0.075, 0.116, 0.804
36.0, -0.081, 0.123, 0.804
38.0, -0.089, 0.118, 0.820
40.0, -0.094, 0.129, 0.820
42.0, -0.104, 0.117, 0.877
44.0, -0.112, 0.108, 0.908
46.0, -0.121, 0.091, 0.952
48.0, -0.131, 0.086, 0.960
50.0, -0.142, 0.078, 0.920
52.0, -0.151, 0.081, 0.889
54.0, -0.161, 0.042, 0.886
56.0, -0.175, 0.011, 0.833
58.0, -0.191, -0.040, 0.796
60.0, -0.191, -0.040, 0.672