All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.479, 1.272, -0.727
-58.0, -0.484, 1.324, -0.603
-56.0, -0.472, 1.211, -0.492
-54.0, -0.460, 1.093, -0.402
-52.0, -0.451, 0.962, -0.318
-50.0, -0.441, 0.848, -0.259
-48.0, -0.431, 0.734, -0.235
-46.0, -0.419, 0.632, -0.229
-44.0, -0.399, 0.560, -0.109
-42.0, -0.404, 0.515, -0.166
-40.0, -0.406, 0.465, -0.143
-38.0, -0.397, 0.420, -0.127
-36.0, -0.397, 0.351, -0.029
-34.0, -0.389, 0.287, -0.014
-32.0, -0.383, 0.241, -0.061
-30.0, -0.372, 0.145, -0.046
-28.0, -0.364, 0.084, -0.085
-26.0, -0.356, 0.052, -0.081
-24.0, -0.348, 0.011, -0.129
-22.0, -0.341, -0.040, -0.146
-20.0, -0.339, -0.080, -0.188
-18.0, -0.360, -0.102, -0.197
-16.0, -0.383, -0.123, -0.218
-14.0, -0.394, -0.099, -0.252
-12.0, -0.398, -0.101, -0.255
-10.0, -0.400, -0.101, -0.253
-8.0, -0.399, -0.089, -0.229
-6.0, -0.394, -0.064, -0.227
-4.0, -0.383, -0.037, -0.433
-2.0, -0.358, -0.006, -0.292
0.0, -0.121, -0.044, -0.393
0.0, 0.231, -0.470, -0.237
2.0, 0.234, -0.466, -0.304
4.0, 0.235, -0.461, -0.381
6.0, 0.236, -0.466, -0.349
8.0, 0.235, -0.473, -0.380
10.0, 0.234, -0.498, -0.363
12.0, 0.234, -0.518, -0.389
14.0, 0.232, -0.519, -0.340
16.0, 0.232, -0.543, -0.375
18.0, 0.236, -0.540, -0.336
20.0, 0.217, -0.450, -0.354
22.0, 0.209, -0.410, -0.292
24.0, 0.211, -0.398, -0.294
26.0, 0.203, -0.334, -0.358
28.0, 0.206, -0.343, -0.324
30.0, 0.198, -0.316, -0.359
32.0, 0.197, -0.350, -0.327
34.0, 0.189, -0.368, -0.386
36.0, 0.182, -0.404, -0.372
38.0, 0.176, -0.455, -0.330
40.0, 0.169, -0.494, -0.308
42.0, 0.163, -0.504, -0.252
44.0, 0.155, -0.502, -0.257
46.0, 0.149, -0.495, -0.137
48.0, 0.140, -0.485, -0.078
50.0, 0.133, -0.482, 0.003
52.0, 0.124, -0.476, 0.082
54.0, 0.115, -0.484, 0.145
56.0, 0.102, -0.499, 0.149
58.0, 0.090, -0.563, 0.217
60.0, 0.093, -0.560, 0.295

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.552, 1.889, -0.138
-58.0, -0.552, 1.889, -0.064
-56.0, -0.535, 1.730, 0.008
-54.0, -0.520, 1.575, 0.084
-52.0, -0.508, 1.408, 0.133
-50.0, -0.495, 1.258, 0.142
-48.0, -0.484, 1.109, 0.108
-46.0, -0.469, 0.977, 0.075
-44.0, -0.443, 0.875, 0.211
-42.0, -0.441, 0.798, 0.227
-40.0, -0.449, 0.726, 0.200
-38.0, -0.442, 0.664, 0.200
-36.0, -0.440, 0.582, 0.314
-34.0, -0.430, 0.494, 0.314
-32.0, -0.422, 0.424, 0.252
-30.0, -0.407, 0.309, 0.252
-28.0, -0.394, 0.212, 0.229
-26.0, -0.382, 0.146, 0.229
-24.0, -0.371, 0.080, 0.156
-22.0, -0.360, 0.026, 0.156
-20.0, -0.358, -0.026, 0.127
-18.0, -0.383, -0.052, 0.127
-16.0, -0.415, -0.065, 0.145
-14.0, -0.432, -0.034, 0.145
-12.0, -0.440, -0.029, 0.171
-10.0, -0.443, -0.033, 0.171
-8.0, -0.441, -0.033, 0.194
-6.0, -0.430, -0.025, 0.194
-4.0, -0.411, -0.009, -0.043
-2.0, -0.374, 0.003, -0.043
0.0, -0.121, -0.044, -0.393
0.0, 0.057, -0.199, 0.161
2.0, 0.062, -0.196, 0.205
4.0, 0.066, -0.189, 0.205
6.0, 0.068, -0.171, 0.277
8.0, 0.069, -0.166, 0.277
10.0, 0.069, -0.174, 0.323
12.0, 0.071, -0.177, 0.323
14.0, 0.070, -0.156, 0.413
16.0, 0.073, -0.176, 0.413
18.0, 0.079, -0.177, 0.481
20.0, 0.056, -0.077, 0.481
22.0, 0.044, -0.016, 0.553
24.0, 0.045, -0.016, 0.553
26.0, 0.036, 0.057, 0.466
28.0, 0.038, 0.046, 0.466
30.0, 0.028, 0.082, 0.384
32.0, 0.026, 0.041, 0.384
34.0, 0.017, 0.026, 0.302
36.0, 0.008, 0.008, 0.302
38.0, 0.000, -0.026, 0.315
40.0, -0.008, -0.051, 0.315
42.0, -0.016, -0.056, 0.355
44.0, -0.026, -0.050, 0.334
46.0, -0.035, -0.045, 0.438
48.0, -0.047, -0.041, 0.481
50.0, -0.057, -0.039, 0.490
52.0, -0.069, -0.037, 0.503
54.0, -0.082, -0.050, 0.501
56.0, -0.097, -0.064, 0.425
58.0, -0.113, -0.144, 0.391
60.0, -0.113, -0.144, 0.317