All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.213, -0.226, 0.193
-58.0, -0.218, -0.180, 0.340
-56.0, -0.209, -0.264, 0.430
-54.0, -0.200, -0.342, 0.489
-52.0, -0.191, -0.391, 0.569
-50.0, -0.185, -0.448, 0.616
-48.0, -0.176, -0.483, 0.657
-46.0, -0.155, -0.532, 0.703
-44.0, -0.143, -0.576, 0.733
-42.0, -0.151, -0.587, 0.739
-40.0, -0.152, -0.607, 0.614
-38.0, -0.143, -0.599, 0.631
-36.0, -0.141, -0.628, 0.655
-34.0, -0.132, -0.613, 0.669
-32.0, -0.126, -0.641, 0.575
-30.0, -0.116, -0.669, 0.590
-28.0, -0.108, -0.659, 0.562
-26.0, -0.100, -0.658, 0.566
-24.0, -0.091, -0.644, 0.501
-22.0, -0.083, -0.619, 0.485
-20.0, -0.082, -0.580, 0.376
-18.0, -0.103, -0.518, 0.366
-16.0, -0.120, -0.433, 0.281
-14.0, -0.130, -0.364, 0.247
-12.0, -0.133, -0.310, 0.206
-10.0, -0.135, -0.266, 0.207
-8.0, -0.130, -0.195, 0.175
-6.0, -0.121, -0.119, 0.176
-4.0, -0.103, -0.078, -0.011
-2.0, -0.082, 0.011, 0.129
0.0, -0.024, -0.013, 0.101
0.0, 0.067, -0.433, 0.233
2.0, 0.070, -0.388, 0.145
4.0, 0.072, -0.333, 0.068
6.0, 0.074, -0.252, 0.130
8.0, 0.076, -0.183, 0.100
10.0, 0.076, -0.091, 0.188
12.0, 0.078, -0.002, 0.162
14.0, 0.078, 0.074, 0.194
16.0, 0.080, 0.141, 0.159
18.0, 0.085, 0.236, 0.244
20.0, 0.069, 0.312, 0.225
22.0, 0.065, 0.370, 0.284
24.0, 0.057, 0.443, 0.283
26.0, 0.059, 0.465, 0.341
28.0, 0.050, 0.533, 0.375
30.0, 0.054, 0.570, 0.369
32.0, 0.044, 0.604, 0.400
34.0, 0.045, 0.620, 0.391
36.0, 0.038, 0.672, 0.405
38.0, 0.032, 0.707, 0.436
40.0, 0.027, 0.765, 0.458
42.0, 0.019, 0.817, 0.613
44.0, 0.014, 0.875, 0.742
46.0, 0.005, 0.929, 0.852
48.0, 0.000, 0.934, 0.926
50.0, -0.008, 0.942, 1.021
52.0, -0.016, 0.948, 1.100
54.0, -0.027, 0.932, 1.173
56.0, -0.039, 0.898, 1.255
58.0, -0.053, 0.869, 1.318
60.0, -0.050, 0.866, 1.357

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.286, 0.385, 0.782
-58.0, -0.286, 0.385, 0.879
-56.0, -0.272, 0.255, 0.930
-54.0, -0.259, 0.140, 0.975
-52.0, -0.248, 0.055, 1.020
-50.0, -0.240, -0.038, 1.017
-48.0, -0.228, -0.108, 1.000
-46.0, -0.205, -0.187, 1.006
-44.0, -0.187, -0.262, 1.053
-42.0, -0.188, -0.304, 1.131
-40.0, -0.194, -0.336, 0.957
-38.0, -0.188, -0.348, 0.957
-36.0, -0.184, -0.400, 0.997
-34.0, -0.174, -0.413, 0.997
-32.0, -0.165, -0.464, 0.888
-30.0, -0.151, -0.514, 0.888
-28.0, -0.138, -0.536, 0.876
-26.0, -0.126, -0.564, 0.876
-24.0, -0.114, -0.575, 0.786
-22.0, -0.102, -0.554, 0.786
-20.0, -0.100, -0.526, 0.690
-18.0, -0.126, -0.467, 0.690
-16.0, -0.152, -0.375, 0.644
-14.0, -0.168, -0.299, 0.644
-12.0, -0.175, -0.239, 0.632
-10.0, -0.178, -0.201, 0.632
-8.0, -0.171, -0.147, 0.598
-6.0, -0.156, -0.093, 0.598
-4.0, -0.131, -0.050, 0.378
-2.0, -0.098, 0.025, 0.378
0.0, -0.024, -0.027, 0.101
0.0, -0.108, -0.161, 0.631
2.0, -0.102, -0.127, 0.655
4.0, -0.097, -0.064, 0.655
6.0, -0.094, 0.034, 0.757
8.0, -0.090, 0.125, 0.757
10.0, -0.089, 0.235, 0.874
12.0, -0.085, 0.336, 0.874
14.0, -0.084, 0.439, 0.947
16.0, -0.079, 0.504, 0.947
18.0, -0.071, 0.577, 1.060
20.0, -0.092, 0.699, 1.060
22.0, -0.100, 0.755, 1.130
24.0, -0.109, 0.831, 1.130
26.0, -0.108, 0.848, 1.165
28.0, -0.119, 0.930, 1.165
30.0, -0.116, 0.968, 1.112
32.0, -0.127, 1.000, 1.112
34.0, -0.128, 1.013, 1.079
36.0, -0.136, 1.078, 1.079
38.0, -0.144, 1.135, 1.081
40.0, -0.150, 1.202, 1.081
42.0, -0.160, 1.272, 1.219
44.0, -0.167, 1.327, 1.334
46.0, -0.179, 1.380, 1.427
48.0, -0.187, 1.378, 1.485
50.0, -0.198, 1.385, 1.509
52.0, -0.209, 1.387, 1.521
54.0, -0.223, 1.366, 1.529
56.0, -0.238, 1.333, 1.532
58.0, -0.256, 1.282, 1.492
60.0, -0.256, 1.282, 1.379