All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.160, -0.024, -0.030
-58.0, -0.165, 0.022, 0.087
-56.0, -0.158, -0.028, 0.109
-54.0, -0.150, -0.047, 0.244
-52.0, -0.144, -0.094, 0.362
-50.0, -0.137, -0.147, 0.471
-48.0, -0.129, -0.201, 0.574
-46.0, -0.119, -0.272, 0.709
-44.0, -0.099, -0.300, 0.613
-42.0, -0.113, -0.349, 0.630
-40.0, -0.111, -0.430, 0.569
-38.0, -0.104, -0.438, 0.586
-36.0, -0.104, -0.478, 0.517
-34.0, -0.096, -0.481, 0.531
-32.0, -0.088, -0.473, 0.391
-30.0, -0.076, -0.454, 0.406
-28.0, -0.067, -0.432, 0.403
-26.0, -0.060, -0.417, 0.407
-24.0, -0.052, -0.413, 0.404
-22.0, -0.044, -0.415, 0.388
-20.0, -0.041, -0.398, 0.387
-18.0, -0.060, -0.380, 0.378
-16.0, -0.080, -0.347, 0.345
-14.0, -0.095, -0.312, 0.311
-12.0, -0.101, -0.282, 0.224
-10.0, -0.103, -0.242, 0.225
-8.0, -0.094, -0.202, 0.155
-6.0, -0.094, -0.148, 0.156
-4.0, -0.081, -0.095, -0.052
-2.0, -0.070, -0.001, 0.088
0.0, -0.021, -0.005, 0.053
0.0, 0.145, -0.444, 0.034
2.0, 0.150, -0.356, -0.005
4.0, 0.154, -0.268, -0.081
6.0, 0.156, -0.198, -0.001
8.0, 0.159, -0.127, -0.031
10.0, 0.159, -0.061, 0.016
12.0, 0.162, -0.018, -0.010
14.0, 0.162, 0.038, 0.029
16.0, 0.165, 0.048, -0.006
18.0, 0.167, 0.081, 0.011
20.0, 0.158, 0.193, -0.007
22.0, 0.149, 0.237, -0.026
24.0, 0.150, 0.265, -0.028
26.0, 0.142, 0.355, 0.004
28.0, 0.143, 0.413, 0.039
30.0, 0.134, 0.516, 0.121
32.0, 0.136, 0.556, 0.153
34.0, 0.128, 0.620, 0.107
36.0, 0.121, 0.640, 0.121
38.0, 0.115, 0.655, 0.194
40.0, 0.110, 0.673, 0.216
42.0, 0.102, 0.696, 0.284
44.0, 0.095, 0.718, 0.415
46.0, 0.085, 0.723, 0.538
48.0, 0.079, 0.731, 0.583
50.0, 0.069, 0.756, 0.679
52.0, 0.059, 0.753, 0.762
54.0, 0.045, 0.752, 0.854
56.0, 0.034, 0.747, 0.890
58.0, 0.020, 0.779, 1.025
60.0, 0.024, 0.782, 1.207

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.233, 0.587, 0.559
-58.0, -0.233, 0.587, 0.625
-56.0, -0.221, 0.490, 0.609
-54.0, -0.210, 0.434, 0.730
-52.0, -0.201, 0.358, 0.813
-50.0, -0.191, 0.263, 0.872
-48.0, -0.181, 0.174, 0.918
-46.0, -0.168, 0.079, 1.013
-44.0, -0.143, 0.014, 0.933
-42.0, -0.150, -0.066, 1.023
-40.0, -0.154, -0.151, 0.912
-38.0, -0.149, -0.187, 0.912
-36.0, -0.147, -0.249, 0.859
-34.0, -0.137, -0.282, 0.859
-32.0, -0.127, -0.288, 0.704
-30.0, -0.111, -0.299, 0.704
-28.0, -0.097, -0.309, 0.717
-26.0, -0.086, -0.315, 0.717
-24.0, -0.075, -0.337, 0.689
-22.0, -0.063, -0.348, 0.689
-20.0, -0.060, -0.345, 0.702
-18.0, -0.083, -0.330, 0.702
-16.0, -0.112, -0.289, 0.708
-14.0, -0.133, -0.247, 0.708
-12.0, -0.144, -0.211, 0.650
-10.0, -0.146, -0.193, 0.650
-8.0, -0.135, -0.154, 0.578
-6.0, -0.130, -0.113, 0.578
-4.0, -0.109, -0.074, 0.337
-2.0, -0.086, 0.014, 0.337
0.0, -0.021, -0.017, 0.053
0.0, -0.029, -0.172, 0.432
2.0, -0.022, -0.095, 0.505
4.0, -0.016, -0.005, 0.505
6.0, -0.012, 0.090, 0.626
8.0, -0.008, 0.177, 0.626
10.0, -0.006, 0.262, 0.701
12.0, -0.001, 0.321, 0.701
14.0, 0.000, 0.400, 0.783
16.0, 0.006, 0.418, 0.783
18.0, 0.011, 0.441, 0.828
20.0, -0.003, 0.567, 0.828
22.0, -0.015, 0.628, 0.819
24.0, -0.016, 0.652, 0.819
26.0, -0.026, 0.751, 0.829
28.0, -0.026, 0.802, 0.829
30.0, -0.036, 0.914, 0.864
32.0, -0.036, 0.947, 0.864
34.0, -0.044, 1.005, 0.796
36.0, -0.052, 1.046, 0.796
38.0, -0.060, 1.087, 0.840
40.0, -0.068, 1.116, 0.840
42.0, -0.077, 1.150, 0.891
44.0, -0.086, 1.170, 1.007
46.0, -0.099, 1.174, 1.114
48.0, -0.108, 1.175, 1.142
50.0, -0.122, 1.199, 1.167
52.0, -0.134, 1.192, 1.184
54.0, -0.151, 1.185, 1.210
56.0, -0.165, 1.182, 1.167
58.0, -0.183, 1.198, 1.199
60.0, -0.183, 1.198, 1.230