All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.175, 0.216, 0.156
-58.0, -0.180, 0.262, 0.232
-56.0, -0.171, 0.177, 0.269
-54.0, -0.162, 0.104, 0.334
-52.0, -0.156, 0.037, 0.438
-50.0, -0.147, -0.042, 0.519
-48.0, -0.139, -0.114, 0.611
-46.0, -0.130, -0.135, 0.656
-44.0, -0.107, -0.168, 0.581
-42.0, -0.113, -0.192, 0.856
-40.0, -0.117, -0.225, 0.709
-38.0, -0.114, -0.255, 0.726
-36.0, -0.111, -0.278, 0.714
-34.0, -0.104, -0.319, 0.728
-32.0, -0.100, -0.337, 0.580
-30.0, -0.089, -0.368, 0.595
-28.0, -0.080, -0.393, 0.527
-26.0, -0.071, -0.409, 0.531
-24.0, -0.063, -0.440, 0.513
-22.0, -0.054, -0.444, 0.497
-20.0, -0.051, -0.437, 0.460
-18.0, -0.070, -0.407, 0.450
-16.0, -0.087, -0.347, 0.449
-14.0, -0.100, -0.289, 0.415
-12.0, -0.104, -0.218, 0.366
-10.0, -0.104, -0.162, 0.367
-8.0, -0.100, -0.100, 0.322
-6.0, -0.093, -0.045, 0.323
-4.0, -0.078, -0.031, 0.093
-2.0, -0.070, 0.012, 0.234
0.0, -0.025, -0.017, 0.176
0.0, 0.103, -0.394, 0.170
2.0, 0.106, -0.337, 0.102
4.0, 0.108, -0.280, 0.025
6.0, 0.110, -0.220, 0.075
8.0, 0.112, -0.156, 0.045
10.0, 0.112, -0.110, 0.116
12.0, 0.113, -0.053, 0.090
14.0, 0.113, -0.001, 0.161
16.0, 0.114, 0.027, 0.126
18.0, 0.116, 0.092, 0.222
20.0, 0.118, 0.186, 0.203
22.0, 0.098, 0.214, 0.237
24.0, 0.089, 0.293, 0.235
26.0, 0.092, 0.320, 0.220
28.0, 0.082, 0.397, 0.255
30.0, 0.085, 0.441, 0.167
32.0, 0.079, 0.489, 0.199
34.0, 0.077, 0.508, 0.231
36.0, 0.071, 0.535, 0.246
38.0, 0.064, 0.525, 0.329
40.0, 0.059, 0.538, 0.352
42.0, 0.051, 0.550, 0.472
44.0, 0.045, 0.560, 0.612
46.0, 0.037, 0.556, 0.681
48.0, 0.028, 0.567, 0.753
50.0, 0.020, 0.564, 0.785
52.0, 0.009, 0.583, 0.901
54.0, -0.003, 0.583, 1.010
56.0, -0.015, 0.609, 0.962
58.0, -0.029, 0.638, 0.926
60.0, -0.025, 0.648, 1.031

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.248, 0.828, 0.745
-58.0, -0.248, 0.828, 0.770
-56.0, -0.235, 0.696, 0.769
-54.0, -0.222, 0.586, 0.820
-52.0, -0.213, 0.488, 0.889
-50.0, -0.202, 0.368, 0.920
-48.0, -0.192, 0.261, 0.955
-46.0, -0.180, 0.215, 0.960
-44.0, -0.151, 0.146, 0.902
-42.0, -0.149, 0.092, 1.249
-40.0, -0.160, 0.046, 1.052
-38.0, -0.159, -0.004, 1.052
-36.0, -0.154, -0.050, 1.056
-34.0, -0.146, -0.112, 1.056
-32.0, -0.139, -0.160, 0.893
-30.0, -0.123, -0.207, 0.893
-28.0, -0.110, -0.260, 0.841
-26.0, -0.097, -0.307, 0.841
-24.0, -0.086, -0.364, 0.798
-22.0, -0.073, -0.384, 0.798
-20.0, -0.069, -0.383, 0.774
-18.0, -0.093, -0.348, 0.774
-16.0, -0.119, -0.282, 0.812
-14.0, -0.138, -0.224, 0.812
-12.0, -0.146, -0.147, 0.792
-10.0, -0.147, -0.103, 0.792
-8.0, -0.141, -0.061, 0.745
-6.0, -0.129, -0.021, 0.745
-4.0, -0.106, -0.003, 0.483
-2.0, -0.086, 0.027, 0.483
0.0, -0.025, -0.030, 0.176
0.0, -0.071, -0.122, 0.568
2.0, -0.065, -0.076, 0.611
4.0, -0.062, -0.016, 0.611
6.0, -0.058, 0.060, 0.702
8.0, -0.055, 0.146, 0.702
10.0, -0.053, 0.214, 0.802
12.0, -0.050, 0.282, 0.802
14.0, -0.049, 0.361, 0.915
16.0, -0.045, 0.399, 0.915
18.0, -0.040, 0.438, 1.038
20.0, -0.044, 0.567, 1.038
22.0, -0.066, 0.600, 1.082
24.0, -0.077, 0.681, 1.082
26.0, -0.075, 0.703, 1.044
28.0, -0.087, 0.793, 1.044
30.0, -0.085, 0.839, 0.910
32.0, -0.092, 0.880, 0.910
34.0, -0.095, 0.901, 0.920
36.0, -0.103, 0.941, 0.920
38.0, -0.112, 0.954, 0.975
40.0, -0.119, 0.974, 0.975
42.0, -0.128, 0.998, 1.079
44.0, -0.136, 1.003, 1.204
46.0, -0.147, 1.000, 1.257
48.0, -0.159, 1.003, 1.312
50.0, -0.170, 1.007, 1.273
52.0, -0.185, 1.022, 1.323
54.0, -0.199, 1.016, 1.366
56.0, -0.214, 1.043, 1.238
58.0, -0.232, 1.057, 1.100
60.0, -0.232, 1.057, 1.053