All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.166, -0.193, 0.224
-58.0, -0.171, -0.147, 0.360
-56.0, -0.160, -0.236, 0.366
-54.0, -0.150, -0.275, 0.513
-52.0, -0.141, -0.336, 0.549
-50.0, -0.132, -0.366, 0.656
-48.0, -0.123, -0.400, 0.674
-46.0, -0.110, -0.428, 0.685
-44.0, -0.089, -0.448, 0.741
-42.0, -0.102, -0.491, 0.747
-40.0, -0.098, -0.521, 0.689
-38.0, -0.092, -0.544, 0.705
-36.0, -0.091, -0.551, 0.732
-34.0, -0.083, -0.596, 0.747
-32.0, -0.076, -0.623, 0.584
-30.0, -0.065, -0.626, 0.599
-28.0, -0.055, -0.606, 0.536
-26.0, -0.045, -0.590, 0.541
-24.0, -0.037, -0.562, 0.514
-22.0, -0.029, -0.547, 0.498
-20.0, -0.026, -0.510, 0.450
-18.0, -0.042, -0.433, 0.441
-16.0, -0.062, -0.374, 0.437
-14.0, -0.075, -0.322, 0.403
-12.0, -0.082, -0.261, 0.361
-10.0, -0.085, -0.216, 0.363
-8.0, -0.085, -0.170, 0.319
-6.0, -0.082, -0.099, 0.320
-4.0, -0.073, -0.082, 0.079
-2.0, -0.066, -0.001, 0.219
0.0, -0.020, -0.014, 0.160
0.0, 0.110, -0.444, 0.249
2.0, 0.119, -0.415, 0.194
4.0, 0.122, -0.313, 0.117
6.0, 0.125, -0.240, 0.196
8.0, 0.126, -0.144, 0.166
10.0, 0.128, -0.026, 0.258
12.0, 0.129, 0.060, 0.232
14.0, 0.128, 0.131, 0.284
16.0, 0.131, 0.190, 0.249
18.0, 0.133, 0.219, 0.310
20.0, 0.124, 0.331, 0.292
22.0, 0.118, 0.376, 0.312
24.0, 0.114, 0.405, 0.310
26.0, 0.112, 0.445, 0.310
28.0, 0.110, 0.513, 0.344
30.0, 0.106, 0.566, 0.366
32.0, 0.103, 0.618, 0.398
34.0, 0.098, 0.664, 0.399
36.0, 0.092, 0.714, 0.413
38.0, 0.085, 0.765, 0.486
40.0, 0.078, 0.814, 0.509
42.0, 0.072, 0.870, 0.676
44.0, 0.063, 0.915, 0.786
46.0, 0.056, 0.918, 0.910
48.0, 0.050, 0.947, 0.975
50.0, 0.041, 0.988, 1.067
52.0, 0.032, 0.979, 1.165
54.0, 0.021, 0.959, 1.253
56.0, 0.009, 0.948, 1.298
58.0, -0.005, 0.943, 1.428
60.0, -0.002, 0.946, 1.462

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.239, 0.419, 0.812
-58.0, -0.239, 0.419, 0.899
-56.0, -0.224, 0.283, 0.866
-54.0, -0.210, 0.206, 0.999
-52.0, -0.198, 0.109, 1.000
-50.0, -0.186, 0.044, 1.057
-48.0, -0.175, -0.025, 1.018
-46.0, -0.159, -0.090, 0.988
-44.0, -0.134, -0.134, 1.061
-42.0, -0.139, -0.201, 1.140
-40.0, -0.140, -0.250, 1.031
-38.0, -0.137, -0.293, 1.031
-36.0, -0.134, -0.328, 1.075
-34.0, -0.124, -0.388, 1.075
-32.0, -0.114, -0.440, 0.897
-30.0, -0.099, -0.466, 0.897
-28.0, -0.085, -0.483, 0.850
-26.0, -0.071, -0.496, 0.850
-24.0, -0.060, -0.493, 0.799
-22.0, -0.048, -0.477, 0.799
-20.0, -0.045, -0.451, 0.764
-18.0, -0.066, -0.376, 0.764
-16.0, -0.094, -0.309, 0.800
-14.0, -0.113, -0.257, 0.800
-12.0, -0.125, -0.190, 0.787
-10.0, -0.129, -0.166, 0.787
-8.0, -0.126, -0.134, 0.742
-6.0, -0.118, -0.077, 0.742
-4.0, -0.101, -0.055, 0.468
-2.0, -0.082, 0.013, 0.468
0.0, -0.020, -0.024, 0.160
0.0, -0.064, -0.173, 0.647
2.0, -0.053, -0.142, 0.703
4.0, -0.048, -0.049, 0.703
6.0, -0.043, 0.048, 0.823
8.0, -0.040, 0.163, 0.823
10.0, -0.037, 0.293, 0.944
12.0, -0.034, 0.386, 0.944
14.0, -0.033, 0.485, 1.037
16.0, -0.029, 0.551, 1.037
18.0, -0.024, 0.577, 1.127
20.0, -0.037, 0.720, 1.127
22.0, -0.046, 0.762, 1.157
24.0, -0.052, 0.798, 1.157
26.0, -0.055, 0.844, 1.134
28.0, -0.059, 0.909, 1.134
30.0, -0.064, 0.963, 1.109
32.0, -0.068, 1.016, 1.109
34.0, -0.074, 1.064, 1.087
36.0, -0.082, 1.125, 1.087
38.0, -0.090, 1.187, 1.132
40.0, -0.099, 1.255, 1.132
42.0, -0.108, 1.319, 1.282
44.0, -0.119, 1.358, 1.378
46.0, -0.128, 1.374, 1.486
48.0, -0.137, 1.383, 1.534
50.0, -0.149, 1.431, 1.555
52.0, -0.161, 1.418, 1.587
54.0, -0.175, 1.392, 1.609
56.0, -0.190, 1.383, 1.575
58.0, -0.208, 1.362, 1.602
60.0, -0.208, 1.362, 1.484