All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.163, 1.179, -0.558
-58.0, -0.168, 1.225, -0.357
-56.0, -0.159, 1.138, -0.268
-54.0, -0.150, 1.057, -0.131
-52.0, -0.141, 0.972, -0.068
-50.0, -0.132, 0.887, 0.030
-48.0, -0.124, 0.819, 0.139
-46.0, -0.116, 0.749, 0.225
-44.0, -0.092, 0.683, 0.277
-42.0, -0.095, 0.619, 0.425
-40.0, -0.103, 0.571, 0.443
-38.0, -0.100, 0.499, 0.460
-36.0, -0.097, 0.436, 0.455
-34.0, -0.089, 0.403, 0.469
-32.0, -0.083, 0.362, 0.338
-30.0, -0.071, 0.324, 0.353
-28.0, -0.065, 0.258, 0.370
-26.0, -0.058, 0.196, 0.375
-24.0, -0.050, 0.159, 0.409
-22.0, -0.042, 0.116, 0.393
-20.0, -0.039, 0.079, 0.395
-18.0, -0.056, 0.080, 0.386
-16.0, -0.076, 0.072, 0.397
-14.0, -0.088, 0.101, 0.363
-12.0, -0.095, 0.110, 0.317
-10.0, -0.098, 0.113, 0.319
-8.0, -0.097, 0.109, 0.266
-6.0, -0.093, 0.099, 0.267
-4.0, -0.083, 0.054, 0.104
-2.0, -0.076, 0.063, 0.244
0.0, -0.034, -0.004, 0.160
0.0, 0.119, -0.323, 0.027
2.0, 0.123, -0.352, -0.038
4.0, 0.124, -0.348, -0.115
6.0, 0.127, -0.326, -0.052
8.0, 0.128, -0.309, -0.082
10.0, 0.128, -0.279, -0.049
12.0, 0.130, -0.265, -0.075
14.0, 0.129, -0.237, -0.027
16.0, 0.130, -0.205, -0.062
18.0, 0.131, -0.196, -0.048
20.0, 0.138, -0.150, -0.066
22.0, 0.114, -0.124, -0.070
24.0, 0.111, -0.111, -0.072
26.0, 0.108, -0.135, -0.060
28.0, 0.104, -0.143, -0.026
30.0, 0.101, -0.149, -0.015
32.0, 0.096, -0.176, 0.017
34.0, 0.109, -0.200, 0.008
36.0, 0.102, -0.204, 0.022
38.0, 0.087, -0.185, -0.079
40.0, 0.080, -0.166, -0.057
42.0, 0.072, -0.166, 0.097
44.0, 0.067, -0.126, 0.209
46.0, 0.060, -0.094, 0.283
48.0, 0.053, -0.132, 0.359
50.0, 0.043, -0.171, 0.392
52.0, 0.033, -0.219, 0.424
54.0, 0.021, -0.244, 0.461
56.0, 0.012, -0.274, 0.553
58.0, -0.002, -0.321, 0.587
60.0, 0.001, -0.324, 0.609

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-60.0, -0.236, 1.790, 0.031
-58.0, -0.236, 1.790, 0.182
-56.0, -0.222, 1.657, 0.232
-54.0, -0.210, 1.538, 0.355
-52.0, -0.198, 1.409, 0.383
-50.0, -0.187, 1.297, 0.431
-48.0, -0.177, 1.199, 0.483
-46.0, -0.165, 1.094, 0.529
-44.0, -0.137, 0.997, 0.597
-42.0, -0.132, 0.902, 0.818
-40.0, -0.146, 0.842, 0.786
-38.0, -0.145, 0.756, 0.786
-36.0, -0.140, 0.665, 0.797
-34.0, -0.130, 0.603, 0.797
-32.0, -0.121, 0.539, 0.651
-30.0, -0.106, 0.478, 0.651
-28.0, -0.095, 0.390, 0.685
-26.0, -0.084, 0.295, 0.685
-24.0, -0.073, 0.228, 0.694
-22.0, -0.061, 0.176, 0.694
-20.0, -0.058, 0.141, 0.710
-18.0, -0.080, 0.138, 0.710
-16.0, -0.107, 0.138, 0.760
-14.0, -0.126, 0.166, 0.760
-12.0, -0.138, 0.181, 0.743
-10.0, -0.142, 0.171, 0.743
-8.0, -0.139, 0.152, 0.689
-6.0, -0.129, 0.129, 0.689
-4.0, -0.111, 0.082, 0.493
-2.0, -0.092, 0.078, 0.493
0.0, -0.034, -0.017, 0.160
0.0, -0.055, -0.051, 0.425
2.0, -0.049, -0.097, 0.471
4.0, -0.045, -0.092, 0.471
6.0, -0.041, -0.046, 0.575
8.0, -0.038, -0.014, 0.575
10.0, -0.037, 0.031, 0.636
12.0, -0.033, 0.061, 0.636
14.0, -0.032, 0.118, 0.727
16.0, -0.029, 0.162, 0.727
18.0, -0.025, 0.167, 0.769
20.0, -0.023, 0.234, 0.769
22.0, -0.050, 0.272, 0.775
24.0, -0.055, 0.284, 0.775
26.0, -0.059, 0.259, 0.764
28.0, -0.065, 0.252, 0.764
30.0, -0.069, 0.249, 0.728
32.0, -0.075, 0.215, 0.728
34.0, -0.063, 0.203, 0.696
36.0, -0.072, 0.209, 0.696
38.0, -0.088, 0.243, 0.566
40.0, -0.097, 0.270, 0.566
42.0, -0.108, 0.290, 0.703
44.0, -0.114, 0.317, 0.800
46.0, -0.124, 0.348, 0.859
48.0, -0.134, 0.302, 0.918
50.0, -0.147, 0.271, 0.880
52.0, -0.160, 0.220, 0.845
54.0, -0.176, 0.196, 0.817
56.0, -0.187, 0.161, 0.829
58.0, -0.205, 0.091, 0.761
60.0, -0.205, 0.091, 0.631