All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.137, 1.255, -0.740
-58.0, -0.142, 1.301, -0.548
-56.0, -0.132, 1.192, -0.372
-54.0, -0.124, 1.060, -0.217
-52.0, -0.117, 0.941, -0.111
-50.0, -0.108, 0.844, 0.002
-48.0, -0.103, 0.742, 0.041
-46.0, -0.082, 0.667, 0.140
-44.0, -0.074, 0.586, 0.026
-42.0, -0.086, 0.542, 0.192
-40.0, -0.081, 0.476, 0.291
-38.0, -0.077, 0.410, 0.308
-36.0, -0.075, 0.368, 0.398
-34.0, -0.068, 0.282, 0.412
-32.0, -0.064, 0.209, 0.374
-30.0, -0.054, 0.148, 0.389
-28.0, -0.045, 0.094, 0.352
-26.0, -0.038, 0.027, 0.356
-24.0, -0.031, -0.006, 0.284
-22.0, -0.023, -0.035, 0.268
-20.0, -0.020, -0.045, 0.189
-18.0, -0.041, -0.029, 0.180
-16.0, -0.060, -0.019, 0.178
-14.0, -0.071, 0.008, 0.144
-12.0, -0.077, 0.024, 0.156
-10.0, -0.081, 0.032, 0.158
-8.0, -0.079, 0.053, 0.184
-6.0, -0.076, 0.075, 0.186
-4.0, -0.070, 0.042, 0.021
-2.0, -0.062, 0.079, 0.162
0.0, -0.019, -0.012, 0.063
0.0, 0.120, -0.460, 0.128
2.0, 0.123, -0.468, -0.011
4.0, 0.131, -0.473, -0.088
6.0, 0.149, -0.458, -0.035
8.0, 0.143, -0.432, -0.065
10.0, 0.139, -0.392, -0.093
12.0, 0.139, -0.351, -0.119
14.0, 0.140, -0.314, -0.042
16.0, 0.143, -0.272, -0.077
18.0, 0.147, -0.251, 0.036
20.0, 0.136, -0.154, 0.018
22.0, 0.133, -0.172, 0.046
24.0, 0.132, -0.170, 0.044
26.0, 0.131, -0.179, 0.044
28.0, 0.130, -0.169, 0.079
30.0, 0.129, -0.153, 0.008
32.0, 0.126, -0.172, 0.040
34.0, 0.121, -0.212, -0.053
36.0, 0.118, -0.224, -0.039
38.0, 0.113, -0.226, -0.076
40.0, 0.109, -0.216, -0.053
42.0, 0.101, -0.222, 0.091
44.0, 0.097, -0.194, 0.144
46.0, 0.090, -0.197, 0.278
48.0, 0.085, -0.213, 0.346
50.0, 0.078, -0.232, 0.447
52.0, 0.072, -0.266, 0.460
54.0, 0.062, -0.326, 0.479
56.0, 0.051, -0.384, 0.423
58.0, 0.036, -0.460, 0.563
60.0, 0.039, -0.457, 0.118

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.209, 1.866, -0.151
-58.0, -0.209, 1.866, -0.009
-56.0, -0.196, 1.711, 0.129
-54.0, -0.183, 1.541, 0.269
-52.0, -0.174, 1.394, 0.340
-50.0, -0.163, 1.254, 0.404
-48.0, -0.155, 1.117, 0.385
-46.0, -0.132, 1.012, 0.444
-44.0, -0.118, 0.893, 0.346
-42.0, -0.122, 0.825, 0.585
-40.0, -0.124, 0.748, 0.634
-38.0, -0.122, 0.662, 0.634
-36.0, -0.119, 0.591, 0.740
-34.0, -0.110, 0.490, 0.740
-32.0, -0.102, 0.386, 0.687
-30.0, -0.088, 0.303, 0.687
-28.0, -0.075, 0.217, 0.666
-26.0, -0.064, 0.131, 0.666
-24.0, -0.054, 0.071, 0.569
-22.0, -0.042, 0.025, 0.569
-20.0, -0.039, 0.009, 0.503
-18.0, -0.064, 0.021, 0.503
-16.0, -0.092, 0.049, 0.541
-14.0, -0.109, 0.079, 0.541
-12.0, -0.120, 0.101, 0.582
-10.0, -0.124, 0.091, 0.582
-8.0, -0.121, 0.101, 0.607
-6.0, -0.112, 0.105, 0.607
-4.0, -0.098, 0.070, 0.411
-2.0, -0.079, 0.085, 0.411
0.0, -0.019, -0.022, 0.063
0.0, -0.054, -0.188, 0.526
2.0, -0.049, -0.213, 0.498
4.0, -0.039, -0.209, 0.498
6.0, -0.019, -0.179, 0.592
8.0, -0.024, -0.129, 0.592
10.0, -0.026, -0.068, 0.593
12.0, -0.024, -0.011, 0.593
14.0, -0.022, 0.049, 0.712
16.0, -0.017, 0.098, 0.712
18.0, -0.010, 0.101, 0.853
20.0, -0.026, 0.219, 0.853
22.0, -0.031, 0.223, 0.891
24.0, -0.034, 0.224, 0.891
26.0, -0.036, 0.216, 0.869
28.0, -0.039, 0.231, 0.869
30.0, -0.041, 0.245, 0.751
32.0, -0.045, 0.219, 0.751
34.0, -0.052, 0.187, 0.635
36.0, -0.055, 0.182, 0.635
38.0, -0.063, 0.196, 0.570
40.0, -0.068, 0.226, 0.570
42.0, -0.078, 0.226, 0.697
44.0, -0.085, 0.258, 0.735
46.0, -0.094, 0.254, 0.853
48.0, -0.102, 0.231, 0.905
50.0, -0.112, 0.210, 0.934
52.0, -0.122, 0.173, 0.882
54.0, -0.135, 0.108, 0.835
56.0, -0.148, 0.051, 0.699
58.0, -0.167, -0.041, 0.737
60.0, -0.167, -0.041, 0.140