All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.160, 1.725, -1.030
-58.0, -0.165, 1.765, -0.819
-56.0, -0.155, 1.655, -0.643
-54.0, -0.144, 1.559, -0.461
-52.0, -0.136, 1.441, -0.291
-50.0, -0.129, 1.310, -0.170
-48.0, -0.120, 1.196, -0.039
-46.0, -0.110, 1.072, 0.040
-44.0, -0.085, 0.984, 0.176
-42.0, -0.093, 0.884, 0.229
-40.0, -0.096, 0.776, 0.266
-38.0, -0.090, 0.692, 0.283
-36.0, -0.089, 0.608, 0.376
-34.0, -0.080, 0.516, 0.390
-32.0, -0.074, 0.444, 0.267
-30.0, -0.062, 0.390, 0.282
-28.0, -0.054, 0.341, 0.288
-26.0, -0.045, 0.307, 0.293
-24.0, -0.037, 0.284, 0.295
-22.0, -0.029, 0.253, 0.278
-20.0, -0.023, 0.201, 0.321
-18.0, -0.040, 0.145, 0.311
-16.0, -0.063, 0.100, 0.323
-14.0, -0.080, 0.057, 0.289
-12.0, -0.086, 0.034, 0.242
-10.0, -0.091, 0.014, 0.243
-8.0, -0.090, -0.004, 0.207
-6.0, -0.085, 0.031, 0.208
-4.0, -0.077, 0.033, 0.012
-2.0, -0.067, 0.076, 0.152
0.0, -0.020, -0.004, 0.102
0.0, 0.102, -0.499, 0.144
2.0, 0.106, -0.490, 0.048
4.0, 0.108, -0.486, -0.029
6.0, 0.109, -0.485, 0.036
8.0, 0.108, -0.509, 0.005
10.0, 0.108, -0.520, 0.053
12.0, 0.107, -0.555, 0.027
14.0, 0.107, -0.579, 0.042
16.0, 0.108, -0.593, 0.007
18.0, 0.113, -0.613, 0.118
20.0, 0.094, -0.538, 0.099
22.0, 0.084, -0.517, -0.086
24.0, 0.087, -0.524, -0.087
26.0, 0.077, -0.475, -0.089
28.0, 0.081, -0.481, -0.054
30.0, 0.070, -0.474, -0.079
32.0, 0.074, -0.515, -0.047
34.0, 0.063, -0.523, -0.080
36.0, 0.062, -0.599, -0.066
38.0, 0.051, -0.631, -0.072
40.0, 0.047, -0.683, -0.050
42.0, 0.037, -0.701, -0.022
44.0, 0.032, -0.722, -0.046
46.0, 0.023, -0.743, -0.014
48.0, 0.017, -0.747, 0.015
50.0, 0.008, -0.750, 0.032
52.0, 0.003, -0.763, 0.132
54.0, -0.007, -0.785, 0.152
56.0, -0.018, -0.829, 0.191
58.0, -0.031, -0.901, 0.334
60.0, -0.027, -0.898, 0.427

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.233, 2.330, -0.441
-58.0, -0.233, 2.330, -0.280
-56.0, -0.218, 2.174, -0.143
-54.0, -0.204, 2.041, 0.025
-52.0, -0.193, 1.886, 0.159
-50.0, -0.183, 1.714, 0.231
-48.0, -0.172, 1.571, 0.305
-46.0, -0.160, 1.423, 0.343
-44.0, -0.130, 1.298, 0.497
-42.0, -0.130, 1.167, 0.622
-40.0, -0.139, 1.047, 0.609
-38.0, -0.135, 0.949, 0.609
-36.0, -0.132, 0.830, 0.718
-34.0, -0.122, 0.721, 0.718
-32.0, -0.113, 0.621, 0.580
-30.0, -0.097, 0.545, 0.580
-28.0, -0.084, 0.463, 0.603
-26.0, -0.072, 0.401, 0.603
-24.0, -0.060, 0.353, 0.580
-22.0, -0.048, 0.306, 0.580
-20.0, -0.042, 0.254, 0.635
-18.0, -0.063, 0.206, 0.635
-16.0, -0.095, 0.166, 0.686
-14.0, -0.118, 0.131, 0.686
-12.0, -0.129, 0.115, 0.668
-10.0, -0.134, 0.079, 0.668
-8.0, -0.131, 0.044, 0.630
-6.0, -0.121, 0.059, 0.630
-4.0, -0.105, 0.061, 0.401
-2.0, -0.083, 0.085, 0.401
0.0, -0.020, -0.016, 0.102
0.0, -0.072, -0.228, 0.542
2.0, -0.066, -0.222, 0.557
4.0, -0.061, -0.216, 0.557
6.0, -0.059, -0.193, 0.663
8.0, -0.058, -0.201, 0.663
10.0, -0.057, -0.195, 0.739
12.0, -0.056, -0.213, 0.739
14.0, -0.055, -0.217, 0.796
16.0, -0.051, -0.223, 0.796
18.0, -0.044, -0.250, 0.934
20.0, -0.067, -0.174, 0.934
22.0, -0.080, -0.124, 0.760
24.0, -0.079, -0.143, 0.760
26.0, -0.090, -0.079, 0.735
28.0, -0.087, -0.092, 0.735
30.0, -0.100, -0.061, 0.664
32.0, -0.098, -0.123, 0.664
34.0, -0.109, -0.129, 0.608
36.0, -0.112, -0.199, 0.608
38.0, -0.125, -0.209, 0.574
40.0, -0.130, -0.247, 0.574
42.0, -0.142, -0.259, 0.585
44.0, -0.150, -0.271, 0.545
46.0, -0.161, -0.287, 0.562
48.0, -0.170, -0.303, 0.574
50.0, -0.182, -0.307, 0.520
52.0, -0.191, -0.336, 0.553
54.0, -0.204, -0.361, 0.508
56.0, -0.217, -0.395, 0.467
58.0, -0.234, -0.482, 0.509
60.0, -0.234, -0.482, 0.449