All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.156, 0.404, -0.064
-58.0, -0.160, 0.451, 0.052
-56.0, -0.150, 0.353, 0.138
-54.0, -0.140, 0.270, 0.214
-52.0, -0.129, 0.200, 0.226
-50.0, -0.121, 0.164, 0.313
-48.0, -0.112, 0.115, 0.352
-46.0, -0.100, 0.083, 0.369
-44.0, -0.078, 0.047, 0.498
-42.0, -0.085, 0.053, 0.444
-40.0, -0.086, 0.050, 0.425
-38.0, -0.080, 0.032, 0.441
-36.0, -0.078, -0.012, 0.446
-34.0, -0.070, -0.052, 0.460
-32.0, -0.064, -0.083, 0.362
-30.0, -0.053, -0.143, 0.376
-28.0, -0.044, -0.186, 0.343
-26.0, -0.037, -0.213, 0.348
-24.0, -0.029, -0.228, 0.324
-22.0, -0.021, -0.220, 0.308
-20.0, -0.023, -0.205, 0.284
-18.0, -0.046, -0.179, 0.275
-16.0, -0.067, -0.135, 0.265
-14.0, -0.078, -0.091, 0.230
-12.0, -0.082, -0.039, 0.215
-10.0, -0.084, 0.002, 0.217
-8.0, -0.085, 0.012, 0.174
-6.0, -0.082, 0.038, 0.175
-4.0, -0.074, 0.030, -0.033
-2.0, -0.062, 0.076, 0.108
0.0, -0.016, -0.001, 0.056
0.0, 0.133, -0.415, 0.054
2.0, 0.135, -0.399, -0.036
4.0, 0.138, -0.374, -0.113
6.0, 0.139, -0.338, -0.052
8.0, 0.140, -0.305, -0.083
10.0, 0.139, -0.283, -0.019
12.0, 0.140, -0.246, -0.045
14.0, 0.140, -0.199, 0.020
16.0, 0.141, -0.164, -0.015
18.0, 0.150, -0.096, 0.059
20.0, 0.127, -0.018, 0.041
22.0, 0.119, 0.046, -0.013
24.0, 0.122, 0.076, -0.015
26.0, 0.114, 0.119, -0.035
28.0, 0.116, 0.131, 0.000
30.0, 0.105, 0.172, -0.009
32.0, 0.108, 0.170, 0.023
34.0, 0.096, 0.170, -0.026
36.0, 0.094, 0.170, -0.012
38.0, 0.086, 0.184, 0.055
40.0, 0.080, 0.185, 0.077
42.0, 0.073, 0.226, 0.215
44.0, 0.065, 0.267, 0.325
46.0, 0.059, 0.334, 0.395
48.0, 0.051, 0.373, 0.533
50.0, 0.044, 0.393, 0.649
52.0, 0.035, 0.406, 0.747
54.0, 0.025, 0.410, 0.789
56.0, 0.013, 0.377, 0.847
58.0, -0.001, 0.325, 0.915
60.0, 0.003, 0.329, 0.947

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.228, 1.016, 0.525
-58.0, -0.228, 1.016, 0.591
-56.0, -0.214, 0.872, 0.639
-54.0, -0.200, 0.751, 0.700
-52.0, -0.186, 0.645, 0.677
-50.0, -0.176, 0.574, 0.714
-48.0, -0.165, 0.490, 0.696
-46.0, -0.150, 0.428, 0.673
-44.0, -0.122, 0.361, 0.818
-42.0, -0.121, 0.336, 0.836
-40.0, -0.129, 0.321, 0.768
-38.0, -0.125, 0.283, 0.768
-36.0, -0.122, 0.211, 0.788
-34.0, -0.112, 0.154, 0.788
-32.0, -0.103, 0.094, 0.675
-30.0, -0.088, 0.012, 0.675
-28.0, -0.075, -0.064, 0.658
-26.0, -0.063, -0.119, 0.658
-24.0, -0.052, -0.159, 0.609
-22.0, -0.039, -0.160, 0.609
-20.0, -0.042, -0.151, 0.599
-18.0, -0.069, -0.128, 0.599
-16.0, -0.099, -0.067, 0.627
-14.0, -0.116, -0.020, 0.627
-12.0, -0.125, 0.032, 0.641
-10.0, -0.128, 0.061, 0.641
-8.0, -0.126, 0.053, 0.597
-6.0, -0.118, 0.069, 0.597
-4.0, -0.102, 0.058, 0.356
-2.0, -0.079, 0.085, 0.356
0.0, -0.016, -0.012, 0.056
0.0, -0.041, -0.144, 0.452
2.0, -0.036, -0.138, 0.474
4.0, -0.031, -0.111, 0.474
6.0, -0.029, -0.053, 0.575
8.0, -0.026, -0.004, 0.575
10.0, -0.026, 0.037, 0.667
12.0, -0.023, 0.086, 0.667
14.0, -0.022, 0.157, 0.774
16.0, -0.018, 0.203, 0.774
18.0, -0.007, 0.267, 0.876
20.0, -0.034, 0.356, 0.876
22.0, -0.045, 0.432, 0.832
24.0, -0.044, 0.457, 0.832
26.0, -0.053, 0.508, 0.790
28.0, -0.053, 0.519, 0.790
30.0, -0.065, 0.575, 0.734
32.0, -0.063, 0.561, 0.734
34.0, -0.076, 0.564, 0.662
36.0, -0.079, 0.576, 0.662
38.0, -0.090, 0.601, 0.701
40.0, -0.098, 0.621, 0.701
42.0, -0.106, 0.674, 0.822
44.0, -0.117, 0.719, 0.917
46.0, -0.125, 0.785, 0.970
48.0, -0.136, 0.817, 1.092
50.0, -0.146, 0.825, 1.137
52.0, -0.158, 0.834, 1.169
54.0, -0.172, 0.844, 1.145
56.0, -0.186, 0.812, 1.123
58.0, -0.204, 0.745, 1.089
60.0, -0.204, 0.745, 0.969