All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.129, 1.570, -0.547
-58.0, -0.134, 1.616, -0.413
-56.0, -0.124, 1.480, -0.379
-54.0, -0.115, 1.375, -0.296
-52.0, -0.106, 1.289, -0.180
-50.0, -0.099, 1.207, -0.067
-48.0, -0.090, 1.123, -0.034
-46.0, -0.081, 1.093, 0.070
-44.0, -0.059, 1.074, 0.110
-42.0, -0.056, 1.013, 0.301
-40.0, -0.069, 0.962, 0.400
-38.0, -0.065, 0.872, 0.417
-36.0, -0.063, 0.784, 0.409
-34.0, -0.056, 0.707, 0.424
-32.0, -0.051, 0.611, 0.235
-30.0, -0.043, 0.516, 0.250
-28.0, -0.036, 0.424, 0.253
-26.0, -0.029, 0.332, 0.257
-24.0, -0.021, 0.274, 0.278
-22.0, -0.014, 0.243, 0.262
-20.0, -0.016, 0.206, 0.348
-18.0, -0.037, 0.196, 0.339
-16.0, -0.056, 0.211, 0.380
-14.0, -0.068, 0.238, 0.346
-12.0, -0.075, 0.251, 0.313
-10.0, -0.076, 0.254, 0.314
-8.0, -0.076, 0.233, 0.242
-6.0, -0.075, 0.198, 0.243
-4.0, -0.064, 0.125, -0.011
-2.0, -0.061, 0.101, 0.130
0.0, -0.021, 0.001, 0.038
0.0, 0.113, -0.302, 0.100
2.0, 0.116, -0.350, 0.017
4.0, 0.119, -0.357, -0.060
6.0, 0.121, -0.340, 0.035
8.0, 0.122, -0.339, 0.004
10.0, 0.124, -0.330, 0.098
12.0, 0.125, -0.302, 0.072
14.0, 0.126, -0.293, 0.175
16.0, 0.128, -0.283, 0.140
18.0, 0.129, -0.276, 0.199
20.0, 0.136, -0.237, 0.180
22.0, 0.114, -0.246, 0.117
24.0, 0.114, -0.262, 0.115
26.0, 0.111, -0.293, 0.040
28.0, 0.107, -0.339, 0.075
30.0, 0.103, -0.362, 0.007
32.0, 0.101, -0.401, 0.039
34.0, 0.095, -0.408, 0.033
36.0, 0.091, -0.401, 0.047
38.0, 0.083, -0.407, 0.126
40.0, 0.078, -0.429, 0.148
42.0, 0.073, -0.434, 0.192
44.0, 0.066, -0.427, 0.247
46.0, 0.057, -0.424, 0.303
48.0, 0.050, -0.456, 0.346
50.0, 0.039, -0.499, 0.394
52.0, 0.028, -0.535, 0.424
54.0, 0.014, -0.579, 0.459
56.0, 0.002, -0.606, 0.443
58.0, -0.013, -0.649, 0.524
60.0, -0.009, -0.646, 0.540

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.202, 2.181, 0.042
-58.0, -0.202, 2.181, 0.125
-56.0, -0.188, 1.998, 0.122
-54.0, -0.175, 1.856, 0.190
-52.0, -0.163, 1.734, 0.271
-50.0, -0.153, 1.622, 0.334
-48.0, -0.142, 1.498, 0.310
-46.0, -0.131, 1.438, 0.374
-44.0, -0.103, 1.380, 0.430
-42.0, -0.093, 1.296, 0.694
-40.0, -0.112, 1.239, 0.743
-38.0, -0.110, 1.123, 0.743
-36.0, -0.106, 1.007, 0.752
-34.0, -0.097, 0.913, 0.752
-32.0, -0.089, 0.795, 0.548
-30.0, -0.078, 0.678, 0.548
-28.0, -0.066, 0.552, 0.567
-26.0, -0.055, 0.426, 0.567
-24.0, -0.044, 0.343, 0.563
-22.0, -0.033, 0.295, 0.563
-20.0, -0.034, 0.260, 0.662
-18.0, -0.060, 0.257, 0.662
-16.0, -0.087, 0.277, 0.743
-14.0, -0.106, 0.309, 0.743
-12.0, -0.118, 0.327, 0.739
-10.0, -0.120, 0.312, 0.739
-8.0, -0.118, 0.281, 0.665
-6.0, -0.110, 0.227, 0.665
-4.0, -0.092, 0.153, 0.379
-2.0, -0.077, 0.115, 0.379
0.0, -0.021, -0.015, 0.038
0.0, -0.061, -0.030, 0.497
2.0, -0.056, -0.094, 0.526
4.0, -0.051, -0.093, 0.526
6.0, -0.047, -0.060, 0.662
8.0, -0.044, -0.035, 0.662
10.0, -0.041, -0.009, 0.784
12.0, -0.038, 0.035, 0.784
14.0, -0.035, 0.068, 0.928
16.0, -0.031, 0.087, 0.928
18.0, -0.027, 0.085, 1.015
20.0, -0.025, 0.149, 1.015
22.0, -0.050, 0.150, 0.962
24.0, -0.052, 0.120, 0.962
26.0, -0.056, 0.082, 0.864
28.0, -0.062, 0.055, 0.864
30.0, -0.067, 0.043, 0.750
32.0, -0.070, -0.002, 0.750
34.0, -0.078, -0.007, 0.721
36.0, -0.082, -0.001, 0.721
38.0, -0.092, 0.010, 0.771
40.0, -0.099, 0.014, 0.771
42.0, -0.106, 0.014, 0.799
44.0, -0.115, 0.024, 0.839
46.0, -0.127, 0.026, 0.879
48.0, -0.137, -0.012, 0.905
50.0, -0.151, -0.056, 0.882
52.0, -0.166, -0.091, 0.845
54.0, -0.182, -0.146, 0.815
56.0, -0.197, -0.172, 0.719
58.0, -0.216, -0.230, 0.698
60.0, -0.216, -0.230, 0.563