All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.121, 1.869, -0.659
-58.0, -0.125, 1.915, -0.382
-56.0, -0.115, 1.799, -0.265
-54.0, -0.104, 1.693, -0.387
-52.0, -0.097, 1.585, -0.023
-50.0, -0.088, 1.504, 0.057
-48.0, -0.081, 1.413, 0.175
-46.0, -0.073, 1.338, 0.254
-44.0, -0.065, 1.248, 0.290
-42.0, -0.046, 1.161, 0.369
-40.0, -0.069, 1.094, 0.478
-38.0, -0.065, 1.009, 0.495
-36.0, -0.069, 0.892, 0.520
-34.0, -0.064, 0.784, 0.535
-32.0, -0.063, 0.722, 0.465
-30.0, -0.056, 0.651, 0.480
-28.0, -0.048, 0.578, 0.437
-26.0, -0.041, 0.505, 0.441
-24.0, -0.035, 0.457, 0.474
-22.0, -0.028, 0.397, 0.458
-20.0, -0.029, 0.346, 0.455
-18.0, -0.050, 0.301, 0.446
-16.0, -0.070, 0.243, 0.531
-14.0, -0.084, 0.193, 0.496
-12.0, -0.095, 0.146, 0.532
-10.0, -0.102, 0.088, 0.533
-8.0, -0.106, 0.034, 0.501
-6.0, -0.107, 0.023, 0.502
-4.0, -0.099, -0.016, 0.228
-2.0, -0.101, -0.004, 0.369
0.0, -0.067, -0.050, 0.280
0.0, 0.166, -0.453, 0.204
2.0, 0.162, -0.445, 0.122
4.0, 0.169, -0.501, 0.045
6.0, 0.166, -0.492, 0.063
8.0, 0.174, -0.545, 0.033
10.0, 0.171, -0.555, 0.037
12.0, 0.178, -0.619, 0.011
14.0, 0.174, -0.620, 0.028
16.0, 0.180, -0.676, -0.007
18.0, 0.174, -0.679, -0.001
20.0, 0.178, -0.724, -0.019
22.0, 0.174, -0.666, -0.027
24.0, 0.157, -0.629, -0.029
26.0, 0.149, -0.592, -0.069
28.0, 0.150, -0.591, -0.034
30.0, 0.142, -0.566, -0.052
32.0, 0.141, -0.603, -0.020
34.0, 0.133, -0.622, -0.068
36.0, 0.127, -0.659, -0.054
38.0, 0.120, -0.703, 0.013
40.0, 0.112, -0.751, 0.035
42.0, 0.103, -0.775, 0.082
44.0, 0.095, -0.810, 0.113
46.0, 0.087, -0.809, 0.080
48.0, 0.074, -0.809, 0.160
50.0, 0.062, -0.796, 0.165
52.0, 0.051, -0.786, 0.156
54.0, 0.037, -0.754, 0.150
56.0, 0.025, -0.742, 0.248
58.0, 0.008, -0.736, 0.383
60.0, 0.012, -0.732, 0.485

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.193, 2.480, -0.071
-58.0, -0.193, 2.480, 0.156
-56.0, -0.178, 2.318, 0.235
-54.0, -0.164, 2.174, 0.099
-52.0, -0.154, 2.035, 0.428
-50.0, -0.143, 1.914, 0.458
-48.0, -0.133, 1.794, 0.519
-46.0, -0.123, 1.683, 0.557
-44.0, -0.109, 1.563, 0.610
-42.0, -0.083, 1.444, 0.762
-40.0, -0.111, 1.366, 0.821
-38.0, -0.110, 1.261, 0.821
-36.0, -0.112, 1.114, 0.862
-34.0, -0.106, 0.992, 0.862
-32.0, -0.102, 0.907, 0.778
-30.0, -0.090, 0.814, 0.778
-28.0, -0.078, 0.709, 0.751
-26.0, -0.067, 0.605, 0.751
-24.0, -0.058, 0.532, 0.759
-22.0, -0.047, 0.457, 0.759
-20.0, -0.048, 0.407, 0.769
-18.0, -0.073, 0.360, 0.769
-16.0, -0.102, 0.313, 0.894
-14.0, -0.122, 0.267, 0.894
-12.0, -0.137, 0.225, 0.958
-10.0, -0.146, 0.151, 0.958
-8.0, -0.147, 0.081, 0.924
-6.0, -0.143, 0.048, 0.924
-4.0, -0.127, 0.012, 0.618
-2.0, -0.117, 0.011, 0.618
0.0, -0.067, -0.063, 0.280
0.0, -0.008, -0.181, 0.602
2.0, -0.010, -0.175, 0.631
4.0, -0.001, -0.237, 0.631
6.0, -0.002, -0.206, 0.690
8.0, 0.007, -0.242, 0.690
10.0, 0.006, -0.237, 0.722
12.0, 0.015, -0.288, 0.722
14.0, 0.013, -0.268, 0.782
16.0, 0.020, -0.324, 0.782
18.0, 0.018, -0.333, 0.815
20.0, 0.017, -0.350, 0.815
22.0, 0.010, -0.281, 0.818
24.0, -0.009, -0.248, 0.818
26.0, -0.018, -0.208, 0.755
28.0, -0.019, -0.202, 0.755
30.0, -0.028, -0.168, 0.691
32.0, -0.030, -0.212, 0.691
34.0, -0.040, -0.228, 0.620
36.0, -0.047, -0.242, 0.620
38.0, -0.055, -0.281, 0.659
40.0, -0.066, -0.315, 0.659
42.0, -0.076, -0.327, 0.689
44.0, -0.086, -0.358, 0.705
46.0, -0.097, -0.367, 0.655
48.0, -0.113, -0.374, 0.719
50.0, -0.128, -0.360, 0.653
52.0, -0.142, -0.347, 0.578
54.0, -0.159, -0.321, 0.506
56.0, -0.174, -0.308, 0.524
58.0, -0.195, -0.316, 0.557
60.0, -0.195, -0.316, 0.507