All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.154, 0.591, -0.655
-58.0, -0.159, 0.637, -0.498
-56.0, -0.149, 0.567, -0.262
-54.0, -0.140, 0.479, -0.238
-52.0, -0.133, 0.392, 0.015
-50.0, -0.125, 0.301, 0.209
-48.0, -0.117, 0.220, 0.250
-46.0, -0.107, 0.169, 0.373
-44.0, -0.081, 0.103, 0.486
-42.0, -0.084, 0.056, 0.528
-40.0, -0.081, -0.017, 0.714
-38.0, -0.074, -0.091, 0.730
-36.0, -0.091, -0.151, 0.618
-34.0, -0.085, -0.232, 0.632
-32.0, -0.079, -0.289, 0.422
-30.0, -0.068, -0.317, 0.437
-28.0, -0.058, -0.325, 0.357
-26.0, -0.048, -0.299, 0.361
-24.0, -0.039, -0.273, 0.406
-22.0, -0.032, -0.258, 0.390
-20.0, -0.025, -0.238, 0.429
-18.0, -0.039, -0.212, 0.419
-16.0, -0.059, -0.197, 0.430
-14.0, -0.075, -0.182, 0.396
-12.0, -0.081, -0.150, 0.327
-10.0, -0.087, -0.144, 0.329
-8.0, -0.085, -0.111, 0.264
-6.0, -0.082, -0.066, 0.265
-4.0, -0.076, -0.012, 0.012
-2.0, -0.065, 0.034, 0.153
0.0, -0.019, -0.013, 0.116
0.0, 0.096, -0.546, 0.281
2.0, 0.101, -0.480, 0.205
4.0, 0.105, -0.427, 0.128
6.0, 0.109, -0.369, 0.191
8.0, 0.112, -0.316, 0.160
10.0, 0.114, -0.269, 0.211
12.0, 0.116, -0.225, 0.185
14.0, 0.119, -0.205, 0.244
16.0, 0.121, -0.192, 0.209
18.0, 0.130, -0.151, 0.214
20.0, 0.110, -0.098, 0.195
22.0, 0.104, -0.061, 0.204
24.0, 0.110, -0.050, 0.203
26.0, 0.102, -0.006, 0.219
28.0, 0.107, 0.013, 0.254
30.0, 0.097, 0.060, 0.249
32.0, 0.102, 0.073, 0.281
34.0, 0.094, 0.134, 0.280
36.0, 0.093, 0.144, 0.294
38.0, 0.085, 0.186, 0.375
40.0, 0.082, 0.198, 0.398
42.0, 0.077, 0.243, 0.451
44.0, 0.071, 0.247, 0.529
46.0, 0.066, 0.242, 0.586
48.0, 0.060, 0.232, 0.657
50.0, 0.056, 0.240, 0.693
52.0, 0.050, 0.228, 0.811
54.0, 0.044, 0.193, 0.953
56.0, 0.034, 0.158, 1.011
58.0, 0.023, 0.125, 1.083
60.0, 0.026, 0.122, 1.169

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.227, 1.202, -0.067
-58.0, -0.227, 1.202, 0.040
-56.0, -0.213, 1.086, 0.239
-54.0, -0.200, 0.961, 0.248
-52.0, -0.190, 0.837, 0.466
-50.0, -0.180, 0.711, 0.610
-48.0, -0.169, 0.595, 0.594
-46.0, -0.156, 0.520, 0.676
-44.0, -0.125, 0.417, 0.806
-42.0, -0.120, 0.339, 0.920
-40.0, -0.124, 0.255, 1.056
-38.0, -0.119, 0.160, 1.056
-36.0, -0.134, 0.071, 0.960
-34.0, -0.126, -0.025, 0.960
-32.0, -0.118, -0.105, 0.736
-30.0, -0.102, -0.155, 0.736
-28.0, -0.088, -0.203, 0.671
-26.0, -0.074, -0.205, 0.671
-24.0, -0.062, -0.204, 0.691
-22.0, -0.050, -0.189, 0.691
-20.0, -0.044, -0.178, 0.743
-18.0, -0.062, -0.154, 0.743
-16.0, -0.091, -0.133, 0.793
-14.0, -0.113, -0.117, 0.793
-12.0, -0.124, -0.079, 0.753
-10.0, -0.130, -0.086, 0.753
-8.0, -0.126, -0.063, 0.687
-6.0, -0.117, -0.031, 0.687
-4.0, -0.104, 0.003, 0.402
-2.0, -0.081, 0.039, 0.402
0.0, -0.019, -0.023, 0.116
0.0, -0.079, -0.274, 0.679
2.0, -0.071, -0.219, 0.714
4.0, -0.064, -0.163, 0.714
6.0, -0.059, -0.079, 0.817
8.0, -0.055, -0.007, 0.817
10.0, -0.051, 0.055, 0.896
12.0, -0.047, 0.118, 0.896
14.0, -0.043, 0.157, 0.998
16.0, -0.039, 0.173, 0.998
18.0, -0.026, 0.212, 1.030
20.0, -0.051, 0.275, 1.030
22.0, -0.061, 0.336, 1.050
24.0, -0.056, 0.331, 1.050
26.0, -0.065, 0.389, 1.043
28.0, -0.062, 0.396, 1.043
30.0, -0.073, 0.469, 0.992
32.0, -0.069, 0.464, 0.992
34.0, -0.078, 0.528, 0.969
36.0, -0.081, 0.550, 0.969
38.0, -0.090, 0.608, 1.021
40.0, -0.096, 0.642, 1.021
42.0, -0.103, 0.691, 1.058
44.0, -0.110, 0.692, 1.121
46.0, -0.118, 0.692, 1.162
48.0, -0.127, 0.676, 1.216
50.0, -0.135, 0.683, 1.181
52.0, -0.143, 0.667, 1.233
54.0, -0.153, 0.617, 1.310
56.0, -0.165, 0.582, 1.287
58.0, -0.180, 0.538, 1.257
60.0, -0.180, 0.538, 1.191